A particle manipulation system uses a MEMS-based, microfabricated particle manipulation device which has a sample inlet channel, output channels, and a movable member formed on a substrate. The device may be used to separate a target particle from non-target material in a sample stream. In order to improve the sorter speed, accuracy or yield, the particle manipulation system may also include a microfluidic structure which focuses the target particles in a particular portion of the sample inlet channel. The particle manipulation device may have two separate sort output channels, wherein the sort channel used depends on the characteristics of the sort pulse delivered to the micromechanical particle manipulation device.

A method and apparatus for sorting particles moving through a closed channel system of capillary size comprises actuators and chambers for selectively generating a pressure pulse to separate a particle having a predetermined characteristic from a stream of particles. The particle sorting system may further include a buffer for absorbing the pressure pulse. The particle sorting system may include a plurality of closely coupled sorting modules which are combined to further increase the sorting rate. The particle sorting system may comprise a multi-stage sorting device for serially sorting streams of particles, in order to decrease the error rate.

A microfluidic valve formed in a body having a first and a second surface; an inlet channel extending in the body from the second surface; a first transverse channel extending in the body in a transverse direction with respect to the inlet channel; and an outlet channel extending in the body from the first surface. The inlet channel, the first transverse channel and the outlet channel form a fluidic path. The microfluidic valve further has an occluding portion, formed by the body and extending over the transverse channel; and a piezoelectric actuator coupled to the occluding portion and configured to move the occluding portion from an opening position of the valve, where the occluding portion does not interfere with the fluidic path, and a closing position of the valve, where the occluding portion interferes with and interrupts the fluidic path.

A gas transportation device includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric component and an outlet plate stacked sequentially. The gas transportation device includes a valve disposed within at least one of the inlet of the inlet plate and the outlet of the outlet plate. A first chamber is formed between the resonance plate and the actuating plate, and a second chamber is formed between the actuating plate and the outlet plate. When the piezoelectric component drives the actuating plate, a pressure gradient is formed between the first and second chambers and the valve is opened. Accordingly, gas is inhaled into the convergence chamber via the inlet, transported into the first chamber through a central aperture of the resonance plate, transported into the second chamber through a vacant space of the actuating plate, and then discharged out from the outlet, so as to transport the gas.

A manufacturing method of micro channel structure is disclosed and includes steps of: providing a substrate; depositing and etching to form a first insulation layer; depositing and etching to form a supporting layer; depositing and etching to form a valve layer; depositing and etching to form a second insulation layer; depositing and etching to form a vibration layer, a lower electrode layer and a piezoelectric actuating layer; providing a photoresist layer and depositing and etching to form a plurality of bonding pads; depositing and etching to from a mask layer; etching to form a first chamber; and etching to form a second chamber.

A fluid control device (1) includes a case (21) including a case top plate, a case side plate, and a case bottom plate and having an internal space (59) and a cavity, a pump (11) provided at a position at which the pump (11) divides the internal space (59) into a bottom-plate-side region and a top-plate-side region, the pump (11) being configured to generate a flow of a fluid between the bottom-plate-side region and the top-plate-side region and control the flow direction of the fluid, and a fixing member (31) that fixes the case (21) in place. The case (21) is mounted on the fixing member (31) by using the case top plate or the case bottom plate as a mounting surface (B).

A miniature fluid control device for transporting gas is disclosed, which includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate stacked on each other. The gas inlet plate includes at least one inlet, at least one convergence channel and a circular cavity which forms a convergence chamber. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric plate, wherein the suspension plate has a cylindrical bulge aligned with the circular cavity. The ratio of a second diameter of the cylindrical bulge to a first diameter of the circular cavity is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device.

A miniature fluid control device is provided and includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The resonance plate is assembled and combined with the gas inlet plate. The piezoelectric actuator is assembled and combined with the resonance plate. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric plate. The suspension plate has a first surface and a second surface. The outer frame is arranged around the suspension plate and has an assembling surface. The piezoelectric plate is attached on the second surface. The at least one bracket is formed between the suspension plate and the outer frame as making the first surface of the suspension plate non-coplanar with the assembling surface of the outer frame, so that a specific chamber spacing is maintained between the first surface of the suspension plate and the resonance plate.

A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

A method and apparatus for sorting particles moving through a closed channel system of capillary size comprises actuators and chambers for selectively generating a pressure pulse to separate a particle having a predetermined characteristic from a stream of particles. The particle sorting system may further include a buffer for absorbing the pressure pulse. The particle sorting system may include a plurality of closely coupled sorting modules which are combined to further increase the sorting rate. The particle sorting system may comprise a multi-stage sorting device for serially sorting streams of particles, in order to decrease the error rate.