A method for determining a retardance of a layer of a sample. The method includes: transmitting a first portion of a polarized light to a sample arm of an optical system and a second portion of the polarized light to a reference arm of the optical system; combining first return light returned from the sample arm and second return light from the reference arm; detecting, using a detector, the combined light along a first polarization state and a second polarization state to produce polarization data, the second polarization state being different from the first polarization state; determining, using a processor coupled to the detector, polarization states of light returning from upper and lower surfaces of a layer of the sample based on detecting the combined light; and determining, using the processor, a retardance of the layer of the sample based on the determined polarization states.

The invention relates to the field of interferometry, in particular to Fizeau interferometers for improving a contrast of an interferogram. The Fizeau interferometer comprises a light source, a reference surface, a test surface positioned in on a support of the Fizeau interferometer and an imaging system. The Fizeau interferometer utilizes a polarizing reference surface to improve the contrast of the interferogram. The invention further relates to a method for using the Fizeau interferometer of the invention for improving contrast of an interferogram obtained by the Fizeau interferometer.

A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).

A simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration. The interferometer comprises an ideal spherical wave generation module, an optical system to be measured, an image plane mask, a polarization phase shift module, a two-dimensional polarization imaging photodetector and a data processing unit. Single photodetector is adopted to realize simultaneous detection of more than three phase shift interference patterns, and has the advantages that environmental interference suppression, a flexible optical path, high measurement accuracy, and calibration of system errors of the interferometer may be realized.

A polarization-separated, phase-shifted interferometer can generate interferograms without moving parts. It uses a phase shifter, such as an electro-optic phase modulator, to modulate the relative phase between sample and reference beams. These beams are transformed into orthogonal polarization states (e.g., horizontally and vertically polarized states) and coupled via a common path (e.g., polarization-maintaining fiber) to a polarizing beam splitter (PBS), which sends them into separate sample and reference arms. Quarter-wave plates in the sample and reference arms rotate the polarization states of the sample and reference beams so they are coupled out of the PBS to a detector via a 45° linear polarizer. The polarizer projects the aligned polarization components of the sample and reference beams onto the detector, where they interfere with known relative phase to produce an output that can be used to map surface topography of the test object.

A system and method are provided for optical homodyne detection in an optical fiber interferometer. A detection signal is obtained by interfering an optical data signal with a phase-modulated optical reference signal. The modulator for the optical reference signal is phase-locked to an oscillatory modulation waveform. In embodiments, the modulator includes a piezoelectric element. In more specific embodiments, the modulator is a piezoelectric optical fiber-stretcher.

An imaging apparatus configured to image an object to be examined is provided. The apparatus includes a splitting unit configured to split light obtained by combining the returned light and the reference light into a plurality of lights having different polarization components; and a detecting unit configured to detect the plurality of lights. The apparatus further includes a correcting unit configured to correct a phase difference between different polarization components generated by an optical member provided on an optical path of the measurement light or an optical path of the reference light.

Systems and apparatuses for a polarization laser sensor are disclosed. The polarization laser sensor can include a pump source, a common section, a reference section and a detection section. The common section is provided with a gain medium, and the detection section is provided with a sensing element configured to cause an optical path difference. The reference section and the detection section are connected to the common section though a first polarization splitting unit and a second polarization splitting unit. The common section is provided with an output unit or each of the reference section and the detection is provided with the output unit, the output unit is connected to a photoelectric detector through a light uniting unit, and a polarization rotation unit is disposed between the light uniting unit and the output unit.

A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

Systems, devices and methods for measuring surface roughness and surface shape of an optical element using a dual-mode interferometer are disclosed. The devices implement optical filters, with a compact form, that allows measurement of both surface characteristics without rearranging the system components. One example interferometric system includes a laser light source and a low coherence light source that alternatively provide light to a collimator, followed by a polarizer, and a polarizing beam splitter. The system further includes two optical filters, a quarter waveplate, two objectives and a reference optical component. Each light source produces a set of interferograms, where one set of interferograms is used to measure the surface shape and another set of interferograms is used to measure the surface roughness of the optical component.