A torsion sensor, configured to sense torque generated or received by a joint actuator, is provided. The torsion sensor includes an inner ring, an outer ring, multiple radial bridging portions, multiple overload structures, and multiple strain sensing units. The inner ring and the outer ring are disposed on the same axis and are separated from each other. The torque enables the inner ring and the outer ring to relatively rotate with reference to the axis. The radial bridging portions are disposed at intervals and each radial bridging portion is connected between the inner ring and the outer ring along a radial direction, and each radial bridging portion has at least one depression. Each overload structure extends from the inner ring toward the outer ring along the radial direction and has at least one gap with the outer ring. The strain sensing units are respectively disposed on the radial bridging portions.

This application provides a conveyor device and semiconductor production equipment, and relates to the technical field of semiconductor production equipment. The conveyor device is installed on a machine platform of semiconductor production equipment, the machine platform is provided with a guide structure, and the guide structure is provided with multiple oil injection ports arranged along an extension direction of the guide structure. The conveyor device includes a conveyor platform and a driving mechanism, where the conveyor platform is slidably installed on the guide structure to carry and convey wafers, the conveyor platform covers at least one of the multiple oil injection ports, and the driving mechanism is connected to the conveyor platform.

The present disclosure discloses a magnetic flexible tactile sensor structure based on a folding magnetization method, which comprises a flexible body containing a permanent magnetic material; the flexible body has a negative Poisson's ratio structure, and its set area has undergone folding magnetization treatment. The present disclosure also discloses a sensor composed of the above-mentioned sensing structure. The sensor provided by the present disclosure can be applied in sealed and wireless scenarios. The present disclosure can detect the size and position of force. The flexible sensor has broad prospects in the application of the touch skin of robots. The function between the magnetic field-based sensing magnet and the Hall element is contactless. In some cases where it is difficult to establish isolation of the connection lines, it can also be used as an unfettered tactile sensor.

A robotic surgical system includes a robotic arm and a force detection system coupled to the robotic arm. The force detection system includes a sensor configured to detect a force being applied on a patient as the robotic arm is translated to a position relative to a patient.

A method includes determining that a portion of a force applied to a sensor system was applied to a non-inclusive region of the sensor system. An activation area of the non-inclusive region may be determined. A force distribution of the non-inclusive region may be determined. A corresponding force measurement of the non-inclusive region based on the activation area and the force distribution may be calculated.

A method includes determining that a portion of a force applied to a sensor system was applied to a non-inclusive region of the sensor system. An activation area of the non-inclusive region may be determined. A force distribution of the non-inclusive region may be determined. A corresponding force measurement of the non-inclusive region based on the activation area and the force distribution may be calculated.

A method for “hands-on” identification on a steering system having two subsystems connected to one another by an elastic connection. The elastic connection has a static friction state and a sliding friction state for a respective set of external state variables. The steering system is excited by an excitation vibration, which is generated by a controllable vibration generator and has a respective excitation amplitude and a respective excitation frequency, for a respective set of external state variables, in which the respective excitation amplitude and the respective excitation frequency for the currently present set of external state variables are taken from a prescribed table and the vibration generator is controlled with them. A reaction torque to the excitation vibration is measured using a sensor. A phase difference between the excitation vibration and the reaction torque is calculated to identify a “hands-off” state as well as a “hands-on” state.

A motor electric control unit (ECU) for an electromechanical power steering mechanism, which controls current through an electric assist motor in response to steering mechanism sensors' signals. The ECU may comprise at least two channels. Each channel has the steering mechanism sensors in a redundancy concept. At least one voter that is assigned to an actuator and is configured to vote on the correct steering mechanism sensors' outputs of the at least two channels. The steering mechanism sensors may include a steering column torque sensor and an RPS sensor for sensing a rotor angle of the electric assist motor. Each of the at least two channels may include processors that have different software to protect against systematic faults.

A method in which a continuous estimation of the intermediate friction rate is carried out, allowing the integration of the method into a general friction compensation method so as to continuously improve the feel on the steering wheel, particularly for speeds below a determined threshold. Also, a method for friction compensation in an electrical power steering system, characterised in that the compensation method takes into account a continuous estimation of the intermediate friction rate obtained by the estimation method.

A torque sensor including a shaft that receives an applied torque is disclosed. The shaft includes a magnetoelastic region that generates a non-negligible magnetic field responsive to the applied torque and one or more null regions that each generates a negligible magnetic field. The torque sensor includes a plurality of null region sensors proximal a null region that generate a null region magnetic field measure corresponding to a magnitude of an ambient magnetic field. The torque sensor includes a magnetoelastic region sensor proximal the magnetoelastic region that generates a magnetoelastic region magnetic field measure corresponding to the magnitude of the ambient magnetic field and a magnitude of the non-negligible magnetic field. The torque sensor includes a controller coupled to the null region sensors and the magnetoelastic region sensor that calculates a magnitude of the applied torque based on the null region magnetic field measures and the magnetoelastic region magnetic field measure.