Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

A method that includes: providing a structure that is movable along a first axis; coupling a sensor assembly to the structure, the sensor assembly comprising first and second eddy current sensors and first and second targets that are mounted to the structure for movement along the first axis; sensing the first target with the first eddy current sensor and responsively generating a first sensor signal; sensing the second target with the second eddy current sensor and responsively generating a second sensor signal; and using the first and second sensor signals to determine a location of the structure along the first axis in a manner that is insensitive to coordinated movement of the first and second targets along a second axis that is perpendicular to the first axis and a third axis that is perpendicular to both the first and second axes.

A method that includes: providing a structure that is movable along a first axis; coupling a sensor assembly to the structure, the sensor assembly comprising first and second eddy current sensors and first and second targets that are mounted to the structure for movement along the first axis; sensing the first target with the first eddy current sensor and responsively generating a first sensor signal; sensing the second target with the second eddy current sensor and responsively generating a second sensor signal; and using the first and second sensor signals to determine a location of the structure along the first axis in a manner that is insensitive to coordinated movement of the first and second targets along a second axis that is perpendicular to the first axis and a third axis that is perpendicular to both the first and second axes.

In one aspect, a magnetic field sensor includes first and second magnetic field sensing elements having respective first and second maximum response axes. The first and second maximum response axes point along respective first and second different coordinate axes. In response to a magnetic field, the first and second magnetic field sensing elements are operable to generate first and second magnetic field signals. The magnetic field sensor includes an electronic circuit coupled to receive the first and the second magnetic field signals. The electronic circuit is configured to determine a magnitude of a vector sum of the first and the second magnetic field signals and provide one or more signals in response to the magnitude of the vector sum determined.

In one aspect, a magnetic field sensor includes first and second magnetic field sensing elements having respective first and second maximum response axes. The first and second maximum response axes point along respective first and second different coordinate axes. In response to a magnetic field, the first and second magnetic field sensing elements are operable to generate first and second magnetic field signals. The magnetic field sensor includes an electronic circuit coupled to receive the first and the second magnetic field signals. The electronic circuit is configured to determine a magnitude of a vector sum of the first and the second magnetic field signals and provide one or more signals in response to the magnitude of the vector sum determined.

Methods and systems for measuring an axial position of a rotating component of an engine are described herein. The method comprises obtaining a signal from a sensor coupled to the rotating component, the rotating component having a plurality of position markers distributed about a surface thereof, the position markers having an axially varying characteristic configured to cause a change in a varying parameter of the signal as a function of the axial position of the rotating component. Based on the signal, the method comprises determining a rotational speed of the rotating component from the signal, determining the varying parameter of the signal, and finding the axial position of the rotating component based on a known relationship between the axial position, the rotational speed, and the varying parameter of the signal.

A cam is immersed in water at an elevated temperature and/or pressure. A reciprocating cam follower also immersed in the water contacts a surface of the cam. The cam follower includes a permanent magnet. An electrically conductive coil is magnetically coupled with the permanent magnet such that movement of the cam follower induces an electrical signal in the electrically conductive coil. A sealed housing also immersed in the water contains the electrically conductive coil and seals it from contact with the water. Leads of the coil are electrically accessible from outside the sealed housing and from outside the water. Alternatively, the cam includes magnetic inserts, the cam follower is replaced by a sensor arm of magnetic material, and the sensor arm and/or the inserts are magnetized whereby rotation of the rotary element causes time modulation of the magnetic coupling and induces coil voltage.

A proximity sensor includes a lead supported on an outer surface of a case structure and a sensor wire that extends from the lead and through an opening in the case structure. The sensor is formed by applying alternating layers of electrically conductive and non-conductive materials in a non-cured state. A base non-conductive layer is applied to an inner surface of the case structure around the sensor wire in a non-cured state. Once cured, a conductive layer is deposited onto the base non-conductive layer and encapsulates the sensor wire. A cover non-conductive layer is then deposited over portions of the conductive layer to insulate the conductive layer. Portions of the non-conductive layer are then removed such that an area of the conductive layer is exposed to define a sensor area.

The embodiments described herein include systems with a variable reluctance sensor (VRS) interface and methods of their operation. Embodiments of VRS interfaces include a clearing signal generator configured to generate a clearing signal corresponding with the timing of a noise event. The clearing signal may be configured to clear a post-processing circuit.