A bubble measurement system includes a bubble detector including a vessel having a flow path configured to receive a flow of fluid including air bubbles from a bubble generator and an imaging system. The imaging system includes an imaging device for imaging the fluid and air bubbles in the flow path of the vessel of the bubble detector. The imaging system has an imaging controller coupled to the imaging device and receiving images from the imaging device. The imaging controller processes the images to measure bubble size of each air bubble passing through the bubble detector. The imaging controller includes a pairing module comparing successive images and the air bubbles in successive images to measure all bubbles flowing through the vessel.

A method of assessing the quality of a bond coat for bonding a ceramic coating to a metallic substrate comprises determining a thresholded summit area for the bond coat.

A system is described for inspecting a container having a top surface using light reflections and positional data. The system comprises a radiation source arranged such that the light beam projects radiation onto the top surface, wherein the radiation radiates along the outer edge of the container; a sensor, wherein the radiation is collected by the sensor reflected from the container using positional data, wherein the positional data is used to create a reference plane of the top of the top surface; and a processor operatively connected to the sensor, the processor integrates the positional data to detect defects in the container and creates a reference plane of a top surface of the container, wherein sensor captures the positional data of the container as the container moves on the conveyor; and the positional data is integrated using software to produce a 3D topographical map of the container.

A system is described for inspecting a container having a top surface using light reflections and positional data. The system comprises a radiation source arranged such that the light beam projects radiation onto the top surface, wherein the radiation radiates along the outer edge of the container; a sensor, wherein the radiation is collected by the sensor reflected from the container using positional data, wherein the positional data is used to create a reference plane of the top of the top surface; and a processor operatively connected to the sensor, the processor integrates the positional data to detect defects in the container and creates a reference plane of a top surface of the container, wherein sensor captures the positional data of the container as the container moves on the conveyor; and the positional data is integrated using software to produce a 3D topographical map of the container.

A target-object-encompassing region representing a region causing any change between first image information and second image information is determined based on the first image information precluding a target object in an imageable area and the second image information including the target object in the imageable area. A two-dimensional size of the target object included in the target-object-encompassing region is determined based on the target-object-encompassing region and the height information.

Disclosed herein is a method of measuring a pattern on a substrate comprising: preparing a substrate having a relief pattern comprising organic or inorganic material; directing an excitation light to the relief pattern on the substrate to emit a fluorescent light from the relief pattern; detecting an intensity of the fluorescent light emitted from the relief pattern; and determining a volume of the relief pattern on the substrate based on the detected intensity of the fluorescent light.

Disclosed herein is a method of measuring a pattern on a substrate comprising: preparing a substrate having a relief pattern comprising organic or inorganic material; directing an excitation light to the relief pattern on the substrate to emit a fluorescent light from the relief pattern; detecting an intensity of the fluorescent light emitted from the relief pattern; and determining a volume of the relief pattern on the substrate based on the detected intensity of the fluorescent light.

A gel-time detection apparatus includes a carrier, a stirring device, and an image-capturing device. The gel-time detection apparatus uses the carrier to liquefied powder to be detected, uses the stirring device to stir the liquefied powder and sense the torque of stirring the liquefied powder, and uses the image-capturing device to capture images of the liquefied powder, so as to determine a gel time according to a determination criterion relevant to the torque and the images. A gel-time detection method includes liquefying powder to be detected, stirring the powder, sensing the torque of stirring the liquefied powder, capturing images of the liquefied powder, and then determining a gel time according to a determination criterion relevant to the torque and the images. The determination criterion may include a torque predetermined threshold and an area-shrinkage-rate predetermined threshold.

A substrate inspection system is provided to monitor characteristics of a substrate, while the substrate is disposed within (or being transferred into/out of) a processing unit of a liquid dispense substrate processing system. The inspection system is integrated within a liquid dispense substrate processing system and includes one or more optical sensors of a reflectometer (such as a spectrometer or laser-based transceiver) configured to obtain spectral data from a substrate. A controller is coupled to receive the spectral data from the optical sensors(s). The one or more optical sensors (or one or more optical fibers coupled to the rest of the optical sensor hardware) are coupled at locations within the substrate processing system. The controller analyzes the spectral data received from the optical sensors(s) to detect characteristic(s) of the substrate including, but not limited to, film thickness (FT), refractive index changes, and associated critical dimension (CD) changes.

Embodiments relate to predicting height information for an object. First distance data is determined at a first time when an object is at a first position that is only partially within the field-of-view. Second distance data is determined at a second, later time when the object is at a second, different position that is only partially within the field-of-view. A distance measurement model that models a physical parameter of the object within the field-of-view is determined for the object based on the first and second distance data. Third distance data indicative of an estimated distance to the object prior to the object being entirely within the field-of-view of the distance sensing device is determined based on the first distance data, the second distance data, and the distance measurement model. Data indicative of a height of the object is determined based on the third distance data.