The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

An arrangement for controlling and measuring flow. The arrangement includes a fluid control barrier and a flow-measuring apparatus upstream of the fluid control barrier. The fluid control barrier includes a pair of plates for opening and closing a pipe, and the plates are movable towards a center line of the pipe to open the pipe and produce a symmetrical flow profile for the flow-measuring apparatus.

The present invention relates to a proportional valve (1), particularly for fluid dispensing devices, comprising a main body (3) in which an inlet conduit (5) for an inlet fluid to said proportional valve (1) and an outlet conduit (7) for a fluid leaving said proportional valve (1) are defined, said inlet conduit (5) and said outlet conduit (7) being in fluid communication with each other, said proportional valve (1) comprising at least one shutter element (9) arranged between said inlet conduit (5) and said outlet conduit (7) adapted to intercept said fluid, said shutter element (9) comprising a movable fluid sealing element (90) adapted to intercept said fluid at one of said inlet conduit (5) and said outlet conduit (7) and a lever element (92) associated at a first end with said movable fluid sealing element (90) and at a second end with an actuator device (11), said lever element (92) being hinged about said main body (3) at a fulcrum point (94) arranged between said first end and said second end of said lever element (92), said actuator device (11) being configured for moving said lever element (92) of said shutter element (9) around said fulcrum point (94) so as to move said movable fluid sealing element (90) between an opening position in which the fluid communication between said inlet conduit (5) and said outlet conduit (7) is allowed and a closing position in which the fluid communication between said inlet conduit (5) and said outlet conduit (7) is prevented.

According to the invention, said actuator device (11) comprises an actuator element (13) made of a shape memory material which can be operated progressively to move said lever element (92) of said shutter element (9) around said fulcrum point (94) so as to proportionally vary the degree of opening of said movable fluid sealing element (90) between said opening position and said closing position, and vice versa, the variation of said degree of opening of said movable fluid sealing element (90) allowing the regulation of the flow rate of said fluid exiting from said outlet conduit (7).

An air control valve for a fuel cell vehicle includes: a valve housing having a first port and a second port; a first rotary shaft rotatably mounted in the valve housing and configured to be rotated by a driving source; a first valve member connected to the first rotary shaft and configured to selectively open or close the first port by rotating about the first rotary shaft; a second rotary shaft mounted in the valve housing so as to be rotatable relative to the first rotary shaft; a second valve member connected to the second rotary shaft and configured to selectively open or close the second port by rotating about the second rotary shaft; and a spring member connected, at one end thereof, to the first rotary shaft and connected, at the other end thereof, to the second rotary shaft, thereby improving stability and reliability.

Disclosed is a regulating vacuum having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.

The disclosure relates to a valve assembly 10 for controlling a volute connecting opening 324 of a multi-channel turbine 500. The valve assembly 10 comprises a housing portion 300, a valve body 100 and an internal lever 200. The housing portion 300 defines a first volute channel 312, a second volute channel 314 and a volute connecting region 320. The housing portion 300 further comprises a cavity 340. The cavity 340 is separated from the volutes 312, 314 and can be accessed from outside the housing portion 300 via a housing opening 342 which extends from outside the housing portion 300 into the cavity 340. The volute connection region 320 is located between the first volute channel 312 and the second volute channel 314 and defines a volute connecting opening 324. The valve body 100 is inserted in the cavity 340 of the housing portion 300 and comprises at least one fin 120. The internal lever 200 is coupled with the valve body 100 and configured to pivotably move the valve body 100 between a first position and a second position. In the first position of the valve body 100, the fin 120 blocks the volute connecting opening 324.

The invention relates to a valve assembly (100) for a multi-scroll turbine (10) for controlling an overflow of exhaust gases between a first spiral (36) and a second spiral (38) and for controlling a bypass opening (50). The valve assembly 100 comprises a lever (110) and a valve closing element (120) which is operatively connected to the lever (110). Furthermore, the valve assembly (100) comprises a spring element (130) which is designed to pre-bias the valve closing element (120) the against lever (110).

Valve assemblies with clutches adapted for dual valve member actuation. A valve assembly includes a valve body that includes a first portion and a second portion, a bore, a primary opening, and a secondary opening. A primary valve shaft is disposed within the bore and has a primary end portion, the secondary valve shaft is disposed within the bore and has a secondary end portion facing the primary end portion of the primary valve shaft. A primary valve member is movable relative to the primary opening and coupled to the primary valve shaft, the secondary valve member is movable relative to the secondary opening and coupled to the secondary valve shaft. A clutch is shiftable between a first position enabling the primary valve shaft to move independently of the secondary valve shaft and a second position enabling the secondary valve shaft to move with the primary valve shaft.

A valve including a control assembly that is configured to control fluid flow through the valve, The control assembly includes a driving element and a valve member. The driving element is rotatable about an axis between a first operating state in which the driving element maintains contact between the valve member and a valve seat and a second operating state in which the driving element does not maintain contact between the valve member and the valve seat. The valve member is rotatable about the axis independent of the driving element when the driving element is in the second operating state.