An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway and a method for controlling the magnetic bearing system. The magnetic bearing system includes at least one engine, which includes at least two poles, at least one permanent magnet and at least one coil. The engine is configured to be magnetically coupled to the guideway through at least one air gap.

A magnet-type rodless cylinder (1) is provided with a guide mechanism having an outer rolling groove (26), an inner rolling groove (29), a cylinder body (32), a pair of connection paths (34) for connecting an area between the outer rolling groove and the inner rolling groove with the cylinder body, and a plurality of steel balls (36) that can roll within an endless circuit (35) formed of the cylinder body, the connection paths and the area between the outer rolling groove and the inner rolling groove, wherein the connection paths (34) are formed at a pair of inner members, i.e. return caps (33), disposed on the inner sides of metal end plates (12) that are attached to the front and rear ends in the sliding direction of a sliding body (4).

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.