An apparatus for dental imaging comprises a light source for generating light, an optics system for focusing the light, and a probe head. The light source, the optics system and the probe head are arranged such that the light passes through the optics system, passes through the probe head, and exits the probe head. The optics system is configured such that chief rays of the light before entering the probe head are divergent to each other, wherein an angle defined by a marginal ray of an outermost beam of the light is complementary to an angle defined by an extreme off-axis chief ray of the light with respect to the optical axis.

A confocal range sensing (CRS) system is provided including a wavelength detector, source light configuration, and one or more measurement channels. Each measurement channel is configured to sense a respective distance to a workpiece surface and includes a confocal detection aperture and confocal light source aperture. The source light configuration includes first and second phosphor compositions, a wavelength combining configuration, and a shared source light path. The first and second phosphor compositions are located in separate respective first and second phosphor regions. As part of workpiece height measurement operations, the first and second phosphor compositions emit first and second emitted light, respectively, to the wavelength combining configuration which outputs first and second emitted light along the shared source light path as source light (i.e., having an extended wavelength range due to the combination of the first and second emitted light) that is received by each respective confocal light source aperture.

A method includes the following steps: providing a toothed component on a coordinate measuring machine, wherein the measuring machine has first and second sensors for measuring geometric features of the toothed component, and movement axes for executing a measuring movement for acquiring measured values on the toothed component; first measuring of a geometric feature of the toothed component using the first and/or second sensor. A first relative measuring movement is executed to travel along a first measuring path, wherein one or more first measured values are acquired to determine the geometric feature. The method also includes the step of second measuring of a geometric feature of the toothed component using the first and/or second sensor, wherein a second relative measuring movement is executed to travel along a second measuring path; wherein an evaluation of the second measurement takes place in consideration of an axis position known from the first measurement.

Disclosed are methods and devices for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of a thin-walled rotating body. According to the invention, a chromatic confocal senor head is driven by a bottom rotary table, a main measuring head rotary table and a linear motion shaft mover to perform copy scanning along a surface of a thin-walled shell-type rotating body, so that the detection of the surface shapes and thickness distribution of the inner and outer walls of the thin-walled shell-type rotating body can be realized at the same time. By the method, mechanical interference caused by arranging a measuring head in the thin-walled shell-type rotating body can be avoided, and coordinate consistency of surface shape measurement data and thickness distribution data of the inner and outer walls in a three-dimensional space can be ensured, thus ensuring the overall measurement precision; and meanwhile.

A method of scanning a substrate and determining scratches of the substrate includes transmitting a converging beam of light that comprises multiple wavelengths to the substrate. Each wavelength of the multiple wavelengths focuses at a different distance in a focus interval around and including a surface of the substrate. The method also includes receiving reflected light from the surface of the substrate and determining a height or depth of the surface of the substrate based on a wavelength of the reflected light having a highest intensity.

A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a calibration object. The calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The first nominally cylindrical calibration surface is arranged at a known first radius R1 from the central axis that extends along the Z direction. A first set of angular reference features is formed on or in the first nominally cylindrical calibration surface. The angular reference features are configured to be sensed by the radial distance sensing beam and are located at known angles or known angular spacings around the central axis from one another on or in the first nominally cylindrical calibration surface.

The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

An automated method measures geometric curvature deviations between dished surfaces of a plurality of materials to be assessed and a dished surface of a reference material. The method calculates, by computer, at selected points, a difference between the curvature profiles of the dished surface of each material to be assessed and a relief height or curvature profile of the dished surface of the reference material.

Provided is a confocal sensor having a wider measuring range. A confocal sensor 1 comprises: a light source 10 that emits light at a plurality of wavelengths; a diffractive lens 130 that causes a chromatic aberration with respect to the light along an optical axis and focuses the light onto an object 200 without another intervening lens; a pinhole 120 through which reflected light passes, the reflected light being a portion of the light that was focused onto and reflected from the object 200 and focused by the diffractive lens 130; and a measuring unit 40 that measures the distance from the diffractive lens 130 to the object 200 on the basis of a wavelength of the reflected light. A distance L2 from the pinhole 120 to the diffractive lens 130 is variable.

A device for measuring objects is provided, said device comprising a mobile base such that it is movable to objects to be measured. Then, the object may be measured by means of a measuring head fastened to a kinematic unit.