Methods, devices and systems for measuring surface roughness and surface shape of an object are described. An example interferometric system includes a collimator and a first and a second light sources with different spectral ranges and different coherence lengths. The system selectively allows light from one of the light sources to reach the collimator, and also includes a beamsplitter, and a Mirau type microscope having an objective lens, a plate with a central reflective spot and a beamsplitter plate to produce a reference beam and a test beam. An imaging lens receives the test and reference beams that form a plurality of interferograms. A neural network receives two of the interferograms for measuring the surface shape and another two interferograms for measuring the surface roughness of the object. The interferometric systems have a compact form, making them suitable for on-machine measurements and other applications.

Methods, devices and systems for measuring surface roughness and surface shape of an object are described. An example interferometric system includes a collimator and a first and a second light sources with different spectral ranges and different coherence lengths. The system selectively allows light from one of the light sources to reach the collimator, and also includes a beamsplitter, and a Mirau type microscope having an objective lens, a plate with a central reflective spot and a beamsplitter plate to produce a reference beam and a test beam. An imaging lens receives the test and reference beams that form a plurality of interferograms. A neural network receives two of the interferograms for measuring the surface shape and another two interferograms for measuring the surface roughness of the object. The interferometric systems have a compact form, making them suitable for on-machine measurements and other applications.

The invention relates to a light microscope comprising a polychromatic light source for emitting illumination light in the direction of a sample, focussing means for focussing illumination light onto the sample, wherein the focussing means, for generating a depth resolution, have a longitudinal chromatic aberration, and a detection device, which comprises a two-dimensional array of detector elements, for detecting sample light coming from the sample. According to the invention, the light microscope is characterized in that, for detecting both confocal portions and non-confocal portions of the sample light, a beam path from the sample to the detection device is free of elements for completely masking out non-confocal portions. In addition, the invention relates to a method for image recording using a light microscope.

The invention relates to a light microscope comprising a polychromatic light source for emitting illumination light in the direction of a sample, focussing means for focussing illumination light onto the sample, wherein the focussing means, for generating a depth resolution, have a longitudinal chromatic aberration, and a detection device, which comprises a two-dimensional array of detector elements, for detecting sample light coming from the sample. According to the invention, the light microscope is characterized in that, for detecting both confocal portions and non-confocal portions of the sample light, a beam path from the sample to the detection device is free of elements for completely masking out non-confocal portions. In addition, the invention relates to a method for image recording using a light microscope.

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.

Provided is a sensor head that can increase the flexibility of installation. The sensor head is a sensor head of a sensor for measuring displacement of a measurement object. The sensor head includes: a diffractive lens generating chromatic aberration along an optical axis direction on an incident light, a case part housing at least the diffractive lens inside, and fixing parts and used for fixing to a fixing object. The case part includes a cylindrical part having a cylindrical outer shape, and the outer shapes of the fixing parts and are within the outer shape of the cylindrical part when viewed in a central axis direction of the cylindrical part.

Provided is a sensor head that can increase the flexibility of installation. The sensor head is a sensor head of a sensor for measuring displacement of a measurement object. The sensor head includes: a diffractive lens generating chromatic aberration along an optical axis direction on an incident light, a case part housing at least the diffractive lens inside, and fixing parts and used for fixing to a fixing object. The case part includes a cylindrical part having a cylindrical outer shape, and the outer shapes of the fixing parts and are within the outer shape of the cylindrical part when viewed in a central axis direction of the cylindrical part.

In a dark-field metrology method using a small target, a characteristic of an image of the target, obtained using a single diffraction order, is determined by fitting a combination fit function to the measured image. The combination fit function includes terms selected to represent aspects of the physical sensor and the target. Some coefficients of the combination fit function are determined based on parameters of the measurement process and/or target. In an embodiment the combination fit function includes jinc functions representing the point spread function of a pupil stop in the imaging system.

In a dark-field metrology method using a small target, a characteristic of an image of the target, obtained using a single diffraction order, is determined by fitting a combination fit function to the measured image. The combination fit function includes terms selected to represent aspects of the physical sensor and the target. Some coefficients of the combination fit function are determined based on parameters of the measurement process and/or target. In an embodiment the combination fit function includes jinc functions representing the point spread function of a pupil stop in the imaging system.