A non-contact bearing is provided. In a suspended state, the non-contact bearing is disposed with a predetermined spacing to a first guide surface. The non-contact bearing includes: a bearing body and a micro electro mechanical layer. The bearing body includes a second guide surface, wherein the second guide surface is opposite to the first guide surface. The micro electro mechanical layer is disposed on the second guide surface, and includes at least one micro sensor and/or at least one micro actuator.

A drive for an XY-table includes a stationary, ferromagnetic and U-shaped yoke including a first limb and a second limb which are located together in one plane, and having a movable ferromagnetic bar, the yoke and the bar carrying a magnetic circuit with a flux that takes a path across air gaps between the limbs and the bar, and causes vertical reluctance forces there which counteract the gravitational force of the bar. Bar is parallel to and below the plane defined by the limbs.

An electromagnetic actuator comprises two units, which, upon electromagnetic interaction, are configured to cause a guided movement relative to each other in translational and rotational directions with a bearing gap in between. The electromagnetic actuator is configured to supply compressed gas to the bearing gap to create a film of gas between the units constituting a frictionless floating bearing.

A magnetic bearing for supporting the movement of a piston sliding into a cylinder comprised in a compressor. The piston comprises a first rod that connects the piston to a cross-head of the compressor and an extension rod, which is connected to the first rod. The magnetic bearing comprises a first group of magnets arranged on a first side of the extension rod of the piston, a second group of magnets arranged on a second side of the extension rod of the piston, wherein the magnetic forces exerted by the first group of magnets and the second group of magnets respectively allow the piston to be supported during its movement. The present disclosure also concerns a method of assembling a magnetic bearing.

A magnetic bearing device and a positioning system which includes the magnetic bearing device are provided. The magnetic bearing device comprises a stator and a moving member which are formed from a coil device with at least one coil body, magnets, and/or flux guide members, where the moving member is movable relative to the stator along a direction of motion and the stator and the moving member are configured such that a magnetic force can be exerted upon the moving member when electrical energy is applied to the coil device to form an air gap between the stator and the moving member. The coil device is arranged exclusively in the stator and the extension of the moving member in the direction of motion is smaller than the extension of the stator in this direction. The extension of the stator corresponds to the length of the at least one coil body.

A high-precision machine tool with at least one linear drive and guide-bearing, having at least one linear motor, which has at least one magnet arranged on one of the machine components and at least one coil arranged on the other machine component and operatively connected to the at least one magnet, wherein the at least one magnet and the at least one coil are configured to exert an opposing attractive force and to perform an at least temporarily relative movement in relation to one another; at least one hydrostatic fluid bearing arranged on one of the two machine components and operatively connected to the other machine component, wherein the hydrostatic fluid bearing exerts a repulsive force opposite to the attractive force; and a first bearing gap, formed between the two machine components, the height of which is greater than 0 m and less than or equal to 10 m.

The invention relates a capacitive sensor device for determining a distance between a rigid body and another rigid body in a system for contactless linear displacement along a linear displacement path of the rigid body relative to the other rigid body, the capacitive sensor device comprising a capacitive sensor component with a first sensor node mounted to the rigid body and a second sensor node mounted to the other rigid body; a transmission component having at least a first input node for receiving an input signal as well as an output node for providing an output signal representative of the distance; a frequency-dependent input signal generator operatively connected to the first sensor node of the capacitive sensor component and the first input node of the transmission component being operatively connected to the second sensor node of the capacitive sensor component.

A stage assembly for supporting and moving electronic components includes a guide rail. The stage assembly also includes a carrier for supporting an electronic component and moveable along a length of the guide rail. The stage assembly further includes a linear motor comprising a rotor and a stator assembly positioned along the length of the guide rail, the rotor operatively coupled to the carrier to actuate movement of the carrier along the length of the guide rail. The stage assembly yet further includes a flux shield formed of a ferromagnetic material and positioned between the stator assembly and the carrier. The stage assembly also includes one or more magnetic preload assemblies operatively coupled to the carrier.