A method for measuring a position using a magnet and a sensor for detecting the magnetic field strength of the magnet. The magnet and/or the sensor interact with a movable element so that a relative movement between the sensor and the magnet can be effected. The position of the movable element in accordance with the coordinates in a system of coordinates can be ascertained on the basis of the magnetic field having a predetermined shape generated by the magnet and detected by the sensor. The sensor ascertains three linearly independent spatial direction components of the magnetic field strength of the magnetic field acting at the location of the sensor. Each coordinate along a coordinate axis of the system coordinates of the magnetic field is determined individually and unambiguously by the combination of the three linearly independent spatial direction components of the magnetic field strength detected by the sensor.

Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.

Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.