Exemplary aspects of the present invention are directed to an imaging sensor system for beams in the 1-200 nm spectral regions. The system may include a downconverter for converting the beam to visible light, optical filter elements, and relay optics for directing the visible light to the imaging detector. The relay optics convey the image and/or optical beam profile intensity to a 2-D imaging array such as CMOS, CCD (or other imaging detector device). The system can be used in a vacuum or in ambient non-vacuum conditions which may include a purged environment.

Exemplary aspects of the present invention are directed to an imaging sensor system for beams in the 1-200 nm spectral regions. The system may include a downconverter for converting the beam to visible light, optical filter elements, and relay optics for directing the visible light to the imaging detector. The relay optics convey the image and/or optical beam profile intensity to a 2-D imaging array such as CMOS, CCD (or other imaging detector device). The system can be used in a vacuum or in ambient non-vacuum conditions which may include a purged environment.

A measuring apparatus includes a holding table that holds a measurement-target object and a measuring unit that measures a height or a thickness of the measurement-target object held by the holding table. The measuring unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the measurement-target object held by the holding table. The light source unit includes an excitation light source, a fluorescent body that emits fluorescence when receiving excitation light emitted by the excitation light source, and a collecting lens that focuses the excitation light emitted by the excitation light source on the fluorescent body.

A measurement method includes: (a) measuring an emission intensity for each wavelength of light detected from a plasma generated in a plasma processing apparatus at each different exposure time by a light receiving element; (b) specifying, with respect to each of a plurality of different individual wavelength ranges that constitutes a predetermined wavelength range, a distribution of the emission intensity in the individual wavelength range measured at an exposure time at which an emission intensity of a predetermined wavelength included in the individual wavelength range becomes an emission intensity within a predetermined range; (c) selecting a distribution of the emission intensity in the individual wavelength range from the distribution of the emission intensity specified in (b); and (d) outputting the distribution of the emission intensity selected for each individual wavelength range.

A measurement method includes: (a) measuring an emission intensity for each wavelength of light detected from a plasma generated in a plasma processing apparatus at each different exposure time by a light receiving element; (b) specifying, with respect to each of a plurality of different individual wavelength ranges that constitutes a predetermined wavelength range, a distribution of the emission intensity in the individual wavelength range measured at an exposure time at which an emission intensity of a predetermined wavelength included in the individual wavelength range becomes an emission intensity within a predetermined range; (c) selecting a distribution of the emission intensity in the individual wavelength range from the distribution of the emission intensity specified in (b); and (d) outputting the distribution of the emission intensity selected for each individual wavelength range.

A marker is arranged to indicate the presence of ultraviolet radiation. The marker includes at least an emitting layer having a fluorescent material arranged to emit visible light in a first range of wavelengths in response to excitation by ultraviolet radiation in a second range of wavelengths. The emission of visible light is reversible, and the marker is reusable. The marker may be a warning sign, and may be adhered to a surface or incorporated into a freestanding portable apparatus.

A marker is arranged to indicate the presence of ultraviolet radiation. The marker includes at least an emitting layer having a fluorescent material arranged to emit visible light in a first range of wavelengths in response to excitation by ultraviolet radiation in a second range of wavelengths. The emission of visible light is reversible, and the marker is reusable. The marker may be a warning sign, and may be adhered to a surface or incorporated into a freestanding portable apparatus.

Provided are an image analysis method, an image analysis device, a program, and a recording medium capable of accurately estimating an image signal value of an object color-developed by using a specific coloring material by using an image signal value of a color chip.

The embodiment of the present invention acquires a spectral characteristic of an object color-developed by using a specific coloring material, acquires a spectral characteristic of each of a plurality of color chips formed of coloring materials different from the specific coloring material, approximates the spectral characteristic of the object by using an approximation expression including the spectral characteristic of each of the plurality of color chips as variables, acquires an image signal value, which is obtained by imaging each of the plurality of color chips by an imaging device and which corresponds to color of a captured image, for each color chip, and estimates the image signal value, which is obtained in a case where the object is imaged by the imaging device, based on the acquired image signal value for each color chip and the approximation expression.

A sensor system includes a probe, and a photon source configured to direct photons at the probe. The probe can emit light in response to receiving photons. The sensor system can include a photodetector configured to detect the light emitted from the probe, and a configured to cause the photon source to emit photons according to a first time-varying intensity profile having a first frequency. The controller can be configured to receive optical data from the photodetector based on the interaction between the light emitted from the probe and the photodetector. The optical data can include a second time-varying intensity profile having a second frequency. The second frequency can be substantially the same as the first frequency. The controller can be configured to determine a difference in phase between the first time-varying intensity profile and the second time-varying intensity profile, and generate a report based on the difference in phase.

A wearable UV sensor includes a UV pass filter; a UV phosphor material; and a visible light sensing device, wherein the UV sensor is configured to receive light including visible light and UV light, wherein the UV pass filter directs the UV light to the UV phosphor material and the UV phosphor material fluoresces visible light in proportion to the UV light from the UV pass filter, and the visible light sensing device measures the visible light fluorescing from the UV phosphor material to determine the amount of the UV light entering the sensor, which correlates to the UV exposure of a subject wearing the UV sensor.