The present disclosure uses a surface property measuring device that includes an arm swingably supported so as to displace a stylus vertically, and an arm lifter that holds the stylus at a predetermined height by rotating the arm. After arranging the arm lifter in a state where the arm can be held at a lower limit height that is only a predetermined drop amount below a predetermined measurement height, the arm is arranged at the measurement height and the stylus contacts a measured object, and in this state surface properties of the measured object are measured.

The present disclosure uses a surface property measuring device that includes an arm swingably supported so as to displace a stylus vertically, and an arm lifter that holds the stylus at a predetermined height by rotating the arm. After arranging the arm lifter in a state where the arm can be held at a lower limit height that is only a predetermined drop amount below a predetermined measurement height, the arm is arranged at the measurement height and the stylus contacts a measured object, and in this state surface properties of the measured object are measured.

A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.

A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.

A method including: a) causing a tool mounted on a machine tool to work on a workpiece, and at least one sensor, which is configured to measure one or more aspects of the tool and/or machine tool, collecting sensor data during said working; b) a measurement device inspecting the part of the workpiece that was worked on at step a) to obtain measurement data; and c) calculating sensor-to-workpiece data calibration information from the sensor data and the measurement data.

A method including: a) causing a tool mounted on a machine tool to work on a workpiece, and at least one sensor, which is configured to measure one or more aspects of the tool and/or machine tool, collecting sensor data during said working; b) a measurement device inspecting the part of the workpiece that was worked on at step a) to obtain measurement data; and c) calculating sensor-to-workpiece data calibration information from the sensor data and the measurement data.

A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.

A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.

A measurement system includes: measurement target information database that stores measurement point information, including measurement conditions and guidance information for each measurement point, associated with the type of the measurement target; a measuring instrument that performs measurements on the measurement target; an image capturing unit that captures an image of a subject; a display unit; a measurement target identification unit that identifies the type of the measurement target based on the image captured by the image capturing unit; a measurement target information obtaining unit for obtaining the measurement point information corresponding to the type of the measurement target identified by the measurement target identification unit from the measurement target information database; and a setting unit that displays the guidance information included in the measurement point information obtained by the measurement target information obtaining unit on the display unit and sets the measurement conditions on the measuring instrument.

There is provided a roughness tester that improves measurement efficiency and roughness measurement accuracy. A roughness tester includes a stylus unit including a stylus that is provided in such a manner as to protrude from and retract into a through hole of a skid and performs scanning movement along a surface of a workpiece, and a stylus displacement detecting unit that detects displacement of the stylus, and a drive unit that moves the stylus unit forward and backward in a drive-axis direction. The roughness tester further includes a height detector that is provided in such a manner as to face a front end face of the main-body housing part, interposing the skid between the height detector and the front end face and that detects a height of an object in a direction parallel with a measurement axis. When the height detector detects the object at the same height of the height of the main-body support foot in the measurement axis direction, the drive unit automatically starts driving in order for the stylus unit to perform scanning measurement of the surface of the workpiece.