G01B2290/25

Optical systems and methods for measuring turbine blade tip clearance

A blade tip measurement system includes a case and a blade that rotates within the case, the blade having an outer blade tip surface that has a clearance distance from an inner surface of the case. A light source emits light along an optical path that is directed toward the outer blade tip surface by a lens, and the outer blade tip surface reflects the light back along the optical path. An optical interferometer generates an interference pattern using the reflected light, and a photoreceiver receives the interference pattern. A complex logic device determines the clearance distance of the blade tip surface from the inner surface of the case based on the interference pattern. The interferometer may be a Fabry-Perot optical interferometer formed using a window positioned between the lens and the blade tip surface, or a Michelson interferometer formed using a reference optical path. The system may alternatively include an optical time of flight measurement of the blade tip clearance. The system further may include an abradable substrate having an optical fiber array of optical fibers at different depths, whereby the blade tip clearance is determinable based on which of the optical fibers are abraded as the blade tip rotates.

Inspecting a multilayer sample

Inspecting a multilayer sample. In one example embodiment, a method may include receiving, at a beam splitter, light and splitting the light into first and second portions; combining, at the beam splitter, the first portion of the light after being reflected from a multilayer sample and the second portion of the light after being reflected from a reflector; receiving, at a computer-controlled system for analyzing Fabry-Perot fringes, the combined light and spectrally analyzing the combined light to determine a value of a total power impinging a slit of the system for analyzing Fabry-Perot fringes; determining an optical path difference (OPD); recording an interferogram that plots the value versus the OPD for the OPD; performing the previous acts of the method one or more additional times with a different OPD; and using the interferogram for each of the different OPDs to determine the thicknesses and order of the layers of the multilayer sample.

Atomic interferometric accelerometer with enhanced vibrational stability
10107936 · 2018-10-23 · ·

An atomic interferometric accelerometer comprises a laser that emits a pulsed beam at a first frequency, an electro-optic modulator that receives the beam, and a vacuum cell in communication with the electro-optic modulator. The electro-optic modulator outputs a first optical signal corresponding to the beam at the first frequency and a second optical signal having a second frequency different from the first frequency. The vacuum cell has a chamber for laser cooled atoms. The vacuum cell receives the optical signals such that they propagate in a direction that passes through the atoms. A piezo mirror retro-reflects the optical signals back through the vacuum cell in a counter-propagating direction. The piezo mirror is driven with substantially constant velocity during a beam pulse, thereby imparting a Doppler shift to the retro-reflected optical signals to create two non-symmetric counter-propagating lightwave pairs. One of the lightwave pairs supports interferometry while the other is non-resonant.

INSPECTING A MULTILAYER SAMPLE
20180299255 · 2018-10-18 ·

Inspecting a multilayer sample. In one example embodiment, a method may include receiving, at a beam splitter, light and splitting the light into first and second portions; combining, at the beam splitter, the first portion of the light after being reflected from a multilayer sample and the second portion of the light after being reflected from a reflector; receiving, at a computer-controlled system for analyzing Fabry-Perot fringes, the combined light and spectrally analyzing the combined light to determine a value of a total power impinging a slit of the system for analyzing Fabry-Perot fringes; determining an optical path difference (OPD); recording an interferogram that plots the value versus the OPD for the OPD; performing the previous acts of the method one or more additional times with a different OPD; and using the interferogram for each of the different OPDs to determine the thicknesses and order of the layers of the multilayer sample.

Fiber-optic measurement system and methods based on ultra-short cavity length Fabry-Perot sensors and low resolution spectrum analysis
10101202 · 2018-10-16 · ·

An optical system having an optical sensor with an ultra-short FP cavity, and a low-resolution optical interrogation system coupled to the optical sensor and operational to send light signals and receive light signals to and from the optical sensor is disclosed. The optical system may operate in a wavelength range including the visible and near-infrared range. Optical assemblies and methods of interrogating optical sensors are provided, as are numerous other aspects.

Airway adaptor with optical pressure transducer and method of maufacturing a sensor component
10086163 · 2018-10-02 · ·

An airway adapter includes a housing and a pressure transducer. The housing includes a flow path having a first end and a second end, a first pressure port that communicates with the flow path, and a second pressure port that communicates with the flow path. The first pressure port is spaced apart from the second pressure port. The flow restriction is disposed in the flow path between the first and second pressure ports that creates a pressure differential therebetween. The pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer includes an optical interferometer.

Mirror unit and optical module

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

Optical coherence tomography device
09921047 · 2018-03-20 · ·

An optical coherence tomography device includes an SS-OCT optical system which includes a wavelength swept optical source which sweeps an emission wavelength, an optical splitter which splits an interference signal light caused by interference between a measurement light and a reference light into a first interference signal light and a second interference signal light having a phase difference from the first interference signal light, a balance detector which includes a first detector configured to detect the first interference signal light and a second detector configured to detect the second interference signal light, and which processes detection signals from the first and second detectors to perform balance detection, and an optical member which is disposed between the optical splitter and one of the first detector and the second detector to generate a fixed pattern noise by one of the first interference signal light and the second interference signal light.

A MIRROR PLATE FOR A FABRY-PEROT INTERFEROMETER AND A FABRY-PEROT INTERFEROMETER

A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a substrate, which includes silicon, implementing a semi-transparent reflective coating on the substrate, forming a passivated region in and/or on the substrate by etching a plurality of voids in the substrate, and by passivating the surfaces of the voids, forming a first sensor electrode on top of the passivated region, and forming a second sensor electrode supported by the substrate.

Optical Coherence Tomography Laser with Integrated Clock

A frequency swept laser source for TEFD-OCT imaging includes an integrated clock subsystem on the optical bench with the laser source. The clock subsystem generates frequency clock signals as the optical signal is tuned over the scan band. Preferably the laser source further includes a cavity extender in its optical cavity between a tunable filter and gain medium to increase an optical distance between the tunable filter and the gain medium in order to control the location of laser intensity pattern noise. The laser also includes a fiber stub that allows for control over the cavity length while also controlling birefringence in the cavity.