A sensor element includes: a supporting body; and a sensor body, the sensor body being planar and being formed of an elastic material, a first surface and a second surface of the sensor body each having an electrically conductive coating. The supporting body and the sensor body are integrally formed.

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

A pressure measuring device configured as a multi-function device operable as a differential pressure switch (DPS), a differential pressure transducer (DPT), a pressure switch (PS), a pressure transducer (PT) providing readings of high and low pressure zones, a data recording logger, and a backwashing controller. The pressure measuring device may use at least two piezoelectric sensors operable to measure pressure attributes. The associated electronic hardware, processing unit, cables and pressure tubing are retrofittable and packaged in a molded case, with no moving parts with the electronic hardware fully coated to make the device reliable and resistant to extreme environmental conditions. The device is configured for remote access, enabling remote device configuration, maintenance and servicing. The device is further operable to communicate with various external devices: a tablet, a smartphone and the like as a user interface and further provides wired interface with a programmable logic controller (PLC) via RS-485 interface.

A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in each case, a pressure tube is arranged, which protrudes from a rear side of the measuring mechanism platform to support a pressure difference measuring cell, wherein the pressure tubes are connected pressure-tightly with the measuring mechanism platform from the process connection surface.

The present invention makes it possible to, even when a stainless steel is adopted in a diaphragm: prevent the diaphragm and a strain sensor from exfoliating from each other; be hardly susceptible to the influence of temperature in an operating environment; not allow the sensitivity of a pressure sensor to be dominated only by the mechanical characteristic of a material constituting the diaphragm; and increase the degree of freedom in design of members constituting the pressure sensor. A pressure sensor according to the present invention is, in order to solve the above problems, characterized in that: the pressure sensor has a diaphragm deforming by the pressure of a fluid, an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side, and a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to the center of the diaphragm and detecting the deformation of the elastic body working together with the deformation of the diaphragm as a strain; and the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.

Implementations of absolute pressure sensor devices may include a microelectromechanical system (MEMS) absolute pressure sensor coupled over a controller die. The MEMS absolute pressure sensor may be mechanically coupled to the controller die and may also be configured to electrically couple with the controller die. A perimeter of the controller die may be one of the same size and larger than a perimeter of the MEMS absolute pressure sensor. The controller die may be configured to electrically couple with a module through an electrical connector.

Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

A differential pressure transmitter is disclosed, which comprises a body for housing a high-pressure sensor and a low-pressure sensor, a plurality of high-pressure process connectors formed in said body and fluidly coupled to said high-pressure sensor for transmitting a first pressure of a process fluid to said high-pressure sensor, each of said high-pressure process connectors comprising a conduit having an opening for receiving the process fluid, a plurality of low-pressure process connectors formed in said body and fluidly coupled to said low-pressure sensor for transmitting a second pressure of a process fluid to said low-pressure sensor, each of said low-pressure process connectors comprising a conduit having an opening for receiving the process fluid, wherein said second pressure is equal to or less than said first pressure, wherein said openings of the high-pressure connectors are spaced relative to said openings of the low-pressure connectors to allow a plurality of pair-wise connections to the process fluid.

The present invention relates to a differential pressure sensor. The differential pressure sensor includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber; a sensor element installed on the first surface of the substrate so as to generate an electric signal corresponding to a pressure difference between the first chamber and the second chamber; a lead frame installed in the housing with one end thereof extending into the first chamber, the lead frame configured to transmit the electric signal of the sensor element to an external device; a conductive wire configured to connect the terminal of the substrate and the lead frame so as to transmit the electric signal of the sensor element to the lead frame; a first sealing member disposed in a region where the body and the cover make contact with each other, the first sealing member configured to seal the first chamber with respect to the outside; and a second sealing member disposed in a region where the substrate and the body make contact with each other, the second sealing member configured to seal the second chamber with respect to the first chamber.

According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.