The air valve includes a supply valve configured to open and close an air supply passage through which the air gas to be supplied to the fuel cell stack from outside flows; a switching valve configured to switch between a state in which the air gas supplied from the outside flows through the air supply passage and a state in which the air gas supplied from the outside flows through a bypass passage that branches from the air supply passage; and a link mechanism connected to the supply valve and the switching valve and configured to actuate the supply valve and the switching valve. The link mechanism includes an arm portion fixed at the supply valve; and a cam plate fixed at the switching valve, wherein the cam plate includes a guide portion with which the arm portion is to contact.

The valve component comprises a valve member movable between an open position and a closed position. The valve component comprises a valve control mechanism including a drive member that moves the valve member. The drive member rotates the valve member between the open position and an intermediate position and linearly moves the valve member between the intermediate position and the closed position. The valve control mechanism includes a cam to drive the drive member. The cam includes a cam slot to engage the drive member. The cam slot includes a recess to receive the drive member in the closed position of the valve member so that the recess locates the drive member to resist or prevent linear movement of the valve member away from the valve closed position towards the valve intermediate position.

Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a shaft, a first gate and a second gate coupled to the shaft at opposite sides thereof, and an actuator coupled to the shaft. The actuator is configured to tilt together the shaft, the first gate, and the second gate to a first sealed gate position or to a second sealed gate position. The actuator can be operated using a pneumatic mechanism, an electro-magnetic mechanism, or a cam follower mechanism.

The valve component comprises a valve member movable between an open position and a closed position. The valve component comprises a valve control mechanism including a drive member that moves the valve member. The drive member rotates the valve member between the open position and an intermediate position and linearly moves the valve member between the intermediate position and the closed position. The valve control mechanism includes a cam to drive the drive member. The cam includes a cam slot to engage the drive member. The cam slot includes a recess to receive the drive member in the closed position of the valve member so that the recess locates the drive member to resist or prevent linear movement of the valve member away from the valve closed position towards the valve intermediate position.

Disclosed is a valve, comprising a valve body, an inner valve seat and a valve core. The valve core is mounted in the valve body. The inner valve seat is mounted in the valve body. The inner valve seat has a annular body and a seal structure extending inwards from an inner peripheral surface of the annular body, wherein the seal structure is arranged in such a manner that the seal structure seals a gap formed among the valve body, the inner valve seat and the valve core when the valve is in a closed state. After the valve is used for discharging liquid, the amount of liquid residue inside the valve can be greatly reduced.

The air valve includes a supply valve configured to open and close an air supply passage through which the air gas to be supplied to the fuel cell stack from outside flows; a switching valve configured to switch between a state in which the air gas supplied from the outside flows through the air supply passage and a state in which the air gas supplied from the outside flows through a bypass passage that branches from the air supply passage; and a link mechanism connected to the supply valve and the switching valve and configured to actuate the supply valve and the switching valve. The link mechanism includes an arm portion fixed at the supply valve; and a cam plate fixed at the switching valve, wherein the cam plate includes a guide portion with which the arm portion is to contact.

A valve component for a valve, the valve comprises a valve housing defining a hollow bore along which flowable material may flow. The valve component comprises a valve member movable between a valve open position for the valve member to open the hollow bore and a valve closed position for the valve member to close the hollow bore, and a valve control mechanism including a drive member configured to be operable to move the valve member between the valve open position and the valve closed position, the drive member operable to rotate the valve member between the valve open position and a valve intermediate position and to linearly move the valve member between the valve intermediate position and the valve closed position.

A fluid distribution apparatus comprising a fluid chamber, at least one fluid inlet, a plurality of fluid outlets and a distribution unit, including a plurality of valve elements for closing the fluid outlets and a camshaft supported to be rotatable about a rotary axis, having a plurality of cams for operating the valve elements. The valve elements are formed as valve flaps and the cams of the camshaft are provide to lift the valve elements off of the fluid outlets as a function of a rotary position of the camshaft.

A rising stem valve comprises a hollow valve body having a pair of ports defining a flow path through the valve body, a flange base through which one of the ports extends and a valve bonnet opposite the flange base. The valve includes a plunger/seal assembly able to be extended within the valve body to a first position for sealing the port in the flange base and to a second position for unsealing the port in the flange base. The valve also includes a locking mechanism for securing the plunger/seal assembly in the first position. The locking mechanism includes at least one cam lever attached to the valve body and a corresponding groove in a valve stem of the plunger/seal assembly.

A flow regulation device for liquid having a body with an inlet opening, an outlet opening, and a cavity between the two openings. An actuating means is disposed in the cavity for stopping and starting the flow of liquid through said device. The actuating means is configured to be moved in a first direction to start the flow of liquid through said device and in the first direction to stop the flow of liquid through said device. The actuating may comprise an upper button and a lower cam.