The invention discloses a Trace Microanalysis Microscope System for high throughput screening. A multimodal imaging sensor arrangement acquires color, multispectral, hyperspectral and multi-directional polarized imaging, independently and in combinations thereof. In one aspect of this disclosure, the multimodal acquisition is combined with a plurality of sample illumination modes, further expanding the dimensionality of the generated data. In another aspect of this invention, machine learning-based methods combining and comparing a- priori data with the acquired multimodal data space, provide unique identifiers for the composition of the analyzed target objects. In yet another aspect of this invention, projection mapping of the identified compositional features navigates secondary sampling for subsequent analyses.

A microscope device includes an opening (31) that includes a first slit and a second slit through which a plurality of pieces of light from an observation target resulting from a plurality of pieces of irradiation light emitted to the observation target and having different wavelengths pass, a dispersion element that wavelength-disperses the plurality of pieces of light passing through the opening (31), and an imaging element (32) that receives the plurality of pieces of light wavelength-dispersed by the dispersion element. The imaging element (32) performs light reception so that, as for the plurality of pieces of light wavelength-dispersed, zeroth-order light of light passing through the second slit and first-order light of light passing through the first slit do not overlap with each other.

This invention addresses the abovementioned problem, and the purpose of this invention is to provide a far-infrared spectroscopy device that uses an is-TPG method to generate far-infrared light, and is capable of efficiently detecting is-TPG light without a detection optical system being fine-tuned. Even if the far-infrared light incidence angles on an Si prism for detection are the same when far-infrared light having a first frequency is incident on a non-linear optical crystal for detection and when far-infrared light having a second frequency is incident on the non-linear optical crystal for detection, this far-infrared. spectroscopy device adjusts the incidence surface angle of pump light in relation to the non-linear optical crystal for detection such that the angle of the far-infrared light in relation to the pump light within the non-linear optical crystal for detection can be appropriately set for each far-infrared light frequency (see FIG. 1A).

Improved imaging and spectrographic devices and systems, and in particular hyperspectral systems and devices suitable for use in analysis of soils and other geological substances, as well as other types of samples. The hyperspectral systems comprise diffraction gratings and a linear image sensor, and optionally one or more of light sources, lenses, slits, and digital light processors, and corresponding control processors and memory. Among other advantages, the hyperspectral systems and devices enable detailed spectrographic analysis of specific points, regions, and/or areas in analytical samples such as core samples and other types of soil blocks, using visible, infrared, and/or ultraviolet electromagnetic radiation.

A signal processing method according to one aspect of the present disclosure includes obtaining compressed image data including two-dimensional image information that is obtained by compressing hyperspectral information corresponding to wavelength bands included in a target wavelength range, obtaining setting data including information designating one or more sub-wavelength ranges that are parts of the target wavelength range, and generating, based on the compressed image data, two-dimensional images corresponding to wavelength bands included in the one or more sub-wavelength ranges.

When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time.

For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.

Disclosed are embodiments of an improved apparatus and system, and associated methods for optically diagnosing a semiconductor manufacturing process. A hyperspectral imaging system is used to acquire spectrally-resolved images of emissions from the plasma, in a plasma processing system. Acquired hyperspectral images may be used to determine the chemical composition of the plasma and the plasma process endpoint. Alternatively, a hyperspectral imaging system is used to acquire spectrally-resolved images of a substrate before, during, or after processing, to determine properties of the substrate or layers and features formed on the substrate, including whether a process endpoint has been reached; or before or after processing, for inspecting the substrate condition.

Optical spectrometers may be used to determine the spectral components of electromagnetic waves. Spectrometers may be large, bulky devices and may require waves to enter at a nearly direct angle of incidence in order to record a measurement. What is disclosed is an ultra-compact spectrometer with nanophotonic components as light dispersion technology. Nanophotonic components may contain metasurfaces and Bragg filters. Each metasurface may contain light scattering nanostructures that may be randomized to create a large input angle, and the Bragg filter may result in the light dispersion independent of the input angle. The spectrometer may be capable of handling about 200 nm bandwidth. The ultra-compact spectrometer may be able to read image data in the visible (400-600 nm) and to read spectral data in the near-infrared (700-900 nm) wavelength range. The surface area of the spectrometer may be about 1 mm.sup.2, allowing it to fit on mobile devices.

The present invention relates to a hazardous material measuring apparatus capable of analyzing concentration and components of various hazardous materials. The hazardous material measuring apparatus analyzes an optical spectrum obtained by a spectrometer or a hyperspectral image obtained by a hyperspectral camera, thereby analyzing concentration and components of the hazardous materials to be measured.

The present invention relates to a hazardous material measuring apparatus capable of analyzing concentration and components of various hazardous materials. The hazardous material measuring apparatus analyzes an optical spectrum obtained by a spectrometer or a hyperspectral image obtained by a hyperspectral camera, thereby analyzing concentration and components of the hazardous materials to be measured.