A heat exchanger includes first and second fluid circuits. The first fluid circuit is formed by a first set of fins, a first inlet header, and a first outlet header. The first set of fins extend radially and are coaxial with each other. The first inlet header is fluidly connected to and is disposed on an upstream end of the first fins. The first outlet header is fluidly connected to and is disposed on a downstream end of the first fins. The second fluid circuit is formed by a second set of fins, a second inlet header, and a second outlet header. The second fins extend radially and are coaxial with each other. An annular shape of the second inlet header conforms to the circular shape of the first inlet header. An annular shape of the second outlet header conforms to the circular shape of the first outlet header.

A heat exchanger is provided. The heat exchanger includes a first wall manifold. The heat exchanger further includes a second wall manifold spaced apart from the first wall manifold. The heat exchanger further includes a plurality of vanes that extend generally circumferentially between the first wall manifold and the second wall manifold. The heat exchanger further includes a plurality of fluid circuits defined within the heat exchanger. Each fluid circuit in the plurality of fluid circuits includes an inlet channel portion and an outlet channel portion defined within the first wall manifold. A return channel portion defined within the second wall manifold. At least one passage portion of a plurality of passage portions defined within each vane of the plurality of vanes. The at least one passage portion extends between the return channel portion and one of the inlet channel portion and the outlet channel portion.

A finless heat exchanger includes two headers and a plurality of heat transfer tubes spaced apart from each other and arranged side by side. The two headers each have a plurality of insertion holes, to which both ends of the heat transfer tubes are fitted and connected. The heat transfer tubes each include straight portions extending in a direction orthogonal to an arrangement direction, in which the heat transfer tubes are arranged, and turning portions. The straight portions and the turning portions are alternately and continuously arranged.

Embodiments described herein relate to a heat exchanger for abating compounds produced in semiconductor processes. When hot effluent flows into the heat exchanger, a coolant can be flowed to walls of a fluid heat exchanging surface within the heat exchanger. The heat exchanging surface can include a plurality of channel regions which creates a multi stage cross flow path for the hot effluent to flow down the heat exchanger. This flow path forces the hot effluent to hit the cold walls of the fluid heat exchanging surface, significantly cooling the effluent and preventing it from flowing directly into the vacuum pumps and causing heat damage. Embodiments described herein also relate to methods of forming a heat exchanger. The heat exchanger can be created by sequentially depositing layers of thermally conductive material on surfaces using 3-D printing, creating a much smaller footprint and reducing costs.

A heat exchanger includes an inlet manifold and an outlet manifold. A plurality of heat exchanger tubes are in fluid communication with the inlet manifold at a first end portion and the outlet manifold at a second end portion. The outlet manifold fluidly connects outlets on each of the plurality of heat exchanger tubes. A plurality of fluid conduits are in fluid communication with and extending from the outlet manifold. The plurality of fluid conduits are longitudinally spaced along the outlet manifold and are in fluid communication with a common outlet.

A heat exchanger includes a first fluid manifold extending along a first fluid axis from a first fluid inlet to a first fluid outlet. The first fluid manifold includes a first fluid inlet header, a first fluid outlet header, and a nested helical core section. The first fluid inlet header is disposed to fork the first fluid inlet into a plurality of first fluid branches distributed circumferentially and radially about the first fluid axis. The first fluid outlet header is disposed to combine the plurality of first fluid branches into the first fluid outlet. The nested helical core section fluidly connects the first fluid inlet header to the first fluid outlet header via a plurality of nested helical tubes, and includes radially inner and outer groups of circumferentially distributed helical tubes.

A heat exchanger for abating compounds produced in semiconductor processes. When hot effluent flows into the heat exchanger, a coolant can be flowed to walls of a fluid heat exchanging surface within the heat exchanger. The heat exchanging surface can include a plurality of channel regions which creates a multi stage cross flow path for the hot effluent to flow down the heat exchanger. This flow path forces the hot effluent to hit the cold walls of the fluid heat exchanging surface, significantly cooling the effluent and preventing it from flowing directly into the vacuum pumps and causing heat damage. Embodiments described herein also relate to methods of forming a heat exchanger. The heat exchanger can be created by sequentially depositing layers of thermally conductive material on surfaces using 3-D printing, creating a much smaller footprint and reducing costs.

A conduit assembly may comprise: a pipe; a plurality of hollow passages disposed through the pipe; and a plurality of flow guides disposed in the pipe, each flow guide in the plurality of flow guides at least partially defining a respective hollow passage in the plurality of hollow passages. The conduit assembly may act as a heat exchanger.

An apparatus includes a heat exchanger configured to be positioned around and coupled to a multi-axis gimbal. The heat exchanger includes an inlet configured to receive fluid containing heat generated by an equipment package carried by the gimbal. The heat exchanger also includes multiple heat rejection interfaces configured to reject the heat from the fluid into surrounding air in order to cool the fluid. The heat exchanger further includes an outlet configured to provide the cooled fluid from the heat exchanger. The heat rejection interfaces of the heat exchanger extend around the heat exchanger and are configured to reject the heat from the fluid regardless of a direction in which the gimbal is pointing the equipment package.

A heat exchanger with increased heat transfer capability is provided. The heat exchanger includes first and second end plates, tubes extending between the first and second end plates and fins disposed between the tubes. The heat exchanger is disposable within and differs in shape from a space defined between first and second walls such that end corners of the first end plate abut the first wall and a point of the second end plate abuts the second wall, the first wall diverges from the end corners of the first end plate to define a first open region and the second wall diverges from the point of the second end plate to define second open regions. At least one of the first end plate and the second end plates includes enhancements fluidly communicative with the at least one corresponding one of the first open region and the second open regions.