Patent classifications
G01K11/20
HOLDER TEMPERATURE DETECTION METHOD, HOLDER MONITORING METHOD AND SUBSTRATE PROCESSING APPARATUS
A holder temperature detection method which measures a temperature of a rotatable holder that holds a substrate is provided. The method comprises a step of irradiating a fluorescent body thermally mounted on the holder with a light pulse having a first wavelength, a step of detecting fluorescence having a second wavelength emitted from the fluorescent body due to the light pulse and a step of estimating the temperature of the holder based on the detected fluorescence.
Environmental history monitor with positional displacement and security features
Environmental monitors for monitoring a predetermined environmental exposure, for example, an historical heat exposure such as a cumulative ambient heat exposure and/or a peak ambient heat exposure may include an environmental indicator material and a security material. The environmental monitor may be configured to attach to a host product for monitoring the predetermined environmental exposure of the host product, and additionally serve as an anti-counterfeiting indicator.
METHOD FOR FORMING A TEMPERATURE SENSING LAYER WITHIN A THERMAL BARRIER COATING
A thermal barrier coated component, such as a turbine blade formed from a superalloy substrate, includes a thermal barrier coating applied onto the substrate. A metallic bond coat layer is on the substrate and includes rare-earth luminescent dopants. A ceramic top coat layer is on the bond coat layer. A temperature sensing thermally grown oxide (TGO) layer is formed at the interface of the bond coat layer and ceramic top coat layer. The temperature sensing TGO layer includes grown rare-earth luminescent ions migrated from the metallic bond coat layer in an amount sufficient to enable luminescence sensing of the TGO layer for real-time phosphor thermometry temperature measurements at the TGO layer.
METHOD FOR FORMING A TEMPERATURE SENSING LAYER WITHIN A THERMAL BARRIER COATING
A thermal barrier coated component, such as a turbine blade formed from a superalloy substrate, includes a thermal barrier coating applied onto the substrate. A metallic bond coat layer is on the substrate and includes rare-earth luminescent dopants. A ceramic top coat layer is on the bond coat layer. A temperature sensing thermally grown oxide (TGO) layer is formed at the interface of the bond coat layer and ceramic top coat layer. The temperature sensing TGO layer includes grown rare-earth luminescent ions migrated from the metallic bond coat layer in an amount sufficient to enable luminescence sensing of the TGO layer for real-time phosphor thermometry temperature measurements at the TGO layer.
NANOSCALE THERMOMETRY
A nanoscale temperature detector including a diamond sensing probe with a transverse dimension of at least 200 nanometres and a sensing tip-having a curvature radius of less than 100 nanometres, less than 10 nanometres or less than 1 nanometre, and a plurality of colour centres, whose emission count rate show temperature-sensitive features. The diamond sensing probe has a transverse dimension of at least 200 nanometres and is connected to a to a detector system by means of a mounting structure. A thermal isolation barrier thermally decouples the sensing probe from the detector system.
NANOSCALE THERMOMETRY
A nanoscale temperature detector including a diamond sensing probe with a transverse dimension of at least 200 nanometres and a sensing tip-having a curvature radius of less than 100 nanometres, less than 10 nanometres or less than 1 nanometre, and a plurality of colour centres, whose emission count rate show temperature-sensitive features. The diamond sensing probe has a transverse dimension of at least 200 nanometres and is connected to a to a detector system by means of a mounting structure. A thermal isolation barrier thermally decouples the sensing probe from the detector system.
Phosphor thermometry device for synchronized acquisition of luminescence lifetime decay and intensity on thermal barrier coatings
A phosphor thermometry device includes a laser that generates a laser pulse onto a thermal barrier coating (TBC) applied onto a substrate. A metallic bond coat layer is on the substrate. A ceramic top coat layer is on the bond coat layer and includes an undoped layer and a doped sensing layer having co-doped first and second rare-earth luminescent dopants that emit respective first and second different emission wavelengths upon excitation by the laser pulse. A detector receives reflected, convoluted luminescence signals from the TBC. First and second photomultiplier devices detect respective first and second different emission wavelengths of the convoluted luminescence signals. A controller receives and processes signals generated from respective first and second photomultiplier devices and determines luminescence lifetime decay and intensity variations for each of the respective first and second rare-earth luminescent dopants for temperature monitoring of the TBC.
Phosphor thermometry device for synchronized acquisition of luminescence lifetime decay and intensity on thermal barrier coatings
A phosphor thermometry device includes a laser that generates a laser pulse onto a thermal barrier coating (TBC) applied onto a substrate. A metallic bond coat layer is on the substrate. A ceramic top coat layer is on the bond coat layer and includes an undoped layer and a doped sensing layer having co-doped first and second rare-earth luminescent dopants that emit respective first and second different emission wavelengths upon excitation by the laser pulse. A detector receives reflected, convoluted luminescence signals from the TBC. First and second photomultiplier devices detect respective first and second different emission wavelengths of the convoluted luminescence signals. A controller receives and processes signals generated from respective first and second photomultiplier devices and determines luminescence lifetime decay and intensity variations for each of the respective first and second rare-earth luminescent dopants for temperature monitoring of the TBC.
TEMPERATURE-SENSITIVE MATERIAL, A METHOD FOR ITS MANUFACTURE, AND A METHOD DETERMINING A THERMAL HISTORY OF THE MATERIAL
The present invention provides a temperature-sensitive material comprising a ceramic oxide host and a luminescent dopant, wherein the material exhibits one or more phase transformations, a powder comprising the material, a method of fabricating the powder, a coating comprising the material, a method of applying the coating, and a method of determining a thermal history of the material which has been subjected to a high temperature environment.
TEMPERATURE-SENSITIVE MATERIAL, A METHOD FOR ITS MANUFACTURE, AND A METHOD DETERMINING A THERMAL HISTORY OF THE MATERIAL
The present invention provides a temperature-sensitive material comprising a ceramic oxide host and a luminescent dopant, wherein the material exhibits one or more phase transformations, a powder comprising the material, a method of fabricating the powder, a coating comprising the material, a method of applying the coating, and a method of determining a thermal history of the material which has been subjected to a high temperature environment.