The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve which uses a single piezoelectric actuator. The present invention has a wide range of applications including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The present invention allows for the implementation of a three-way microvalve device and method of fabrication that can be tailored to the requirements of a wide range of applications and fluid types. The microvalve may employ a novel pressure-balancing scheme wherein the fluid pressure balances the actuator mechanism so that only a small amount of actuation pressure (or force) is needed to switch the state of the actuator and device from open to closed, or closed to open.

The micropump including a pump chamber which can be fluidly filled or emptied both by means of a passage opening and an inlet, the pump chamber being covered with a disk-shaped actuator so that the volume of the pump chamber can be changed by deflecting the actuator, the passage opening being arranged in a side of the pumping chamber opposite the actuator, and the inlet has a smaller or similar flow resistance compared to the through opening. An entrance to the passage opening can be closed by means of the deflected actuator, so that a valve is formed in the basic state, or closed by means of the undeflected actuator, so that a valve is formed in the basic state. The micropump can have a second pump chamber with an actuator and inlet, the passage opening of which is connected to that of the first pump chamber.

A valve includes an orifice plate including at least one orifice surrounded by an orifice plate seal surface, a seal plate, and an actuator. The seal plate includes a seal boss having a seal boss surface that faces the orifice plate, and a pocket that overlays the at least one orifice. The pocket includes a recessed surface that is surrounded by the seal boss surface and is displaced from the seal boss surface along an axis. The actuator is configured to move the seal plate relative to the orifice plate along the axis to transition the valve between open and closed states. The seal boss surface engages the orifice plate seal surface, surrounds the at least one orifice, and blocks a flow of fluid through the at least one orifice when the valve is in the closed state.

A micro-valve includes an orifice plate having a first surface, a second surface and an orifice extending from the first surface to the second surface. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam includes a base portion and a cantilevered portion. The base portion is separated from the orifice plate by a predetermined distance. The cantilevered portion extends from the base portion such that an overlapping portion thereof overlaps the orifice. The actuating beam is movable between a closed position and an open position. The micro-valve also includes a sealing structure including a sealing member disposed at the overlapping portion of the cantilevered portion. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.

A miniature transportation device is disclosed and includes a gas inlet plate, a resonance plate and a piezoelectric actuator, which are stacked on each other sequentially. The gas inlet plate comprises at least one inlet, at least one convergence channel and a convergence chamber. The convergence channel is in fluid communication with the inlet and the convergence channel. The resonance plate comprises a central aperture. A chamber gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is enabled, the gas is fed into the miniature gas transportation device through the inlet of the gas inlet plate, converged to the convergence chamber through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, and transferred along a transportation direction through a vacant space of the piezoelectric actuator to be discharged continuously.

A miniature fluid transportation device is provided and includes a convergence component, a valve component, an outlet plate and a plurality of fluid transportation actuation components. The plurality of fluid transportation actuation components are disposed on the convergence component so as to transport the fluid to the convergence component. The convergence component guides the fluid transported by the fluid transportation actuation components to the outlet plate through the valve component. The outlet plate guides the fluid from different transportation actuation components back to the convergence component by a separation guiding block. The fluid is converged in a convergence central slot of the convergence component and is discharged out through a collection channel of the outlet plate. Consequently, the problem of interference owing to the convergence of the fluid transported by different fluid transportation actuation components can be avoided.

A method of constructing a micro-valve includes providing a substrate for an actuating beam of the micro-valve, the substrate including a first surface and a second surface. The method also includes forming a plurality of constituent layers on the first surface of the actuating beam, including a layer of piezoelectric material. The method also includes removing a portion of the substrate from at least one of the first surface or the second surface to define a cantilevered portion of the actuating beam. The method also includes providing an orifice plate including an orifice. The method also includes providing a valve seat on a surface of the orifice plate, the valve seat having an opening aligned with the orifice. The method also includes attaching the surface of the orifice plate to the second surface via an adhesive such that an overlapping portion of the cantilevered portion overlaps the orifice.

A micro-valve includes an orifice plate including a first surface and a second surface, and an orifice extending from the first surface to the second surface. The micro-valve also includes a spacing member disposed on the first surface and offset from the orifice, a valve seat disposed on the first surface. The valve seat defines an opening in fluid communication with the orifice in a flow direction. The micro-valve also includes an actuating beam disposed on the spacing member extending from the spacing member toward the orifice, the actuating beam being moveable between an open position and a closed position. The micro-valve also includes a sealing member affixed to an end portion of the actuating beam. In a closed position, a sealing surface of the sealing member contacts the valve seat to close the micro-valve.

Examples include microfluidic devices. Example microfluidic devices comprise a microfluidic channel, a capillary chamber, and a fluidic actuator. The microfluidic channel is fluidly connected to the capillary chamber. The capillary chamber is to restrict flow of fluid therethrough. The fluidic actuator is positioned proximate the capillary chamber. The fluidic actuator is to actuate to thereby initiate flow of fluid through the capillary chamber.