Translations of an object in a plurality of different spatial directions are measured using a plurality of interferometers to detect interference with light that has been reflected from a diffusively reflective surface, preferably using diffuse reflection from the same planar surface to measure in each of the different spatial directions. At least the interferometers that measure translation in directions that are not perpendicular to the surface each comprises a single mode fiber and a collimator configured to transmit the outgoing light to the object successively through the single mode fiber and the collimator, and to collect reflection into the single mode fiber with the collimator both along a same beam direction. It has been found that, when reflection of a beam with a beam direction at an oblique angle to a diffusively reflective surface is used, the interference resulting from translation of the object is due substantially only to translation in the beam direction.

The interferometer 10 according to this disclosure includes: a first optical component 12 that splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path R1 and the second optical path R2 and combines the light to be measured; a second optical component 13 placed in the first optical path; a third optical component 14 that splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detector 11a and an S polarization detector 11b that respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.

In an optical coherence tomography apparatus that generates a full-color optical coherence tomographic image, an image generation unit includes a correction processing unit that calculates an attenuation related value related to attenuation of signal intensity of the interference light of three R, G, and B colors in a first depth region and corrects the signal intensity of a second depth region deeper than the first depth region according to the attenuation related value to calculate a correction signal for the interference light and generates a full-color optical coherence tomographic image using the correction signals calculated for each of R, G, and B.

The disclosure provides a microphone chip, a microphone, and a terminal device. The microphone chip includes a substrate and a diaphragm that are disposed oppositely, a reflector located on a side that is of the diaphragm and that is close to the substrate, a grating group located between the substrate and the diaphragm, and an optical emitter and an optical detector that are located between the substrate and the grating group. The grating group includes a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different.

A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.

An interferometer arrangement includes a beam splitter (8), two retroreflectors (15, 16), a drive (24) that moves at least one of the retroreflectors to alter an optical path difference between interferometer arms (13, 14), a converging element (18) for reference light, and a reference light detector (19) with at least three detector areas (19a-19d). First and second pairs of detector areas are aligned in respective first and second directions, wherein the first direction, the second direction and a central propagation direction of the reference light at the reference light detector are linearly independent. At least two actuators (9, 10) alter a lateral shear between two reference light partial beams (11, 12), which are reflected back from the interferometer arms and superimposed at the beam splitter, in at least two degrees of freedom. Control electronics (38) control the actuators depending on signals (Sa-Sc) at the detector areas, thereby minimizing the shear.

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the object.

Optical coherent receiver arrays are described. The optical coherent receiver arrays include an integrated array of photodetectors separated by integrated mirrors which may cause interference of received free space optical and local oscillator signals. The mirrors may serve as splitters, helping to align the received signal and local oscillator to cause interference. The photodetectors of the optical coherent receiver array may be electrically coupled in various manners to read out the signals. The optical coherent receiver array may be implemented in an optical coherence tomography (OCT) imaging system in some embodiments.

Devices and methods employing stationary homodyne interferometry to aid in the determination of the magnitude and polarity of electrophoretic mobility and zeta potential of particles are provided. The devices use an optical quadrature interferometer having a sample holder loadable with an electrophoresis sample chamber that may contain sample particles undergoing electrophoresis, the optical quadrature interferometer being configured to perform optical velocimetry on the particles and to generate a quadrature signal comprising characteristics related to the speeds and directions of the particles. The quadrature signal may be used to determine the speeds and directions of particles. The speeds and directions of particles may be used, together with other information, for the determination of the magnitudes and polarities of the electrophoretic mobility and zeta potential of the particles. Constraints on vibration, light source coherence length, and measurement resolution may be relaxed.