A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway. The magnetic bearing system includes at least two engines successively arranged in a travel direction, wherein each of the at least two engines comprises at least two poles. The at least two engines have centerlines in the travel direction that are fixedly offset from each other, and the at least two engines are configured to be magnetically coupled to the guideway through air gaps.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

The invention relates to a magnetic bearing assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path. The invention also relates to a linear guideway assembly implementing one or more such magnetic bearing assemblies. The invention aims to provide a solution for the above identified problems, allowing linear displacement of a rigid body relative to another rigid body along a linear displacement path and in particular allowing control of a translational degree of freedom of a rigid body relative to another rigid body, said magnetic bearing assembly comprising: at least one magnetic bearing module being mounted to one of said rigid bodies and consisting of at least: a ferromagnetic core; a first magnetic element positioned on a first side of said ferromagnetic core; a coil being wound around said ferromagnetic core; at least a first static back iron being mounted to the other one of said rigid bodies and positioned, during use, at some gap distance from said one bearing module.

A magnetic bearing device and a positioning system which includes the magnetic bearing device are provided. The magnetic bearing device comprises a stator and a moving member which are formed from a coil device with at least one coil body, magnets, and/or flux guide members, where the moving member is movable relative to the stator along a direction of motion and the stator and the moving member are configured such that a magnetic force can be exerted upon the moving member when electrical energy is applied to the coil device to form an air gap between the stator and the moving member. The coil device is arranged exclusively in the stator and the extension of the moving member in the direction of motion is smaller than the extension of the stator in this direction. The extension of the stator corresponds to the length of the at least one coil body.

A track element of a non-contact bearing extending in a length direction. The track element includes a conductive material strip having a facing surface with a height and width and a rear surface opposite the facing surfaces. The conductive material strip includes a slit extending in a height direction to form a first leg and a second leg, in which the first leg is bent in a zig-zag shape and the second leg is bent in a zig-zag shape that is complementary to the bending of the first leg. When the conductive material strip is viewed in a direction parallel to the facing surface, the first leg and the second leg cross each other at least once.

The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

Provided is a contactless vertical transfer device using a linear motor. The contactless vertical transfer device using a linear motor includes: a transfer unit for picking up an article; and a linear motor located on a side portion of the transfer unit to move the transfer unit, wherein the linear motor comprises at least one driving unit that is located on a side portion of the transfer unit and provided with a mover which a coil is wound; and a rail unit that is located apart from the mover by a predetermined distance in a lateral direction and provided with a plurality of magnet portions disposed in a transfer direction of the transfer unit. The transfer unit is moved along the rail unit by a thrust force of the mover and the magnet portion.

An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.

A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway. The magnetic bearing system includes at least two engines successively arranged in a travel direction, wherein each of the at least two engines comprises at least two poles. The at least two engines have centerlines in the travel direction that are fixedly offset from each other, and the at least two engines are configured to be magnetically coupled to the guideway through air gaps.

Provided is an electric stabiliser for stabilising a floating structure that includes a track for guiding a mover as a moving stabiliser mass. A direct current (DC) linear motor includes a planar stator that extends along the track and the mover that is adapted to move forwards and backwards along the track as the stabiliser mass. The planar stator includes a polyphase stator winding with winding coils connected. The mover includes permanent motor magnets facing the polyphase stator winding that define mover poles of alternating polarity along the track direction. Two active magnetic bearings is positioned between the track and a main body of the mover for selectively levitating the mover. In use, the active magnetic bearings levitate the mover above the track and the DC linear motor is controlled to move the mover backwards and forwards along the track to dampen a rolling/pitching movement of the floating structure.