Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

A strain estimation device according to an aspect of the present disclosure is a strain estimation device that estimates strain of a component provided in a fluid and includes a pressure acquisition unit that acquires a pressure signal including time-series pressure values at a predetermined position in a vicinity of the component, an estimation unit that estimates, based on the pressure signal, a strain signal including time-series strain values occurring at the component, and an output unit that outputs the strain signal. The estimation unit converts the pressure signal into the strain signal using an estimation filter determined based on a power spectral density of pressure and a power spectral density of strain occurring at the component when the pressure is applied to the position.

A strain estimation device according to an aspect of the present disclosure is a strain estimation device that estimates strain of a component provided in a fluid and includes a pressure acquisition unit that acquires a pressure signal including time-series pressure values at a predetermined position in a vicinity of the component, an estimation unit that estimates, based on the pressure signal, a strain signal including time-series strain values occurring at the component, and an output unit that outputs the strain signal. The estimation unit converts the pressure signal into the strain signal using an estimation filter determined based on a power spectral density of pressure and a power spectral density of strain occurring at the component when the pressure is applied to the position.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Continuous microfluidic dilatometry devices and methods are provided for activity monitoring with ultra-high sensitivity. Corner flow in capillary channels is used to detect the resistance change in microfluidic circuits filled with ionic liquids. The conversion of mechanical input (e.g. strain) to an intermediary domain, namely liquid displacement, allows a large enhancement in sensor performance. Embodiments are suitable for tracking skin deformations that occur as a result of human movements.

In an inspection method for inspecting occurrence of a deformation in a fuel cell, a change amount between a pressure loss parameter value before an impact and a pressure loss parameter value after the impact is found, and when the change amount is a reference value determined in advance or more, it is determined that the deformation occurs inside the fuel cell. It is determined that the deformation occurs inside the fuel cell due to the impact, in at least either of a case where the change amount of a first pressure loss parameter value that is a pressure loss parameter value in a gas passage is a first reference value or more and a case where the change amount of a second pressure loss parameter value that is a pressure loss parameter value in a refrigerant passage is a second reference value or more.

In an inspection method for inspecting occurrence of a deformation in a fuel cell, a change amount between a pressure loss parameter value before an impact and a pressure loss parameter value after the impact is found, and when the change amount is a reference value determined in advance or more, it is determined that the deformation occurs inside the fuel cell. It is determined that the deformation occurs inside the fuel cell due to the impact, in at least either of a case where the change amount of a first pressure loss parameter value that is a pressure loss parameter value in a gas passage is a first reference value or more and a case where the change amount of a second pressure loss parameter value that is a pressure loss parameter value in a refrigerant passage is a second reference value or more.

The present invention relates to a method for making a Pickering emulsion, the method comprising: exfoliating a non-silicate layered 3D material in a solvent to produce particles of a non-silicate unfunctionalised 2D material; forming a dispersion of the particles of the 2D material in a first liquid phase; adding a second liquid phase; and homogenising the dispersion of the 2D material in the first liquid phase with the second liquid phase to form a Pickering emulsion comprising the first liquid phase, the second liquid phase, and the particles of the 2D material.