A valve for controlling a flow of a fluid comprises: a sealing plate comprising a plurality of ports for passage of the fluid through the sealing plate in a direction substantially perpendicular to the plane of the sealing plate; and a plurality of valve members, each valve member comprising at least one anchor portion arranged in fixed relationship with the sealing plate and a closure portion which is contiguous with the anchor portion and in movable relationship with the sealing plate under a differential pressure of the fluid across the valve, the closure portion being movable away from the sealing plate under a first differential pressure direction to open at least one of the ports and toward the sealing plate under a second and opposite differential pressure direction to close said at least one of the ports. The anchor portions of the plurality of valve members partition the closure portions from each other such as to define a plurality of valve cells, each valve cell comprising one of the valve members and at least one associated port.

A micro-valve includes an orifice plate having a first surface, a second surface and an orifice extending from the first surface to the second surface. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam includes a base portion and a cantilevered portion. The base portion is separated from the orifice plate by a predetermined distance. The cantilevered portion extends from the base portion such that an overlapping portion thereof overlaps the orifice. The actuating beam is movable between a closed position and an open position. The micro-valve also includes a sealing structure including a sealing member disposed at the overlapping portion of the cantilevered portion. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.

A micro-valve includes an orifice plate including an orifice. The micro-valve further includes an actuating beam having a first end and a second end. The actuating beam also includes a base layer and a layer of piezoelectric material disposed on the base layer, a bottom electrode layer, and a top electrode layer. At an electrical connection portion of the actuating beam, the layer of piezoelectric material includes a first via, and a portion of the top electrode layer disposed within the first via, and a portion of the bottom electrode disposed beneath the first via. The actuating beam includes a base portion extending from the electrical connection portion and a cantilevered portion extending from the base portion. The cantilevered portion is movable in response to application of a differential electrical signal between the bottom electrode layer and the top electrode layer to one of open or close the micro-valve.

A method of constructing a micro-valve includes providing a substrate for an actuating beam of the micro-valve, the substrate including a first surface and a second surface. The method also includes forming a plurality of constituent layers on the first surface of the actuating beam, including a layer of piezoelectric material. The method also includes removing a portion of the substrate from at least one of the first surface or the second surface to define a cantilevered portion of the actuating beam. The method also includes providing an orifice plate including an orifice. The method also includes providing a valve seat on a surface of the orifice plate, the valve seat having an opening aligned with the orifice. The method also includes attaching the surface of the orifice plate to the second surface via an adhesive such that an overlapping portion of the cantilevered portion overlaps the orifice.

A micro-valve includes an orifice plate having a first surface, a second surface and an orifice extending from the first surface to the second surface. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam includes a base portion and a cantilevered portion. The base portion is separated from the orifice plate by a predetermined distance. The cantilevered portion extends from the base portion such that an overlapping portion thereof overlaps the orifice. The actuating beam is movable between a closed position and an open position. The micro-valve also includes a sealing structure including a sealing member disposed at the overlapping portion of the cantilevered portion. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.

A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.

A microfluidic device (100) comprising at least one passive valve (PV, 120, 130), the passive valve being constituted by a sequence of a first carrier layer (CL 1) with an aperture providing a passage (P 1) for fluid flow, a first binding layer (BLI) with a first opening, a flexible layer (FL) with a through-hole (TH), a second binding layer (BL2) with a second opening, and a second carrier layer (CL2). Moreover, the flexible layer (FL) can move within a valve chamber (VC) constituted by the openings. Depending on the pressure difference across the passive valve (PV), the flexible layer (FL) can bend towards the first carrier layer (CLI) and close the aperture, while it opens the passage (P1) when bending in the opposite direction. Two of such properly oriented passive valves together with an intermediate active valve (AV) can constitute a one-stroke pump. A method for manufacturing such a fluidic device is also disclosed.

A method for determining a treatment agent and dosage level for a biologic material includes the biologic sample is pumped into each of a first plurality of parallel pathways from the first reservoir using a micro-pump. A separate treatment agent of the plurality of treatment agents is applied within each of the first plurality of parallel pathways. The treatment agent providing a best treatment efficacy for the predetermined biologic material within the biologic sample is determined. A second portion of the biologic sample is pumped into a selected second parallel pathway associated with the determined treatment agent of a second plurality of parallel pathways from the first reservoir using a second micro-pump. The determined treatment agent at a plurality of different dosage levels is applied within the selected second parallel pathway. A dosage level of the plurality of different dosage levels of the determined treatment agent is determined.

An example fluidic micro electromechanical system may include a substrate and a first layer supported by the substrate. The first layer forms sides of a chamber, a passage through one of the sides and a chamber and a check valve leaf. The check valve leaf is pivotable about an axis nonparallel to the substrate to open and close the passage. The system may further include a second layer over the chamber, an opening into the chamber and a resistor supported within the chamber.

A micro-valve includes an orifice plate including an orifice and a cantilevered beam coupled in spaced relation to the orifice plate and moveable between positions where the orifice is closed and opened by the cantilevered beam. The cantilevered beam includes one or more piezoelectric layers that facilitate bending of the cantilevered beam in response to the application of one or more electrical signals to the one or more piezoelectric layers. In response to respective application and termination of the one or more electrical signals to the one or more piezoelectric layers the cantilevered beam either: moves from a starting position spaced from the orifice plate toward the orifice plate and returns back to the starting position spaced from the orifice plate; or moves from a starting position adjacent the orifice plate away from the orifice plate and returns back to the starting position adjacent the orifice plate.