A vibration detection apparatus is disclosed. The vibration detection apparatus comprises a body configured to have internal space, and a vibration sensor formed on the body and configured to sense vibration from a measuring object. Here, a space exists between the vibration sensor and a surface opposed to the vibration sensor of the body.

An illustrative example embodiment of an elevator system includes a machine including a motor and a brake. The machine is configured to selectively cause movement of an elevator car. At least one vibration sensor situated near the machine provides an indication of operation of the machine to indicate at least stops and starts of the machine associated with stopping and starting movement of the elevator car.

An illustrative example embodiment of an elevator system includes a machine including a motor and a brake. The machine is configured to selectively cause movement of an elevator car. At least one vibration sensor situated near the machine provides an indication of operation of the machine to indicate at least stops and starts of the machine associated with stopping and starting movement of the elevator car.

A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.

A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.

An acoustic sensor assembly that produces an electrical signal representative of an acoustic signal, includes an acoustic transduction element disposed in a housing and acoustically, a heat source causing air pressure variations within the housing when energized, and an electrical circuit electrically coupled to the acoustic transduction element and to contacts on an external-device interface of the housing, wherein the electrical circuit is configured to energize the heat source and determine a non-acoustic condition or change therein based on an amplitude of air pressure variations detected by the acoustic transduction element.

An acoustic sensor assembly that produces an electrical signal representative of an acoustic signal, includes an acoustic transduction element disposed in a housing and acoustically, a heat source causing air pressure variations within the housing when energized, and an electrical circuit electrically coupled to the acoustic transduction element and to contacts on an external-device interface of the housing, wherein the electrical circuit is configured to energize the heat source and determine a non-acoustic condition or change therein based on an amplitude of air pressure variations detected by the acoustic transduction element.

A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.

The present disclosure discloses an intelligent tunnel segment monitoring system, including two displacement transfer plates and a dislocation monitoring sensor; the two displacement transfer plates are respectively arranged on two adjacent tunnel segments; the dislocation monitoring sensor is connected to the two displacement transfer plates and is used for detecting relative displacement information between the two displacement transfer plates; when the two tunnel segments do not have a relative displacement, the two displacement transfer plates are located on the same plane; one of the displacement transfer plates is provided with a data acquisition and transmission device; the dislocation monitoring sensor is connected to an external data analysis terminal through the data acquisition and transmission device.

The present disclosure discloses an intelligent tunnel segment monitoring system, including two displacement transfer plates and a dislocation monitoring sensor; the two displacement transfer plates are respectively arranged on two adjacent tunnel segments; the dislocation monitoring sensor is connected to the two displacement transfer plates and is used for detecting relative displacement information between the two displacement transfer plates; when the two tunnel segments do not have a relative displacement, the two displacement transfer plates are located on the same plane; one of the displacement transfer plates is provided with a data acquisition and transmission device; the dislocation monitoring sensor is connected to an external data analysis terminal through the data acquisition and transmission device.