The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

A method for the nondestructive inspection of a surface structure, including: preparing the surface structure; wetting a portion of the surface structure with a liquid, the variation in the thickness of the liquid above the portion of the surface structure being at most 50% of the maximum thickness of the liquid above the surface structure, so that the liquid forms a light guide which has, and is bounded by, the inverse shape of the surface structure at a first large surface and is bounded by air at a second large surface; coupling light into the light guide so that the inverse shape of the surface structure at the first large surface is impinged by light such that light coupled into the light guide is coupled out of the light guide via the second large surface; capturing an image of the light coupled out and; evaluating the captured image.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

Systems and methods of the present disclosure relate to identifying geometric features of a conduit. A method includes controlling a flow into or out of a conduit to induce pressure waves in the conduit; measuring, with a pressure transducer, pressure responses in the conduit due to contact of the pressure waves with a geometric feature of the conduit; and identifying the geometric feature, based on the pressure responses.

Systems and methods of the present disclosure relate to identifying geometric features of a conduit. A method includes controlling a flow into or out of a conduit to induce pressure waves in the conduit; measuring, with a pressure transducer, pressure responses in the conduit due to contact of the pressure waves with a geometric feature of the conduit; and identifying the geometric feature, based on the pressure responses.

A method of generating a path for processing a physical profile of a part with a tool is provided. The physical profile has a shape. The method comprises identifying a processing location on the physical profile of the part. The processing location is within an inspection region. The method also comprises identifying an inspection-region location based on the processing location. An inspection region is geometrically associated with the inspection-region location. The method additionally comprises identifying a processing location on the physical profile of the part. The processing location is within the inspection region. The method also comprises generating at least a portion of the path based on the processing location and the processing location.

A topographical measurement system may include a tactile sensor using a contained fluid as an imaging medium.

A topographical measurement system may include a tactile sensor using a contained fluid as an imaging medium.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.