G01J9/02

Entanglement-Enhanced Interferometers
20220373397 · 2022-11-24 ·

An entanglement-enhanced interferometry system includes a source of correlated photons configured to two-mode squeezed vacuum (TMSV), a polarizing splitter or off-axis polarizing coupler configured to separate the correlated photons into two paths, a polarization control device configured to rotate polarization of photons on one of the two paths relative to the photons on the other of the two paths in order to make photons indistinguishable, a coupler configured to entangle the indistinguishable photons, and a polarization maintaining fiber-based interferometer configured to use the entangled photons as the input state. The source of correlated photons might be a nonlinear element such as a periodically poled element such as a lithium niobate bulk crystal or waveguide. The interferometer might be a Mach-Zehnder or a common path configuration. The coupler might be a 50:50 coupler or a polarizing coupler 45 degrees off-axis.

Entanglement-Enhanced Interferometers
20220373397 · 2022-11-24 ·

An entanglement-enhanced interferometry system includes a source of correlated photons configured to two-mode squeezed vacuum (TMSV), a polarizing splitter or off-axis polarizing coupler configured to separate the correlated photons into two paths, a polarization control device configured to rotate polarization of photons on one of the two paths relative to the photons on the other of the two paths in order to make photons indistinguishable, a coupler configured to entangle the indistinguishable photons, and a polarization maintaining fiber-based interferometer configured to use the entangled photons as the input state. The source of correlated photons might be a nonlinear element such as a periodically poled element such as a lithium niobate bulk crystal or waveguide. The interferometer might be a Mach-Zehnder or a common path configuration. The coupler might be a 50:50 coupler or a polarizing coupler 45 degrees off-axis.

Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System

The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.

Calculation method, recording method, optical film, and phase modulation structure
11573527 · 2023-02-07 · ·

A phase modulation structure includes a recording surface including phase angle recording regions in a plurality of calculated element regions corresponding to reconstruction points of an image on a one-to-one basis, each phase angle recording region being formed of a plurality of unit blocks in each of which a phase angle is recorded, the phase angle being calculated based on a phase that is a sum of a plurality of phases of light from the corresponding reconstruction points; and a representative area that is one of divisions of the calculated element region, the representative area being obtained by radially dividing the calculated element region centered on a point on the calculated element region, the point being obtained by extending a normal line from the corresponding reconstruction point to the calculated element region on the recording surface.

Integrated wavelength locker

Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

INTERFEROMETER WITH AT LEAST ONE DISPERSIVE ELEMENT
20220326086 · 2022-10-13 ·

An interferometer for use in remote sensing systems includes a beam splitter that separates an input wave into a reflected wave, which travels along a first optical path within an upper interferometer arm, and a transmitted wave, which travels along a second optical path within a lower interferometer arm. The reflected and transmitted waves are subsequently recombined by the beam splitter for imaging onto a sensor. A highly dispersive element is incorporated into at least one of the pair of interferometer arms. Due to anomalous dispersion, a frequency shift in a wave transmitted through a dispersive element changes the optical path length within its corresponding arm. As a result, the recombined wave produces an interference pattern with a measurable phase change that can be utilized to calculate the original frequency shift in the input wave with great precision and potential sub-Hertz sensitivity.

High precision optical locker

In some implementations, an optical assembly comprises an optical cavity; one or more detectors; and an optical component having an input face and an output face configured to receive an input beam to the input face and to produce one or more primary output beams, and a plurality of secondary output beams from the output face, the secondary output beams resulting from multiple internal reflections within the optical component. At least one of the input face is not perpendicular to the input beam or the output face is not perpendicular to the one or more primary output beams. Each primary output beam is transmitted through the optical cavity perpendicular to at least one surface of the optical cavity, and directed to a respective one of the one or more detectors. Each detector is arranged to exclude at least a portion of each secondary output beam.

SIMULTANEOUS PHASE-SHIFT POINT DIFFRACTION INTERFEROMETER AND METHOD FOR DETECTING WAVE ABERRATION
20230160684 · 2023-05-25 ·

A simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration. The interferometer comprises an ideal spherical wave generation module, an optical system to be measured, an image plane mask, a polarization phase shift module, a two-dimensional polarization imaging photodetector and a data processing unit. Single photodetector is adopted to realize simultaneous detection of more than three phase shift interference patterns, and has the advantages that environmental interference suppression, a flexible optical path, high measurement accuracy, and calibration of system errors of the interferometer may be realized.

Path fluctuation monitoring for frequency modulated interferometer

A method is presented for determining path length fluctuations in an interferometer using a reference laser with an arbitrary frequency with respect to the measured light. The method includes: injecting reference light along signal paths of the interferometer; measuring interference between the reference light at an output of the interferometer; determining an optical phase difference between the reference light in the two signal paths of the interferometer by measuring intensity modulation of the interference between the reference light and subtracting an intended frequency modulation from the measured intensity modulation; accumulating an unwrapped phase difference between the reference light in the two signal paths of the interferometer, where the unwrapped phase difference is defined in relation to a reference; and determining path length fluctuation of light in the interferometer using the unwrapped phase difference.

Path fluctuation monitoring for frequency modulated interferometer

A method is presented for determining path length fluctuations in an interferometer using a reference laser with an arbitrary frequency with respect to the measured light. The method includes: injecting reference light along signal paths of the interferometer; measuring interference between the reference light at an output of the interferometer; determining an optical phase difference between the reference light in the two signal paths of the interferometer by measuring intensity modulation of the interference between the reference light and subtracting an intended frequency modulation from the measured intensity modulation; accumulating an unwrapped phase difference between the reference light in the two signal paths of the interferometer, where the unwrapped phase difference is defined in relation to a reference; and determining path length fluctuation of light in the interferometer using the unwrapped phase difference.