A pressure sensing unit, a capacitive hybrid sensor device, and an input apparatus using the same are provided. The pressure sensing unit for detecting pressing events includes a pressure sensing pad group and a floating conductive element. The pressure sensing pad group includes a first pressure sensing pad, a second pressure sensing pad, and a ground pad that are spaced apart from one another. The first pressure sensing pad and the second pressure sensing pad are electrically shielded from each other by the ground pad. One of the floating conductive element and the pressure sensing pad group is configured to be movable in a movement direction relative to another one of the floating conductive element and the pressure sensing pad group. The floating conductive element overlaps with the pressure sensing pad group in the movement direction.

A pressure sensing unit, a capacitive hybrid sensor device, and an input apparatus using the same are provided. The pressure sensing unit for detecting pressing events includes a pressure sensing pad group and a floating conductive element. The pressure sensing pad group includes a first pressure sensing pad, a second pressure sensing pad, and a ground pad that are spaced apart from one another. The first pressure sensing pad and the second pressure sensing pad are electrically shielded from each other by the ground pad. One of the floating conductive element and the pressure sensing pad group is configured to be movable in a movement direction relative to another one of the floating conductive element and the pressure sensing pad group. The floating conductive element overlaps with the pressure sensing pad group in the movement direction.

The invention relates to a method and to a measurement cell assembly for determining a pressure in a pressure cell (2) are given, wherein the method consists in that a measurement signal (x) is determined, which is at least proportional to a measured pressure in the pressure cell (2), and in that the measurement signal (x) is filtered by means of a first filter unit (10) having a low-pass characteristic in order to produce an output signal (y), wherein the low-pass characteristics of the first filter unit (10) is defined by means of a first damping factor (α.sub.1). The method is characterized in that an input difference (x_diff), which results from a difference between the output signal (y) and the measurement signal (x), is filtered by means of a second filter unit (20) having a low-pass characteristic to determine an output difference, wherein the low-pass characteristic of the second filter unit (20) is defined by means of a second damping factor (α.sub.2), and in that the first damping factor (α.sub.1) of the first filter unit (10) is determined on the basis of the output difference of the second filter unit (20).

A pressure sensor device includes an electrically insulative substrate, a base electrode layer, spacer portions, a guard electrode layer, and a membrane plate. A sensing electrode portion and monitoring electrode portions are located on the membrane plate and face the substrate. In a case where the monitoring electrodes are mounted on a circuit board, the monitoring electrodes detect at least one of stress or strain occurring in or on the spacer portions.

The present application relates to a sensor with a time-sharing regional shielding function and a robot. The sensor comprises a plurality of sensor units, each of which comprises regions contained in four multifunctional layers. Four parallel-plate capacitors are contained in the multifunctional layers. The multifunctional layers realize the regional shielding function through the time-sharing switching of analog switches and the control of a bus.

A method and apparatus for determining a concentration of aerosol particles in a carrier gas. The method comprises providing an aerosol having aerosol particles in a carrier gas comprising at least one condensable component; introducing at least part of the aerosol into a chamber of a pressure-rated vessel, wherein the chamber is delimited by at least one wall adjoining the chamber and set to a temperature which is above a saturation temperature of the at least one condensable component; subsequently removing part of the aerosol from the chamber, as a result of which a decrease in pressure in the chamber occurs, as a result of which the at least one condensable component condenses at least partly on the aerosol particles; and determining a concentration of aerosol particles in the carrier gas during removal of the part of the aerosol from the chamber.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.

MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.