A displacement sensor includes a coil, an inverter electrically connected to the coil, the inverter being configured to generate an oscillation signal, a reducer electrically connected between the coil and an output terminal of the inverter, the reducer being configured to reduce the strength of the oscillation signal, and a frequency detector electrically connected to the inverter, the frequency detector being configured to detect an oscillation frequency of an oscillator circuit in response to a distance between a measurement target and the coil, the oscillator circuit including the coil, the inverter, and the reducer and having an oscillation frequency of 30 MHz or higher.

A displacement sensor includes a coil, an inverter electrically connected to the coil, the inverter being configured to generate an oscillation signal, a reducer electrically connected between the coil and an output terminal of the inverter, the reducer being configured to reduce the strength of the oscillation signal, and a frequency detector electrically connected to the inverter, the frequency detector being configured to detect an oscillation frequency of an oscillator circuit in response to a distance between a measurement target and the coil, the oscillator circuit including the coil, the inverter, and the reducer and having an oscillation frequency of 30 MHz or higher.

An angled face cap probe includes a housing having a radially inner end and a radially outer end, defining a cavity, and configured to be located radially outward from an airfoil. The angled face cap probe further includes a sensor located in the cavity at the radially inner end of the housing, having a sensor body with a sensing face that is angled to match or substantially match an angle of a radially outward face the airfoil, and having a sensor flat that is elongated in a first direction. The angled face cap probe further includes an outer cap located in the cavity, coupled to the housing, and having an outer cap main body and cap legs that extend radially inward from the outer cap main body to interface with the sensor flat to resist rotation of the sensor relative to the housing.

Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

The present invention relates to a non-contact potentiometer. The non-contact potentiometer comprises the following parts: a mechanical housing with through-holes; a rotating shaft comprising a top end and a magnet end on which a permanent magnet is fixed and external torque can be applied to the top end, thus driving the rotating shaft and the permanent magnet to rotate around a rotation axis and relative to the housing; a magnetoresistive sensor assembly fixed inside the housing, comprising one or more sensor chips, the sensitivity axis of the sensor chips lies in a sensing plane that is perpendicular to the axis of the rotating shaft, and separated from the permanent magnet by a predetermined distance in the direction parallel to the axis of the rotating shaft, said sensors are used for sensing the magnetic variation produced as the permanent magnet rotates with the rotating shaft thereby generating sensing signals; and three electrical connection terminals, namely a ground terminal, a power terminal, and a signal output terminal. This non-contact potentiometer has the advantages of high precision, low power consumption, and low cost. Additionally, it converts the complex analog signal from the magnetic sensor into a standard digital format that is easy to use.

A lithography apparatus is disclosed, which comprises a mirror having at least two mirror segments which are joined together in such a way that an interspace is formed between the mirror segments, and a sensor for detecting the relative position of the mirror segments, wherein the sensor is arranged in the interspace between the mirror segments.

A method for monitoring position of and controlling a second nanosatellite (NS) relative to a position of a first NS. Each of the first and second NSs has a rectangular or cubical configuration of independently activatable, current-carrying solenoids, each solenoid having an independent magnetic dipole moment vector, μ1 and μ2. A vector force F and a vector torque are expressed as linear or bilinear combinations of the first set and second set of magnetic moments, and a distance vector extending between the first and second NSs is estimated. Control equations are applied to estimate vectors, μ1 and μ2, required to move the NSs toward a desired NS configuration. This extends to control of N nanosatellites.

A movement sensor comprises a multi-pole ring magnet, a semiconductor substrate, a first magnetic sensor formed on the semiconductor substrate, and a second magnetic sensor formed on the semiconductor substrate. The first magnetic sensor is configured to produce a first output signal in response to movement of the multi-pole ring magnet, and a centroid of the first and second magnetic sensors are separate and radially aligned on the semiconductor substrate relative to the multi-pole ring magnet. The second magnetic sensor is arranged at a predetermined angle with respect to the first magnetic sensor and is configured to produce a second output signal in response to the movement of the multi-pole ring magnet. The predetermined angle is between 0° and 90° exclusive and is configured to produce a difference in phase between the first and second output signals in response to the movement of the multi-pole ring magnet.

A movement sensor comprises a multi-pole ring magnet, a semiconductor substrate, a first magnetic sensor formed on the semiconductor substrate, and a second magnetic sensor formed on the semiconductor substrate. The first magnetic sensor is configured to produce a first output signal in response to movement of the multi-pole ring magnet, and a centroid of the first and second magnetic sensors are separate and radially aligned on the semiconductor substrate relative to the multi-pole ring magnet. The second magnetic sensor is arranged at a predetermined angle with respect to the first magnetic sensor and is configured to produce a second output signal in response to the movement of the multi-pole ring magnet. The predetermined angle is between 0° and 90° exclusive and is configured to produce a difference in phase between the first and second output signals in response to the movement of the multi-pole ring magnet.