Patent classifications
G01B11/02
Device and method for measuring fretting displacement in power cycle of press-pack IGBT
Disclosed are a device and a method for measuring a fretting displacement in a power cycling of a press-pack insulated gate bipolar transistor (IGBT). The IGBT includes: a bracket; slide bars slidably mounted on the bracket and are arranged at least four along a circumferential direction of the bracket; sensors respectively slidably installed on the bracket and the slide bars; and a power cycling experiment device arranged inside the bracket.
Device and method for measuring fretting displacement in power cycle of press-pack IGBT
Disclosed are a device and a method for measuring a fretting displacement in a power cycling of a press-pack insulated gate bipolar transistor (IGBT). The IGBT includes: a bracket; slide bars slidably mounted on the bracket and are arranged at least four along a circumferential direction of the bracket; sensors respectively slidably installed on the bracket and the slide bars; and a power cycling experiment device arranged inside the bracket.
METROLOGY METHOD AND SYSTEM FOR CRITICAL DIMENSIONS BASED ON DISPERSION RELATION IN MOMENTUM SPACE
Embodiments of the present disclosure relate to a metrology method and system for critical dimensions based on a dispersion relation in momentum space. The method comprises: establishing, in accordance with parameters of incident light and a modeled geometric topography of the target to be measured, a simulation dataset associated with a dispersion curve of the target to be measured in momentum space; training a neural-network-based prediction model based on the simulation dataset; obtaining, based on an actual measurement of the target to be measured by incident light, a dispersion relation pattern of the target to be measured in momentum space, wherein the dispersion relation pattern at least indicates a dispersion curve associated with the critical dimensions of the target to be measured; extracting, based on the dispersion relation pattern, features related to the dispersion curve from the dispersion relation pattern via the trained prediction model, to determine an estimated value associated with at least one critical dimension of the target to be measured. According to the method disclosed herein, at least one critical dimension is measured in a more efficient, economical and accurate way.
METROLOGY METHOD AND SYSTEM FOR CRITICAL DIMENSIONS BASED ON DISPERSION RELATION IN MOMENTUM SPACE
Embodiments of the present disclosure relate to a metrology method and system for critical dimensions based on a dispersion relation in momentum space. The method comprises: establishing, in accordance with parameters of incident light and a modeled geometric topography of the target to be measured, a simulation dataset associated with a dispersion curve of the target to be measured in momentum space; training a neural-network-based prediction model based on the simulation dataset; obtaining, based on an actual measurement of the target to be measured by incident light, a dispersion relation pattern of the target to be measured in momentum space, wherein the dispersion relation pattern at least indicates a dispersion curve associated with the critical dimensions of the target to be measured; extracting, based on the dispersion relation pattern, features related to the dispersion curve from the dispersion relation pattern via the trained prediction model, to determine an estimated value associated with at least one critical dimension of the target to be measured. According to the method disclosed herein, at least one critical dimension is measured in a more efficient, economical and accurate way.
Method and device for automatically drawing structural cracks and precisely measuring widths thereof
The present invention discloses a method and device for automatically drawing structural cracks and precisely measuring widths thereof. The method comprises a method for automatically drawing cracks and a method for calculating widths of these cracks based on a single-pixel skeleton and Zernike orthogonal moments, wherein the method for automatically drawing cracks is used to rapidly and precisely draw cracks in the surface of a structure, and the method for calculating widths of these cracks based on a single-pixel skeleton and Zernike orthogonal moments is used to calculate widths of macro-cracks and micro-cracks in an image in a real-time manner.
PARTIAL COHERENCE MITIGATION IN VIDEO MEASUREMENT SYSTEMS VIA ILLUMINATION APODIZATION
A video measurement system for measuring a test object comprising an imaging system comprising an imager having an imaging pupil, the imager arranged for viewing at least a portion of a silhouette of the test object by receiving light transmitted by the test object over a first angular extent; and an illumination system comprising (i) an illumination source; (ii) output having a second angular extent in object space that is larger than the first angular extent received by the imaging pupil; and (iii) a substrate arranged to diffuse light from the illumination source, the substrate having an axial centerline and a light obscuration element, wherein the light obscuration element is at least approximately coaxial to the axial centerline of the substrate, and wherein the pupils of the illumination and imaging systems are in at least approximately conjugate image planes.
AUTHENTICATION ALIGNMENT SYSTEM
A feedback apparatus for a user identification system of a vehicle includes an indicator device configured to selectively activate a status icon and a plurality of directional segments disposed around the status icon. A controller is in communication with a scanning device configured to authenticate an object depicted in image data representing a field of view. The controller is configured to identify an alignment direction of the object within the field of view and activate one or more of the directional segments in response to the alignment direction. Additionally, the controller is configured to activate the status icon in response to the alignment direction indicating that the object is aligned in the field of view.
Self-mixing interference device for sensing applications
Disclosed herein are self-mixing interferometry (SMI) sensors, such as may include vertical cavity surface emitting laser (VCSEL) diodes and resonance cavity photodetectors (RCPDs). Structures for the VCSEL diodes and RCPDs are disclosed. In some embodiments, a VCSEL diode and an RCPD are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate. In some embodiments, a first and a second VCSEL diode are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate, and an RCPD is formed on the second VCSEL diode. In some embodiments, a VCSEL diode may include two quantum well layers, with a tunnel junction layer between them. In some embodiments, an RCPD may be vertically integrated with a VCSEL diode.
Superresolution metrology methods based on singular distributions and deep learning
Methods for determining a value of an intrinsic geometrical parameter of a geometrical feature characterizing a physical object, and for classifying a scene into at least one geometrical shape, each geometrical shape modeling a luminous object. A singular light distribution characterized by a first wavelength and a position of singularity is projected onto the physical object. Light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector is detected and a return energy distribution is identified and quantified at one or more positions. A deep learning or neural network layer may be employed, using the detected light as direct input of the neural network layer, adapted to classify the scene, as a plurality of shapes, static or dynamic, the shapes being part of a set of shapes predetermined or acquired by learning.
Superresolution metrology methods based on singular distributions and deep learning
Methods for determining a value of an intrinsic geometrical parameter of a geometrical feature characterizing a physical object, and for classifying a scene into at least one geometrical shape, each geometrical shape modeling a luminous object. A singular light distribution characterized by a first wavelength and a position of singularity is projected onto the physical object. Light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector is detected and a return energy distribution is identified and quantified at one or more positions. A deep learning or neural network layer may be employed, using the detected light as direct input of the neural network layer, adapted to classify the scene, as a plurality of shapes, static or dynamic, the shapes being part of a set of shapes predetermined or acquired by learning.