A vibration sensor is designed to have a pressure-enhancing member, a pressure sensing device and first, second, third chambers. A first through hole is designed to enable the first chamber to be vented to the third chamber such that the first chamber is combined with the third chamber to obtain a communicable air volume. When the pressure-enhancing member is moved to squeeze the air in the second chamber, a sensitivity of the pressure sensing device will be greatly improved.

A vibration sensor is designed to have a pressure-enhancing member, a pressure sensing device and first, second, third chambers. A first through hole is designed to enable the first chamber to be vented to the third chamber such that the first chamber is combined with the third chamber to obtain a communicable air volume. When the pressure-enhancing member is moved to squeeze the air in the second chamber, a sensitivity of the pressure sensing device will be greatly improved.

An inertial measurement system includes three acceleration sensors detecting along three orthogonal axes, a display having several display areas, and a processor programed to perform a process. The processor calculates frequencies and spectral intensities of vibrations based on detected time series accelerations by three acceleration sensors and obtains relationship values between the calculated frequencies and the calculated spectral intensities. The processor causes the display to successively display an N-th value, intermediate values, and an (N+1)-th value of the relationship values at one display area in time series.

An inertial measurement system includes three acceleration sensors detecting along three orthogonal axes, a display having several display areas, and a processor programed to perform a process. The processor calculates frequencies and spectral intensities of vibrations based on detected time series accelerations by three acceleration sensors and obtains relationship values between the calculated frequencies and the calculated spectral intensities. The processor causes the display to successively display an N-th value, intermediate values, and an (N+1)-th value of the relationship values at one display area in time series.

Vibration tiles, vibration tile systems, and methods of operating the same include vibration sensors that acquire vibration data from a surface coupled to the vibration tile. The tile includes a housing, a power unit supported by the housing, the power unit configured to supply power to the vibration tile device, a vibration sensor supported by the housing, the vibration sensor configured to acquire vibration data from a surface, a wireless communication configured to wirelessly transmit the vibration data to at least one gateway device, and a controller coupled to the power unit, the vibration sensor, and the wireless communication module, the controller configured to operate the vibration sensor to acquire the vibration data from the surface. The vibration tiles may be used to train a profile to define and recognize known events corresponding to the vibration data acquired by one or more of the tiles.

A road surface condition identification apparatus for identifying a road surface condition is provided. The road surface condition identification apparatus includes a vibration detector unit configured to output a detection signal being an analog signal according to magnitude of vibration of the tire. For identifying the road surface condition, the road surface condition identification apparatus performs A-D conversion of converting the detection signal of the vibration detector unit into a digital signal. Based on data on vehicle speed, the road surface to condition identification apparatus sets a conversion range of the magnitude of the vibration of the tire used in the AD conversion from the detection signal into the digital signal.

A road surface condition identification apparatus for identifying a road surface condition is provided. The road surface condition identification apparatus includes a vibration detector unit configured to output a detection signal being an analog signal according to magnitude of vibration of the tire. For identifying the road surface condition, the road surface condition identification apparatus performs A-D conversion of converting the detection signal of the vibration detector unit into a digital signal. Based on data on vehicle speed, the road surface to condition identification apparatus sets a conversion range of the magnitude of the vibration of the tire used in the AD conversion from the detection signal into the digital signal.

Acoustic emission (AE) microelectromechanical system (MEMS) transducers of the present disclosure utilize a spring-mass system and a capacitance-change transduction principle. The transducers include a dielectric layer between a fixed electrode and a moveable metal layer to reduce the stiction failure. The moveable metal layer may displace in a particular direction when interacting with elastic waves. Additionally, the moveable metal layer may be formed using an electroplating technique. In some embodiments, multiple spring-mass unit cells may be combined in parallel to increase the sensitivity of the transducer.

Acoustic emission (AE) microelectromechanical system (MEMS) transducers of the present disclosure utilize a spring-mass system and a capacitance-change transduction principle. The transducers include a dielectric layer between a fixed electrode and a moveable metal layer to reduce the stiction failure. The moveable metal layer may displace in a particular direction when interacting with elastic waves. Additionally, the moveable metal layer may be formed using an electroplating technique. In some embodiments, multiple spring-mass unit cells may be combined in parallel to increase the sensitivity of the transducer.

The Application relates to optically transparent electrostatic transducers. In some embodiments, the transducers comprise graphene. Such transducers are capable of functioning as acoustic sensors and/or transmitters as a singulated device or in an array configuration. Also provided are methods of manufacturing and using such transducers.