Patent classifications
G01L1/18
Method for producing sensor and battery pressure detecting sensor produced thereby
Disclosed is a method for producing a sensor and a battery pressure detecting sensor produced thereby, which operate in a short mode when a pressure of a standard level or more is applied, thereby preventing the breakage and ignition of a battery due to swelling. The disclosed battery pressure detecting sensor disposes a membrane sheet formed with a first accommodation hole under a conductive sheet, has a part of the conductive sheet connected to a first terminal through a first accommodation hole, and has the membrane sheet connected to a second terminal.
High sensitivity silicon piezoresistor force sensor
Methods and systems for sensing a force using a sense die are provided. The sense die may include a slab die; an actuation element configured to contact the slab die and apply a force to the slab die; and one or more sense elements supported by the slab die.
High sensitivity silicon piezoresistor force sensor
Methods and systems for sensing a force using a sense die are provided. The sense die may include a slab die; an actuation element configured to contact the slab die and apply a force to the slab die; and one or more sense elements supported by the slab die.
Sensor element
A sensor element comprises: a first substrate; a detector disposed on the first substrate; and a second substrate surrounding the first substrate and supporting the first substrate. The second substrate is thicker than the first substrate. The second substrate has a connection part which is connected to the first substrate and a non-connection part which is not connected to the first substrate. The detector is located in the vicinity of the connection part.
Sensor element
A sensor element comprises: a first substrate; a detector disposed on the first substrate; and a second substrate surrounding the first substrate and supporting the first substrate. The second substrate is thicker than the first substrate. The second substrate has a connection part which is connected to the first substrate and a non-connection part which is not connected to the first substrate. The detector is located in the vicinity of the connection part.
Surface stress sensor, hollow structural element, and method for manufacturing same
Provided are a surface stress sensor that enables deterioration in measurement precision to be suppressed and a method for manufacturing the same. A surface stress sensor includes: a membrane configured to be bent by applied surface stress; a frame member configured to surround the membrane with gaps interposed therebetween when viewed from the thickness direction of the membrane; at least a pair of coupling portions configured to couple the membrane and the frame member; a flexible resistor configured to be disposed on at least one of the coupling portions and have a resistance value that changes according to bending induced in the coupling portion; and a support base member configured to be connected to the frame member and overlap the frame member when viewed from the thickness direction of the membrane, in which a cavity portion is disposed between the membrane and the support base member.
Surface stress sensor, hollow structural element, and method for manufacturing same
Provided are a surface stress sensor that enables deterioration in measurement precision to be suppressed and a method for manufacturing the same. A surface stress sensor includes: a membrane configured to be bent by applied surface stress; a frame member configured to surround the membrane with gaps interposed therebetween when viewed from the thickness direction of the membrane; at least a pair of coupling portions configured to couple the membrane and the frame member; a flexible resistor configured to be disposed on at least one of the coupling portions and have a resistance value that changes according to bending induced in the coupling portion; and a support base member configured to be connected to the frame member and overlap the frame member when viewed from the thickness direction of the membrane, in which a cavity portion is disposed between the membrane and the support base member.
HIGHLY SENSITIVE RESONANT FORCE SENSOR WITH A TEST BODY AND AT LEAST ONE RESONANT ELEMENT DECOUPLED AND EACH DISPOSED IN A SUITABLE ENVIRONMENT
A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.
CONTACT SENSORS
Embodiments disclosed herein relate to a thin, light, and portable system for measuring one or more parameters of a contact patch between a tire and a surface. The system may be configured with an array of sensors capable of being removable fixed to the surface. The array of sensors may measure the one or more parameters of the contact patch between the tire and the surface. Moreover, the system may include a scanner configured to interpret the measurements from the array of sensors as data and store the data.
CONTACT SENSORS
Embodiments disclosed herein relate to a thin, light, and portable system for measuring one or more parameters of a contact patch between a tire and a surface. The system may be configured with an array of sensors capable of being removable fixed to the surface. The array of sensors may measure the one or more parameters of the contact patch between the tire and the surface. Moreover, the system may include a scanner configured to interpret the measurements from the array of sensors as data and store the data.