Patent classifications
G01F22/02
PRESSURE BASED VOLUME SENSOR FOR LIQUID RECEPTACLE
Disclosed herein are various techniques and devices for detecting a level of fluid within a fluid collection receptacle. These techniques and devices may further determine a flow rate of fluid entering the fluid collection receptacle or a volume of fluid collected within the fluid collection receptacle. Sensors, including pressure sensors, may be installed in, on, or within the fluid collection receptacle to detect information about the liquid within the receptacle including fluid level, flow rate, and volume.
PRESSURE BASED VOLUME SENSOR FOR LIQUID RECEPTACLE
Disclosed herein are various techniques and devices for detecting a level of fluid within a fluid collection receptacle. These techniques and devices may further determine a flow rate of fluid entering the fluid collection receptacle or a volume of fluid collected within the fluid collection receptacle. Sensors, including pressure sensors, may be installed in, on, or within the fluid collection receptacle to detect information about the liquid within the receptacle including fluid level, flow rate, and volume.
RAW MATERIAL FEEDING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RESIDUAL ESTIMATION METHOD
A raw material feeding device includes: a raw material container that accommodates a solid or liquid raw material; an upstream path connected to the raw material container; a downstream path connected to the raw material container; a bypass path that connects the upstream path and the downstream path to each other without passing through the raw material container; a downstream side valve; a pressure gauge provided in at least one of the upstream path and the downstream path; and a remaining amount estimation unit that acquires a pressure detection value from the pressure gauge, and estimates a remaining amount of the raw material within the raw material container based on the pressure detection value decreased when the downstream side valve is opened at start of flowing of the raw material gas from the raw material container to the downstream path.
RAW MATERIAL FEEDING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RESIDUAL ESTIMATION METHOD
A raw material feeding device includes: a raw material container that accommodates a solid or liquid raw material; an upstream path connected to the raw material container; a downstream path connected to the raw material container; a bypass path that connects the upstream path and the downstream path to each other without passing through the raw material container; a downstream side valve; a pressure gauge provided in at least one of the upstream path and the downstream path; and a remaining amount estimation unit that acquires a pressure detection value from the pressure gauge, and estimates a remaining amount of the raw material within the raw material container based on the pressure detection value decreased when the downstream side valve is opened at start of flowing of the raw material gas from the raw material container to the downstream path.
Residual gas volume measuring device, residual gas volume measuring method, and puncture member
A residual gas volume measuring device for measuring volume of residual gas in a container filled with liquid. The device includes: a puncture member having a first communication path and a second communication path formed therein and connecting a penetrating portion and a coupling portion together, the penetrating portion being located inside the container and the coupling portion being located outside the container when the puncture member is in a penetrating position where an end of the puncture member penetrates into the container; an injection section coupled to the first communication path at the coupling portion and configured to inject a liquid into the container; a discharging section coupled to the second communication path at the coupling portion and configured to discharge the residual gas purged by the injected liquid; and a measurement section configured to measure the volume of the residual gas discharged by the discharging section.
Residual gas volume measuring device, residual gas volume measuring method, and puncture member
A residual gas volume measuring device for measuring volume of residual gas in a container filled with liquid. The device includes: a puncture member having a first communication path and a second communication path formed therein and connecting a penetrating portion and a coupling portion together, the penetrating portion being located inside the container and the coupling portion being located outside the container when the puncture member is in a penetrating position where an end of the puncture member penetrates into the container; an injection section coupled to the first communication path at the coupling portion and configured to inject a liquid into the container; a discharging section coupled to the second communication path at the coupling portion and configured to discharge the residual gas purged by the injected liquid; and a measurement section configured to measure the volume of the residual gas discharged by the discharging section.
GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL METHOD
A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL METHOD
A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
SYSTEMS AND METHODS FOR FUEL QUANTITY MEASUREMENT
In accordance with at least one aspect of this disclosure, a fuel quantity measurement system includes, one or more pressure sensors are configured to operatively connect external to a fuel volume of a fuel tank, and can be operative to sense and output a signal indicative of a pressure outside of the fuel volume. One or more hollow pressure tubes can be configured to be disposed in the fuel volume in the fuel tank. The one or more hollow tubes can have a first end in fluid communication with the fuel volume and a second end configured to be sealed against an ambient environment external to the fuel tank. One or more temperature sensors can be configured to operatively connect within the fuel tank, operative to sense and output a signal indicative of a temperature of the fuel tank.
SYSTEMS AND METHODS FOR FUEL QUANTITY MEASUREMENT
In accordance with at least one aspect of this disclosure, a fuel quantity measurement system includes, one or more pressure sensors are configured to operatively connect external to a fuel volume of a fuel tank, and can be operative to sense and output a signal indicative of a pressure outside of the fuel volume. One or more hollow pressure tubes can be configured to be disposed in the fuel volume in the fuel tank. The one or more hollow tubes can have a first end in fluid communication with the fuel volume and a second end configured to be sealed against an ambient environment external to the fuel tank. One or more temperature sensors can be configured to operatively connect within the fuel tank, operative to sense and output a signal indicative of a temperature of the fuel tank.