A sensor comprising a whisker shaft and a follicle is provided. The shaft has a root end and a tip end and the shaft tapers from the root end to the tip end so that the root end is wider and the tip end is narrower. The root end is pivotably mounted in the follicle.

A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.

A pseudo-piezoelectric d33 device includes a nano-gap, and a pair of integral and substantially parallel electrodes having a first sensing electrode and a second sensing electrode. The first sensing electrode and the second sensing electrode constitute a receiver. The nano-gap is disposed between the first sensing electrode and the second sensing electrode. An initial height of the nano-gap is smaller than or equal to 100 nanometers. The nano-gap is formed after a thermal reaction between a semiconductor material and a metal material to form a semiconductor-metal compound. The first sensing electrode of the receiver includes the semiconductor-metal compound to provide an integral capacitive sensing electrode to sense a capacitance change with the second sensing electrode and generate a sensing signal.

A sensor and a preparation method thereof are provided, the sensor includes a sensor substrate, functional cuts, crack-arrest holes, a patterned electrode, wires, an adhesive layer, and release paper. The preparation method includes following steps, preparing the sensor substrate and sticking the adhesive layer on the sensor substrate; then sticking the release paper on the adhesive layer; obtaining the functional cuts by laser cutting or blanking process; pasting a metal mask on a surface of the sensor substrate; depositing a material of the patterned electrode into a gap of the metal mask; removing the metal mask after a solvent of the liquid is volatilized; leading out the wires from patterned electrode pins; obtaining the sensor eventually. The sensor has advantages such as controllable adhesion, small size, light weight, sensitive sensing and simple manufacturing. The sensors are arrayable and suitable for sticking and sensing of large deformation and complex surfaces.

A sensor and a preparation method thereof are provided, the sensor includes a sensor substrate, functional cuts, crack-arrest holes, a patterned electrode, wires, an adhesive layer, and release paper. The preparation method includes following steps, preparing the sensor substrate and sticking the adhesive layer on the sensor substrate; then sticking the release paper on the adhesive layer; obtaining the functional cuts by laser cutting or blanking process; pasting a metal mask on a surface of the sensor substrate; depositing a material of the patterned electrode into a gap of the metal mask; removing the metal mask after a solvent of the liquid is volatilized; leading out the wires from patterned electrode pins; obtaining the sensor eventually. The sensor has advantages such as controllable adhesion, small size, light weight, sensitive sensing and simple manufacturing. The sensors are arrayable and suitable for sticking and sensing of large deformation and complex surfaces.

A vibration sensing assembly, including a base, a side shell, a sensor, an upper cover, and a diaphragm assembly, is provided. The base includes first and second bottom plates. A first cavity is formed between the first and second bottom plates. The second bottom plate includes first and second through holes. The side shell is disposed on the second bottom plate and includes a cylinder and an inner partition. The inner partition divides the cylinder into a second cavity and an airflow channel. The airflow channel is communicated with the first cavity through the first through hole. The sensor is disposed in the second cavity and covers the second through hole. The side shell is located between the base and the upper cover. The base, the side shell, and the upper cover jointly form an outer shell. The diaphragm assembly is disposed between the side shell and the upper cover.

A vibration sensing assembly, including a base, a side shell, a sensor, an upper cover, and a diaphragm assembly, is provided. The base includes first and second bottom plates. A first cavity is formed between the first and second bottom plates. The second bottom plate includes first and second through holes. The side shell is disposed on the second bottom plate and includes a cylinder and an inner partition. The inner partition divides the cylinder into a second cavity and an airflow channel. The airflow channel is communicated with the first cavity through the first through hole. The sensor is disposed in the second cavity and covers the second through hole. The side shell is located between the base and the upper cover. The base, the side shell, and the upper cover jointly form an outer shell. The diaphragm assembly is disposed between the side shell and the upper cover.

An ultrasonic sensor includes an ultrasonic transducer; a first voltage output circuit to output a transmission voltage signal that oscillates between a first high voltage and a first low voltage, supplied to a first terminal of the ultrasonic transducer; a reception circuit to detect a voltage signal generated at a second terminal of the ultrasonic transducer; and the second voltage output circuit to output a second high voltage smaller than the first high voltage. The first voltage output circuit includes a first switching unit to perform switching between supplying the transmission voltage signal in ultrasonic transmission; and fixing a potential of the first terminal in ultrasonic reception. The second voltage output circuit includes a second switching unit that performs switching between supplying the second high voltage to the second terminal in ultrasonic transmission; and electrically separating the second voltage output circuit from the second terminal in ultrasonic reception.

Provided are a waveform analysis method and a waveform analysis device capable of preventing, in advance, a breakage accident during operation and preventing stoppage due to breakdown of machinery and performing efficient maintenance work by specifying a degraded part from among the parts that constitute the machinery. A waveform analysis device 30 is provided with; a signal analysis unit 31 for performing fast Fourier transform for a signal transmitted from a sensor 28 that detects a physical phenomenon in the machinery an impulse extraction unit 32 for extracting an impulse component from spectrum data generated by the signal analysis unit 31; a display unit 35 for displaying waveform data including the impulse component extracted by the impulse extraction unit 32; and a data editing unit 33 for editing, from data of a waveform including the impulse component displayed by the display unit 35, waveform data in a range selected via an input unit 36 by a worker, generating a graph displaying a frequency, a time, and the intensity of the impulse component, and displaying the graph on the display unit 35.

Provided are a waveform analysis method and a waveform analysis device capable of preventing, in advance, a breakage accident during operation and preventing stoppage due to breakdown of machinery and performing efficient maintenance work by specifying a degraded part from among the parts that constitute the machinery. A waveform analysis device 30 is provided with; a signal analysis unit 31 for performing fast Fourier transform for a signal transmitted from a sensor 28 that detects a physical phenomenon in the machinery an impulse extraction unit 32 for extracting an impulse component from spectrum data generated by the signal analysis unit 31; a display unit 35 for displaying waveform data including the impulse component extracted by the impulse extraction unit 32; and a data editing unit 33 for editing, from data of a waveform including the impulse component displayed by the display unit 35, waveform data in a range selected via an input unit 36 by a worker, generating a graph displaying a frequency, a time, and the intensity of the impulse component, and displaying the graph on the display unit 35.