A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.

A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.

Provided is a sensor head that can increase the flexibility of installation. The sensor head is a sensor head of a sensor for measuring displacement of a measurement object. The sensor head includes: a diffractive lens generating chromatic aberration along an optical axis direction on an incident light, a case part housing at least the diffractive lens inside, and fixing parts and used for fixing to a fixing object. The case part includes a cylindrical part having a cylindrical outer shape, and the outer shapes of the fixing parts and are within the outer shape of the cylindrical part when viewed in a central axis direction of the cylindrical part.

Provided is a sensor head that can increase the flexibility of installation. The sensor head is a sensor head of a sensor for measuring displacement of a measurement object. The sensor head includes: a diffractive lens generating chromatic aberration along an optical axis direction on an incident light, a case part housing at least the diffractive lens inside, and fixing parts and used for fixing to a fixing object. The case part includes a cylindrical part having a cylindrical outer shape, and the outer shapes of the fixing parts and are within the outer shape of the cylindrical part when viewed in a central axis direction of the cylindrical part.

A device for imaging the surfaces of a sample having topography with the aid of confocal microscopy, in particular confocal Raman and/or fluorescence microscopy, comprising a first light source, in particular a laser light source for generating excitation radiation, in particular Raman radiation and/or fluorescence radiation and a second light source, wherein the first laser light source emits radiation in a first wavelength range and the second light source emits radiation in a second wavelength range, wherein the first wavelength range and the second wavelength range do not overlap.

A device for imaging the surfaces of a sample having topography with the aid of confocal microscopy, in particular confocal Raman and/or fluorescence microscopy, comprising a first light source, in particular a laser light source for generating excitation radiation, in particular Raman radiation and/or fluorescence radiation and a second light source, wherein the first laser light source emits radiation in a first wavelength range and the second light source emits radiation in a second wavelength range, wherein the first wavelength range and the second wavelength range do not overlap.

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.