A sensor element includes: a supporting body; and a sensor body, the sensor body being planar in shape, being made of an elastic material, and having a first surface and a second surface coated so as to be electrically conductive. The sensor body includes a measuring segment and a fastening segment. A layer thickness of the fastening segment is greater than a layer thickness of the measuring segment.

The present disclosure provides a pressure sensor, including a chamber and a film. The chamber includes a first wall with a first electrode and a second wall with a second electrode. The first wall faces the second wall, and the first electrode and the second electrode respectively include conductive or semiconductive material. The film lines a surface inside the chamber exclusive of the first electrode and the second electrode for blocking outgassing entering the chamber from the surface. A method of manufacturing the pressure sensor is also disclosed.

The present disclosure provides a pressure sensor, including a chamber and a film. The chamber includes a first wall with a first electrode and a second wall with a second electrode. The first wall faces the second wall, and the first electrode and the second electrode respectively include conductive or semiconductive material. The film lines a surface inside the chamber exclusive of the first electrode and the second electrode for blocking outgassing entering the chamber from the surface. A method of manufacturing the pressure sensor is also disclosed.

A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in each case, a pressure tube is arranged, which protrudes from a rear side of the measuring mechanism platform to support a pressure difference measuring cell, wherein the pressure tubes are connected pressure-tightly with the measuring mechanism platform from the process connection surface.

A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in each case, a pressure tube is arranged, which protrudes from a rear side of the measuring mechanism platform to support a pressure difference measuring cell, wherein the pressure tubes are connected pressure-tightly with the measuring mechanism platform from the process connection surface.

The present invention relates to a differential pressure sensor. The differential pressure sensor includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber; a sensor element installed on the first surface of the substrate so as to generate an electric signal corresponding to a pressure difference between the first chamber and the second chamber; a lead frame installed in the housing with one end thereof extending into the first chamber, the lead frame configured to transmit the electric signal of the sensor element to an external device; a conductive wire configured to connect the terminal of the substrate and the lead frame so as to transmit the electric signal of the sensor element to the lead frame; a first sealing member disposed in a region where the body and the cover make contact with each other, the first sealing member configured to seal the first chamber with respect to the outside; and a second sealing member disposed in a region where the substrate and the body make contact with each other, the second sealing member configured to seal the second chamber with respect to the first chamber.

The present invention relates to a differential pressure sensor. The differential pressure sensor includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber; a sensor element installed on the first surface of the substrate so as to generate an electric signal corresponding to a pressure difference between the first chamber and the second chamber; a lead frame installed in the housing with one end thereof extending into the first chamber, the lead frame configured to transmit the electric signal of the sensor element to an external device; a conductive wire configured to connect the terminal of the substrate and the lead frame so as to transmit the electric signal of the sensor element to the lead frame; a first sealing member disposed in a region where the body and the cover make contact with each other, the first sealing member configured to seal the first chamber with respect to the outside; and a second sealing member disposed in a region where the substrate and the body make contact with each other, the second sealing member configured to seal the second chamber with respect to the first chamber.

Apparatus and associated methods relate to sensing a physical parameter and verifying correct operation of a system used to sense the physical parameter. A sensing device includes four resistive elements configured in a Wheatstone bridge configuration is configured to sense the physical parameter. A biasing network selectively provides first and second biasing conditions to the sensing device. First and second output electrical signals are generated by the sensing device in response to the first and second biasing conditions, respectively, selectively provided to the sensing device. The first and second output electrical signals are each indicative of the parameter value of the physical parameter, but not necessarily equal to one another. A verification module verifies correct operation of the system based on a consistency determination of first and second output electrical signals.

Apparatus and associated methods relate to sensing a physical parameter and verifying correct operation of a system used to sense the physical parameter. A sensing device includes four resistive elements configured in a Wheatstone bridge configuration is configured to sense the physical parameter. A biasing network selectively provides first and second biasing conditions to the sensing device. First and second output electrical signals are generated by the sensing device in response to the first and second biasing conditions, respectively, selectively provided to the sensing device. The first and second output electrical signals are each indicative of the parameter value of the physical parameter, but not necessarily equal to one another. A verification module verifies correct operation of the system based on a consistency determination of first and second output electrical signals.

The present invention provides a pressure change measuring apparatus and a pressure change measuring method, which are capable of detecting a change in pressure to be measured with respect to a time axis with high accuracy. Specifically, a reference value setting unit (60) included in a pressure change measuring apparatus (1) is configured to generate a reference value signal based on an output signal of a differential pressure measuring cantilever (4) under a predetermined state, and to output the reference value signal. An arithmetic processing unit (30) is configured to calculate the pressure change in pressure to be measured based on the output signal, the reference value signal, a volume of a cavity (10), a flowing quantity of a pressure transmission medium flowing into and out of the cavity (10) for every unit of a predetermined time period, and the like.