An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

The optical control apparatus includes a light source, a light collecting section, and an optical path control section. The light source emits light. The light collecting section collects the light emitted from the light source and illuminates the light onto an object.

The optical control apparatus includes a light source, a light collecting section, and an optical path control section. The light source emits light. The light collecting section collects the light emitted from the light source and illuminates the light onto an object.

The following are observed using a camera: a first position of a small hole of a workpiece, which is fixed to a linear-and-tilting-motion stage and rotating with a rotating body, and a second position thereof different from the first position, at a first rotation angle of the rotating body; and the first position and the second position of the small hole of the workpiece at a second rotation angle different from the first rotation angle of the rotating body. A position and a tilt of the small hole are calculated from coordinates of the respective observed positions, and small hole information, which includes the position and the tilt of the small hole, is outputted.

A system and method of using a tool assembly is provided. The system includes a body, a first camera and a second camera fixed to the body, and a controller. The controller is configured to receive data indicative of images of a reference feature from the first camera, determine data indicative of a first spatial position of the first camera based at least in part on the received data indicative of the images of the reference feature, and determine data indicative of a second spatial position of the second camera based on the first spatial position, a known spatial relationship between the first location and the second location, or both. Further, the controller may be configured to receive data indicative of images of a target feature using the second camera, derive dimensions of the target feature based on the images, and generate a three-dimensional representation of the target feature.

Even when a missing portion occurs in a solid data set on a columnar structure, an estimator for a deflection value and an accuracy of the deflection value are correctly estimated according to an extent of the missing portion and the like. A measurement accuracy estimation unit (15) is included that: calculates a deflection of a columnar structure and an extent of a missing portion, from a solid data set on the columnar structure; calculates an accuracy assessment indicator for the deflection that is acquirable when a plurality of missing portion patterns occur on a virtual basis, based on a plurality of solid data sets in each of which the calculated extent of the missing portion is smaller than a preset threshold value, the accuracy assessment indicator being calculated for each missing portion pattern; and calculates an accuracy of the deflection calculated from the solid data set, based on the calculated accuracy assessment indicator for each missing portion pattern, and based on the calculated extent of the missing portion in the solid data set.

Even when a missing portion occurs in a solid data set on a columnar structure, an estimator for a deflection value and an accuracy of the deflection value are correctly estimated according to an extent of the missing portion and the like. A measurement accuracy estimation unit (15) is included that: calculates a deflection of a columnar structure and an extent of a missing portion, from a solid data set on the columnar structure; calculates an accuracy assessment indicator for the deflection that is acquirable when a plurality of missing portion patterns occur on a virtual basis, based on a plurality of solid data sets in each of which the calculated extent of the missing portion is smaller than a preset threshold value, the accuracy assessment indicator being calculated for each missing portion pattern; and calculates an accuracy of the deflection calculated from the solid data set, based on the calculated accuracy assessment indicator for each missing portion pattern, and based on the calculated extent of the missing portion in the solid data set.

A process for aligning a laser in a gear inspection system is disclosed. The method comprises fixing a gear for inspection within a gear inspection system and emitting a first signal from a laser to a point of interest of the gear. A reflection of the first signal is received as the first signal reflects off the point of interest of the gear. Based on the reflection of the first signal, an orientation of the laser is adjusted. Subsequently, a second signal is emitted from the laser to the point of interest of the gear, and a reflection of the second signal is received as the second signal reflects off the point of interest of the gear. Values corresponding to the orientation of the laser are stored based on the reflection of the second signal.

Laser drivers and methods are disclosed including a pulse input for receiving one or more logical pulse control signals, a delay circuit, a main pulse output, and a precharge pulse output for efficiently driving a laser with reduced time delay to desired optical output and reduced power consumption during between optical outputs.