The present description relates to a device for line-scanning optical coherence tomographic microscopy. The device comprises an interferometric microscope comprising a reference arm, an object arm configured to receive an object, a beam splitter coupling said object arm and reference arm to a light source and to a sensor, and a first microscope objective arranged on said object arm. It further comprises a one-dimensional confocal spatial filtering device configured to interact with said light source in order to illuminate said object along a focal line located in an object space of the first microscope objective, and a device for unidirectional scanning of said focal line, which device is arranged on said object arm upstream of said first microscope objective and is configured to scan the focal line in a lateral direction (y) substantially perpendicular to an optical axis (z) of said first microscope objective.

A pattern matching apparatus includes a computer system configured to execute pattern matching processing between first pattern data based on design data 104 and second pattern data representing a captured image 102 of an electron microscope. The computer system acquires a first edge candidate group including one or more first edge candidates, acquires a selection-required number (the number of second edge candidates to be selected based on the second pattern data), acquires a second edge candidate group including the second edge candidates of the selection-required number, acquires an association evaluation value for each of different association combinations between the first edge candidate group and the second edge candidate group, selects one of the combinations based on the association evaluation value, and calculates a matching shift amount based on the selected combination.

Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λ.sub.i); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λ.sub.i). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λ.sub.i). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λ.sub.i).

Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λ.sub.i); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λ.sub.i). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λ.sub.i). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λ.sub.i).

A system for optimizing optics is provided. The system is configured to calibrate a position of a reference arm of an interferometric imaging system such that an image of a sample is visible when the sample is positioned at a working distance of an objective lens to provide an initial calibrated position. An image is obtained using the initial calibrated position. Image quality of the obtained image is assessed to determine if the obtained image is a valid image. A path length of the reference arm is adjusted if it is determined that the obtained image is not a valid image. A difference between the calibrated position of the reference arm and the adjusted position of the reference arm is calculated. System elements are adjusted based on the calculated difference such that the ample is visible when the sample is positioned at the working distance at the adjusted position.

An imaging system is described for measuring the position or movement of a particle having a size of less than about 20 microns. The system comprises an optional sample holder configured to hold a sample with a particle, an optional illumination source configured to illuminate the sample, a lens having a magnification ratio from about 1:5 to about 5:1 and configured to generate the image of the sample, an image sensor having a pixel size of up to about 20 microns and configured to sense the image of the sample, and an image processor operatively connected to the image sensor to process the image of the particle in order to determine the position or movement of the particle. The dimension of the image of each particle is at least about 1.5 times the dimension of the particle multiplied by the magnification ratio of the lens, and the image of each particle is distributed on at least two pixels of the sensor. The imaged area of the sample is at least about one millimeter squared.

An imaging system is described for measuring the position or movement of a particle having a size of less than about 20 microns. The system comprises an optional sample holder configured to hold a sample with a particle, an optional illumination source configured to illuminate the sample, a lens having a magnification ratio from about 1:5 to about 5:1 and configured to generate the image of the sample, an image sensor having a pixel size of up to about 20 microns and configured to sense the image of the sample, and an image processor operatively connected to the image sensor to process the image of the particle in order to determine the position or movement of the particle. The dimension of the image of each particle is at least about 1.5 times the dimension of the particle multiplied by the magnification ratio of the lens, and the image of each particle is distributed on at least two pixels of the sensor. The imaged area of the sample is at least about one millimeter squared.

Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.

Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.

According to one aspect, the invention relates to a device (100, 200, 300, 400, 500) for measuring the distance, with respect to a reference plane (P.sub.REF), from a point of light (P.sub.i) of an object (O). The device comprises a two-dimensional detector (30) comprising a detection plane (P.sub.DET) and an imaging system (10) adapted to form an image of a light spot (P.sub.i) situated on an object of interest plane (11) in an image plane (11′) arranged in the vicinity of the detection plane (P.sub.DET) or a conjugate plane (P′.sub.DET) of the detection plane. The device further comprises a separator element (20) for forming, from a beam emitted by a point of light of the object of interest plane (11), and emerging from the imaging system (10) at least two coherent beams, having a spatial superposition region in which the beams interfere and a signal processing means (50) for determining, from the interference pattern formed on the detection plane, and resulting from the optical interferences between said coherent beams, the distance from the point of light to a conjugate plane of the detection plane in the object space of the imaging system (10), said conjugate plane of the detection plane forming the reference plane (P.sub.REF).