An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

The invention relates to a linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path (x), said linear guideway assembly comprising: one, single rigid body formed as a linear guideway defining said linear displacement path as well as at least one rigid body formed as a product carrier being displaceable along said single linear guideway, wherein the linear guideway assembly further comprises multiple magnetic bearing assemblies for allowing contactless linear displacement of the at least one product carrier relative to the single, linear guideway, wherein all magnetic bearing assemblies are mounted to the product carrier in such way that the magnetic bearing assemblies are arranged in constraining five degrees of freedom (y, z, θ, Φ and ψ) of the product carrier relative to the single, linear guideway, whilst allowing one, translational degree of freedom (x) of the product carrier along the single, linear guideway, wherein all magnetic bearing assemblies, seen in the translational direction (x) of the linear displacement path, are mounted at the side of the product carrier closest to the single, linear guideway.

A rotation mechanism (20) of a vacuum pump (100) includes a magnetic bearing unit (21) having a first outer diameter (91), the magnetic bearing unit (21) being operable as a first radial magnetic bearing (40), and a motor unit (22) provided on a side of a second end (11b) of a rotary shaft (11) relative to the magnetic bearing unit, the motor unit (22) having a second outer diameter (92) larger than the first outer diameter, the motor unit (22) being operable as both a motor (30) and a second radial magnetic bearing (50).

A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway. The magnetic bearing system includes at least two engines successively arranged in a travel direction, wherein each of the at least two engines comprises at least two poles. The at least two engines have centerlines in the travel direction that are fixedly offset from each other, and the at least two engines are configured to be magnetically coupled to the guideway through air gaps.

A magnetic levitation bearing, a magnetic levitation rotor support assembly, and a compressor. The magnetic levitation bearing is used for supporting a rotor by interacting with a thrust disc on the rotor, and comprises: a radial stator core having an annular structure, which is disposed on a radial outer side of the thrust disc and corresponds to the thrust disc in an axial direction of the rotor, the radial stator core and the thrust disc being separated by a first radial gap X1; and a radial control coil, which is disposed on the radial stator core and can generate a radial electromagnetic force to the thrust disc in a radial direction of the rotor.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

The invention relates to a magnetic bearing assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path. The invention also relates to a linear guideway assembly implementing one or more such magnetic bearing assemblies. The invention aims to provide a solution for the above identified problems, allowing linear displacement of a rigid body relative to another rigid body along a linear displacement path and in particular allowing control of a translational degree of freedom of a rigid body relative to another rigid body, said magnetic bearing assembly comprising: at least one magnetic bearing module being mounted to one of said rigid bodies and consisting of at least: a ferromagnetic core; a first magnetic element positioned on a first side of said ferromagnetic core; a coil being wound around said ferromagnetic core; at least a first static back iron being mounted to the other one of said rigid bodies and positioned, during use, at some gap distance from said one bearing module.

A magnetic bearing device and a positioning system which includes the magnetic bearing device are provided. The magnetic bearing device comprises a stator and a moving member which are formed from a coil device with at least one coil body, magnets, and/or flux guide members, where the moving member is movable relative to the stator along a direction of motion and the stator and the moving member are configured such that a magnetic force can be exerted upon the moving member when electrical energy is applied to the coil device to form an air gap between the stator and the moving member. The coil device is arranged exclusively in the stator and the extension of the moving member in the direction of motion is smaller than the extension of the stator in this direction. The extension of the stator corresponds to the length of the at least one coil body.

A rotor, a magnetic bearing, and a drive unit that rotationally drives the rotor. The magnetic bearing includes a bearing stator and a ring-shaped bearing rotor member. The drive unit has a drive stator and a ring-shaped drive rotor member. The bearing stator has a plurality of bearing stator cores consisting of a magnetic material, disposed on an outer peripheral side of the bearing rotor member. The bearing stator core has a first portion extending in a first direction orthogonal to a direction facing the bearing rotor member, and a pair of second portions extending to a bearing rotor member side from both end portions in the first direction of the first portion. The drive stator is formed so as to pass through a position between an outer peripheral surface of the rotor and the first portion core and between the pair of second portions.

A force-balancing magnetic bearing with an adjustable bias magnetic field for a stator permanent magnet motor is provided. The force-balancing magnetic bearing includes four permanent magnetic poles and four electromagnetic poles, wherein a magnetic field energy of the four permanent magnetic poles is sourced from a stator permanent magnet of the stator permanent magnet motor, each permanent magnetic pole is formed by a left permanent-magnet magnetic bridge, a right permanent-magnet magnetic bridge, a magnetic adjusting section, an electromagnetic pole stator, an electromagnetic pole and permanent magnetic pole isolation plate, a permanent-magnet two-side magnetic pole connection section, a left permanent-magnet magnetic pole and a right permanent-magnet magnetic pole, a magnetic flux of each permanent magnetic pole is adjusted by the magnetic adjusting section, and the four electromagnetic poles are adjusted by currents introduced into electromagnetic pole winding coils.