A heat transfer media that provides more complete and more even use of the media volume by enhancing the characteristics and/or directions of fluid flow across the media. The heat transfer media includes a heat transfer block having one or more layers that include longitudinal flow passages for enabling fluid flow in the longitudinal direction across each layer, and also include transverse flow passage for enabling lateral cross-flow between the longitudinal flow passages. The heat transfer block may include a plurality of stackable plates, with each plate having fins laterally spaced apart to define longitudinally extending channels, and at least one aperture extending transversely through at least one fin for enabling transverse cross-flow between the longitudinal channels. The aperture may be configured as a recessed groove in the fin, and the fin may have ridge portions longitudinally spaced apart to at least partially define the recessed groove.

The present device is a fluid bed regenerative thermal oxidizer configured to minimize dead spaces within it and eliminate the need for complex valve systems, which are typically required to move treated and untreated air across fixed beds. The present device can be a fluid bed regenerative thermal oxidizer comprising a vertical stack having a combustion chamber near its interior center and desorber shelves located within the vertical stack above the combustion chamber and adsorber shelves located within the vertical stack below the combustion shelves. Ceramic spheres can be used as heat sinks that flow from the desorber shelves, around the combustion chamber and onto the adsorber shelves and then back to the desorber shelves. In this way heat from the combustion can be captured by the heat exchange material on the desorber shelves and released to preheat untreated air on the adsorber shelves.

In a first cycle, an effluent gas composition including volatile organic compounds flows into a first vessel having heated ceramic material therein, forming a heated effluent composition, which then flows into a combustion/retention chamber connected to the first vessel, the combustion/retention chamber comprising a burner, which combusts VOCs in heated effluent composition. The hydrocarbon-depleted heated effluent composition flows into a second vessel with a second ceramic material therein, and heat transferred thereto. A hydrocarbon-depleted first cycle cooled effluent composition is directed into a first indirect heat exchanger, transferring heat to a very low VOC airstream. The heated very low VOC airstream is then directed into a unit designed to employ the heated very VOC airstream for heating. The effluent composition is then directed into a second indirect heat exchanger, transferring heat to a water stream. The direction of flow is reversed in a second cycle, while a third vessel is purged.

The present device is a fluid bed regenerative thermal oxidizer configured to minimize dead spaces within it and eliminate the need for complex valve systems, which are typically required to move treated and untreated air across fixed beds. The present device can be a fluid bed regenerative thermal oxidizer comprising a vertical stack having a combustion chamber near its interior center and desorber shelves located within the vertical stack above the combustion chamber and adsorber shelves located within the vertical stack below the combustion shelves. Ceramic spheres can be used as heat sinks that flow from the desorber shelves, around the combustion chamber and onto the adsorber shelves and then back to the desorber shelves. In this way heat from the combustion can be captured by the heat exchange material on the desorber shelves and released to preheat untreated air on the adsorber shelves.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

An apparatus for thermal exhaust gas purification includes at least one thermal reactor to which a raw gas to be purified is supplied and in which the supplied raw gas is thermally purified, and an energy recovery apparatus to which a gas purified in the thermal reactor is supplied via at least one outlet line. For improving the balance of energy, it is proposed that the energy recovery apparatus includes at least one condensation heat exchanger in which the purified gas is cooled down such that condensable substances contained in the purified gas condense, and enthalpies released thereby are transmitted to a heat exchange medium and/or the raw gas upstream of the thermal reactor.

Various embodiments disclosed herein include a system and method for processing an exhaust gas. The system comprises a regenerative thermal oxidizer (RTO), a bypass flow module in parallel with the RTO, and a mixing module disposed downstream of the RTO; wherein the RTO is configured to oxidize a first part of the exhaust gas and produce a hot tail gas and deliver a predetermined amount of the hot tail gas outside of the RTO, and the mixing module is configured to receive the predetermined amount of the hot tail gas; and wherein the bypass flow module is configured to receive and bypass a second part of the exhaust gas around the RTO into the mixing module; and wherein the second part of the exhaust gas absorbs sufficient heat from the predetermined amount of the hot tail gas in the mixing module for oxidizing and decomposing an organic compound therein.

Block apparatus for use with oxidizers are disclosed. An example apparatus includes a converter including a block having a plurality of channels extending therethrough. The channels define a cellular pattern including at least one central channel and a plurality of surrounding channels. Protrusions extend into the channels from respective inner surfaces of the channels. The inner surfaces are defined by respective peripheral walls.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.