An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.

A method for making blackbody radiation source is provided. A blackbody radiation cavity and a carbon nanotube array located on a substrate are provided. A black lacquer layer is coated on an inner surface of the blackbody radiation cavity. A pressure is applied to the carbon nanotube array to form a carbon nanotube paper. The carbon nanotube paper is placed on the black lacquer layer. The substrate is peeled off to make the carbon nanotube paper bond to the black lacquer layer. An adhesive tape is placed on the carbon nanotube paper. And then the adhesive tape peeling off to separate carbon nanotubes in the carbon nanotube paper from the adhesive tape and bond to the black lacquer layer, the carbon nanotubes vertically aligned and forms the carbon nanotube array.

A system for detecting an oil leak can include: at least one infrared imaging sensor; and an imaging analysis computer operably coupled with the at least one infrared imaging sensor. The imaging analysis computer can be configured to control any infrared imaging sensor and acquire infrared images therefrom at any rate and in any duration. The imaging analysis computer can be configured to analyze the infrared images in order to detect an oil leak. The imaging analysis computer can be configured to detect oil on a surface (e.g., solid surface or water surface) where oil should not be (or is not present in a baseline) in order to determine that there is an oil leak in the vicinity.

A plane source blackbody is provided. The plane source blackbody comprises a panel, a black lacquer, and a carbon nanotube layer. The panel comprises a first surface and a second surface, and the first surface is opposite to the second surface. The black lacquer is located on the first surface. The carbon nanotube layer is located on a surface of the black lacquer away from the first surface. A method of making the plane source blackbody is also provided.

Apparatus and methods are disclosed utilizing selected infrared waveband observations to determine selected profiles of interest. A correlative system is constructed and installed at a processor. Thermal and refractivity profiles and structure in a waveband of interest are extracted from observed infrared spectrum single waveband observations received for processing at the processor by the correlative system. The output provides the selected profiles of interest in the waveband of interest. The apparatus includes an infrared receiver and means for measuring angular displacement of received emissions relative to a horizon. The processor converts received emission into equivalent Planck blackbody temperatures across the observations and correlates structure and vertical distribution of the temperatures to provide thermodynamic and refractivity profiles of interest.

The present invention provides a calibration apparatus, system and method for an in-vehicle camera. The calibration apparatus for an in-vehicle camera includes: a body, where at least one distinctive mark arranged at intervals along a first direction and at least one heating member arranged at intervals along a second direction are disposed on the body. The distinctive mark is configured to be recognized by a common camera, and the heating member is configured to generate heat so as to be recognized by an infrared camera. According to the calibration apparatus, system and method for an in-vehicle camera provided in the present invention, during calibration, a common camera can recognize the distinctive mark, and therefore, the common camera can be calibrated; the heating member may generate heat so as to be recognized by an infrared camera, and therefore, the infrared camera is calibrated. In this way, the common camera and the infrared camera can be calibrated simultaneously in one calibration operation; the operation is simple and convenient.

An apparatus and a method for online and real-time detection of a temperature of an epitaxial wafer (4) belong to the technical field of semiconductor detection. The apparatus comprises a MOCVD reaction chamber (1), a light source (6), a beam splitter (7), a reference light detector (8), a reflected light detector (9) and a data acquisition unit (10). The method, on the basis of the apparatus, can obtain a thermal radiation attenuation factor caused by a coating of a reactor chamber window and a reflectance attenuation factor caused by the coating of the reactor chamber window for the epitaxial wafer (4). The apparatus and method can eliminate influence of the coating of the reactor chamber window on an online and real-time temperature detection value, thereby improving the accuracy of the online and real-time temperature detection value.

A method comprises capturing outputs of a VLC and an infrared array sensor (IAS). A memory includes a calibration based on a position of a laser pointer relative to the IAS. The method includes the laser pointer outputting a light beam to produce a laser dot on a target. The output of the VLC includes a representation of the laser dot. The output of the IAS includes values indicative of infrared radiation from the target. The method includes determining a temperature based on a portion of the values indicative of infrared radiation from the target. The portion of the values includes values associated with a portion of the target at which the laser dot is produced. The method includes displaying, on the display, the output of the VLC and the temperature. Displaying the output of the VLC includes displaying a visible light image showing the laser dot and at least a portion of the target.

A method includes capturing and scaling VLC and an IAS outputs to generate a scaled VLC output and a scaled thermal output (STO), aligning the scaled VLC output to the STO to generate an aligned image based on the scaled VLC output and the STO, determining alignment value(s) based on the aligned image, a laser pointer outputting a light beam to produce a laser dot on a target, and capturing a further output of the VLC. The method includes displaying the further output of the VLC (including a representation of the laser dot (RLD)), and an alignment marker, shifting the alignment marker and/or the RLD to a common position; determining coordinate(s) of the output of the IAS based on coordinate(s) of the further output of the VLC where the alignment marker and the RLD are shown at the common position; and storing the coordinate(s) of the output of the IAS.

We disclose herein an infra-red (IR) device comprising a substrate comprising an etched cavity portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises a dielectric membrane which is adjacent, or directly above, or below the etched cavity portion of the substrate. The device further comprises a reflective layer on or in or above or below the dielectric membrane to enhance emission or absorption of infrared light at one or more wavelengths.