An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

Apparatus (100) for use in sensing temperature along a wellbore, comprising: tubing (110) comprising at least 6 temperature sensor modules (120) provided at locations along the inside of the tubing, each temperature sensor module comprising a temperature sensor comprising a crystal oscillator having an electrical oscillation frequency that varies with temperature; the tubing having an external diameter of less than 14 mm at the location of at least 6 temperature sensor modules.

An acoustic sensor has a MEMS die with MEMS structure. Among other things, the MEMS structure includes a diaphragm configured to mechanically respond to incident acoustic signals, and a temperature sensor member configured to detect temperature.

A method and system for optimizing RF energy delivery to a tissue ROI with a thermoacoustic system includes directing with a RF applicator, RF energy pulses into the tissue ROI having an object of interest and a reference separated by a boundary; detecting with a thermoacoustic transducer, a multi-polar thermoacoustic signal generated at the boundary in response to the RF energy pulses and processing the multi-polar acoustic signal to determine a peak-to-peak amplitude; detecting with the thermoacoustic transducer, an artifact multi-polar thermoacoustic signal generated at a location other than the boundary and processing it to determine a peak-to-peak amplitude; utilizing an electromagnetic model coupled with a model of patient anatomy to place dielectric or conducting materials near the thermoacoustic transducer or the RF applicator to optimize a signal-to-noise ratio of the multi-polar thermoacoustic signal generated at the boundary or minimize the artifact multi-polar thermoacoustic signal generated at a location other than the boundary; and directing with the RF applicator, RF energy pulses into the ROI for a thermoacoustic measurement and determine a parameter of the object of interest.

A method and system for optimizing RF energy delivery to a tissue ROI with a thermoacoustic system includes directing with a RF applicator, RF energy pulses into the tissue ROI having an object of interest and a reference separated by a boundary; detecting with a thermoacoustic transducer, a multi-polar thermoacoustic signal generated at the boundary in response to the RF energy pulses and processing the multi-polar acoustic signal to determine a peak-to-peak amplitude; detecting with the thermoacoustic transducer, an artifact multi-polar thermoacoustic signal generated at a location other than the boundary and processing it to determine a peak-to-peak amplitude; utilizing an electromagnetic model coupled with a model of patient anatomy to place dielectric or conducting materials near the thermoacoustic transducer or the RF applicator to optimize a signal-to-noise ratio of the multi-polar thermoacoustic signal generated at the boundary or minimize the artifact multi-polar thermoacoustic signal generated at a location other than the boundary; and directing with the RF applicator, RF energy pulses into the ROI for a thermoacoustic measurement and determine a parameter of the object of interest.

A device includes: an ultrasonic wave irradiation unit that irradiates a living body with an ultrasonic wave; an ultrasonic wave detection unit that receives an ultrasonic wave reflected by the living body; and a calculation unit that calculates an amount of temperature change in the living body. The calculation unit is configured to: calculate a frequency of an ultrasonic wave amplified in the living body, based on information on a structure of the living body; perform frequency analysis on the ultrasonic wave received by the ultrasonic wave detection unit and acquire an amplitude spectrum of the ultrasonic wave; identify, from the amplitude spectrum, a peak frequency closest to the frequency of the ultrasonic wave; calculate an amount of frequency change, from two peak frequencies identified by ultrasonic wave irradiations in twice; and calculate an amount of temperature change in the living body from the amount of frequency change.

This invention relates to a waveguide with distributed sensors that support traveling ultrasonic wave modes to provide quantitative local distributed sensing of the physical and chemical properties of the medium surrounding the sensor locations and/or the material properties of the waveguide. The plurality of sensors is operably associated with a plurality of wave modes for probing and identifying a plurality of properties simultaneously. The reflected waves are representative of local information about the surrounding media at that sensor location.

This invention relates to a waveguide with distributed sensors that support traveling ultrasonic wave modes to provide quantitative local distributed sensing of the physical and chemical properties of the medium surrounding the sensor locations and/or the material properties of the waveguide. The plurality of sensors is operably associated with a plurality of wave modes for probing and identifying a plurality of properties simultaneously. The reflected waves are representative of local information about the surrounding media at that sensor location.

Multiple spatially diverse and compact weight sensors are statistically combined to reduce or eliminate errors caused by snow bridging. Data transmission using satellite communication minimizes the power consumption of the sensor station further allowing the entire system to be relatively compact and easily transported. The weight sensors may be combined with other standard sensors for measurement of air temperature and snow height, the latter measurement, for example, using ultrasound ranging or the like.

Multiple spatially diverse and compact weight sensors are statistically combined to reduce or eliminate errors caused by snow bridging. Data transmission using satellite communication minimizes the power consumption of the sensor station further allowing the entire system to be relatively compact and easily transported. The weight sensors may be combined with other standard sensors for measurement of air temperature and snow height, the latter measurement, for example, using ultrasound ranging or the like.