A background subtraction method and tilt stage device for eliminating contaminated or spurious interference patterns by reducing retrace errors. An optical reference surface secured in a pivoting mount coupled to a tilt actuator is configured to angularly displace the pivoting mount and optical reference surface. A microcontroller coupled to the tilt actuator controls the tilt displacement of the tilt actuator providing a plurality of wavefront measurements of the reference surface at a plurality of angles to provide a system and method for background measurement.

A method for operating an optical tomographic imaging apparatus according to the present invention includes: an initial setting step of setting initial positions of a reference mirror and a distal end of an optical part; an imaging step of imaging a biological tubular element after the initial setting step; a reference mirror adjustment step of, after the imaging step, moving the reference mirror to enlarge the image portion of the reflected light from the biological tubular element and the image portion of the reflected light from the tube while reducing an image portion of an artifact caused by reflected light from the optical part, and adjusting the image portion of the artifact to an inside of the image portion of the reflected light from the tube; a magnification adjustment step of, after the reference mirror adjustment step, resetting the image portion of the reflected light from the biological tubular element and the image portion of the reflected light from the tube to a state before the enlargement; and a display step of, after the magnification adjustment step, causing an image display unit to display the image portion of the reflected light from the biological tubular element and the image portion of the reflected light from the tube reset to the state before enlargement.

A measuring device determines a distance between a processing head for a laser processing system configured to process a workpiece with a laser beam and the workpiece. The measuring device includes an optical coherence tomograph to measure a distance between the processing head and workpiece. In the optical coherence tomograph, measuring light generated by a measuring light source and reflected by the workpiece interferes with measuring light reflected in a reference arm with two or more reference stages. The stages include a first reference stage configured such that the measuring light reflected therein travels a first optical path length, and a second reference stage configured such that the measuring light reflected therein travels a second optical path length different from the first length, wherein the measuring light reflected by the workpiece interferes with reflected measuring light of the first reference stage and reflected measuring light of the second reference stage.

An overlay metrology system may include an illumination source and illumination optics to illuminate an overlay target on a sample with illumination from the illumination source as the sample is in motion with respect to the illumination from the illumination source in accordance with a measurement recipe. The overlay target may include one or more cells, where a single cell is suitable for measurement along a particular direction. Such a cell may include two or more gratings with different pitches. Further, the system may include two or more photodetectors, each configured to capture three diffraction lobes from the two or more grating structures. The system may further include a controller to determine an overlay measurement associated with each cell of the overlay target.

Disclosed herein are self-mixing interferometry (SMI) sensors, such as may include vertical cavity surface emitting laser (VCSEL) diodes and resonance cavity photodetectors (RCPDs). Structures for the VCSEL diodes and RCPDs are disclosed. In some embodiments, a VCSEL diode and an RCPD are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate. In some embodiments, a first and a second VCSEL diode are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate, and an RCPD is formed on the second VCSEL diode. In some embodiments, a VCSEL diode may include two quantum well layers, with a tunnel junction layer between them. In some embodiments, an RCPD may be vertically integrated with a VCSEL diode.

Improved optical coherence tomography systems and methods to measure thickness of the retina are presented. The systems may be compact, handheld, provide in-home monitoring, allow the patient to measure himself or herself, and be robust enough to be dropped while still measuring the retina reliably.

Improved optical coherence tomography systems and methods to measure thickness of the retina are presented. The systems may be compact, handheld, provide in-home monitoring, allow the patient to measure himself or herself, and be robust enough to be dropped while still measuring the retina reliably.

A method and a system for photoacoustic inspection of a part are provided herein. The method may include the following steps: photo-acoustically exciting a predetermined position in a predetermined region on a part by pulsed laser illumination, to yield ultrasonic excitation of the part; coherently illuminating a predetermined location in the predetermined region on the part; detecting an illumination scattered from the predetermined location; determining, based on the scattered illumination, a plurality of sequence of two or more temporally-sequential de-focused speckle pattern images, wherein each of the sequences corresponds to one of the predetermined illuminated locations; and determining a set of translations, each determined based on the sequences, wherein each translation in the set is determined based on two temporally-sequential speckle patterns images in the respective sequence.

The present specification relates to Master-Slave (MS) interferometry for sensing the axial position of an object subject to optical coherence tomography (OCT) imaging, and to MS-OCT applied to curved and axially moving objects. The methods and apparatuses allow producing OCT signals from selected depths within the object irrespective of its axial position in respect to the imaging system. Images are obtained for curved objects that are flattened along a layer of interest in the object, images that are used to provide OCT angiography images less disturbed by axial movement or lateral scanning.

A device includes a first component, a second component having a reconfigurable distance from the first component, an optical element, an SMI sensor, and a processor. The optical element has a fixed relationship with respect to the first component, and has a known optical thickness between a first surface and a second surface of the optical element. The SMI sensor has a fixed relationship with respect to the second component, and has an electromagnetic radiation emission axis that intersects the first and second surfaces of the optical element. The processor is configured to identify disturbances in an SMI signal generated by the SMI sensor, relate the disturbances to the known optical thickness of the optical element, and to determine a distance between the first and second components using the SMI signal and the relationship of the disturbances to the known optical thickness of the optical element.