G01L19/0092

Device for measuring pressure, gas and / or moisture based on ambient humidity
11467114 · 2022-10-11 ·

An apparatus and a method for measuring pressure, gas and/or humidity, the apparatus having at least one sensor with at least one capacitor comprising at least two electrodes that are arranged in a horizontal direction relative to one another along and on a flexible support material. At least one dielectric layer is arranged between the electrodes and at least one at least partially moisture-permeable and/or moisture-absorbing and/or gas-permeable and/or gas-absorbing moisture layer is arranged at least in some places on a side, facing away from a support material, of at least one electrode and/or the dielectric layer. At least one electrode and/or the dielectric layer are thus arranged transversely between the support material and the moisture layer. A capacitance is at least partially changed by moisture hitting the dielectric layer, and a processing unit measures and/or stores this change, so as to create a capacitive moisture sensor.

FLOW METROLOGY CALIBRATION FOR IMPROVED PROCESSING CHAMBER MATCHING IN SUBSTRATE PROCESSING SYSTEMS
20220333972 · 2022-10-20 ·

A method for calibrating a gas flow metrology system for a substrate processing system includes a) measuring temperature using a first temperature sensor and a reference temperature sensor over a predetermined temperature range and determining a first transfer function; b) measuring pressure using a first pressure sensor and a reference pressure sensor over a predetermined pressure range using a first calibration gas and determining a second transfer function; c) performing a first plurality of flow rate measurements in a predetermined flow rate range with a first metrology system and a reference metrology system, wherein the first metrology system and the reference metrology system use a first orifice size and the first calibration gas; and d) scaling temperature and pressure using the first transfer function and the second transfer function, respectively, and determining a corresponding transfer function for the first calibration gas based on the first plurality of flow rate measurements.

Multifunction magnetic and piezoresistive MEMS pressure sensor
11605774 · 2023-03-14 · ·

Aspects of the subject technology relate to an apparatus including a housing, one or more piezoresistive elements and a magnetic actuator. The housing includes a membrane, and the piezoresistive elements are disposed on the membrane to sense a displacement due to a deflection of the membrane. The magnetic actuator is disposed inside a cavity of the housing. The magnetic actuator exerts a repulsive force onto the membrane to reduce the deflection of the membrane.

Measuring device and method for pore throat pressure of jamin effect based on mechanochromic materials

A measuring device for pore throat pressure of Jamin effect based on mechanochromic materials is provided and includes: a bubble pressurization part, configured to inject bubbles into a microscopic visualization test part; the microscopic visualization test part including a mechanochromic material and a pore throat structure, configured to characterize changes of pore throat pressure during bubble injection; a waste liquid recycling part, configured to recycle bubble waste liquid passing through the microscopic visualization test part; a data acquisition and analysis part, configured to acquire changing data of the pore throat pressure in the microscopic visualization test part and analyze the changing data to obtain the pore throat pressure. The device is simple in structure and easy to operate, and provides a method for measuring an internal surface pressure of an object. The method can realize a real time measurement of the pore throat pressure of Jamin effect.

Interface pressure sensor system for electronic device
11624667 · 2023-04-11 · ·

An interface pressure sensor includes a fluid pressure sensor disposed in a volume defined by a shear wall. The volume is enclosed, and the fluid pressure sensor is encapsulated by, an infill material. The infill material defines a sensing surface that, when pressed, can impart a force that is detectable by the fluid pressure sensor.

Estimation of barometric pressure measurement bias with adjustment based on a value expected for a wireless terminal

A method for estimating the pressure measurement bias of a barometric sensor in a wireless terminal. A location engine using the method generates an enhanced estimate of the measurement bias. The location engine generates the enhanced estimate based in part on relatively coarse estimates of the elevation of the wireless terminal. The coarse estimates are used to generate instantaneous estimates of measurement bias and bias uncertainty. As needed, the location engine adjusts the instantaneous estimate of bias uncertainty, in order to reflect an instantaneous estimate of measurement bias that is recognized as being in error. The adjustment is based on what is expected as a probable measurement bias value for the particular wireless terminal. Once the location engine generates the enhanced estimate of measurement bias, it can generate improved estimates of elevation of the wireless terminal.

Tire pressure sensor and burning device and burning method thereof

The present disclosure discloses a tire pressure sensor burning device for burning at least one tire pressure sensor having or being externally inputted an exclusive code and a joint code. The tire pressure sensor burning device includes a burning tool in which a communication protocol is stored, and the burning tool includes a transmitting unit connected with the tire pressure sensor and sending a switch command thereto for switching the mode of the tire pressure sensor from the exclusive code to the joint code. The burning tool sends a burning command to the tire pressure sensor with the transmitting unit, and unilaterally burns the communication protocol into the tire pressure sensor via the joint code.

ENHANCED FRONT IMPACT DETECTION UTILIZING PRESSURE TUBE SENSOR

A method for controlling an actuatable safety device (110) for helping to protect a vehicle occupant includes sensing left-front and right-front pressure values via a pressure tube sensor (18). The method also includes executing pressure tube metrics that evaluate the left-front and right-front pressure values and selecting switched crash thresholds in response to the pressure tube metrics. The method also includes sensing vehicle acceleration parameters (99) and executing one or more crash metrics that evaluate the vehicle acceleration parameters to determine whether the switched crash thresholds are exceeded. The method further includes controlling deployment of the actuatable safety device (110) in response to determining that the switched crash thresholds are exceeded. A vehicle safety system (100) implements the method.

SURFACE-ACOUSTIC-WAVE TEMPERATURE AND PRESSURE SENSING DEVICE AND MANUFACTURING METHOD THEREOF

Disclosed in the present disclosure are a surface-acoustic-wave temperature and pressure sensing device and a manufacturing method thereof. The surface-acoustic-wave temperature and pressure sensing device includes a first high-temperature-resistant substrate and a second high-temperature-resistant substrate bonded together, where a recess is formed in the second high-temperature-resistant substrate to form a sealed cavity between the first high-temperature-resistant substrate and the second high-temperature-resistant substrate; first surface-acoustic-wave temperature sensors and surface-acoustic-wave pressure sensors are formed on a first surface of the first high-temperature-resistant substrate located in the cavity, and second surface-acoustic-wave temperature sensors are formed on a second surface of the first high-temperature-resistant substrate opposite the first surface; and the first surface-acoustic-wave temperature sensors, the second surface-acoustic-wave temperature sensors, and the surface-acoustic-wave pressure sensors are electrically connected to one another.

Thermal Chain Determination Method and Thermal Chain Detection System for Battery Pack

A battery pack includes cells, a pressure contributing component contributing to a change in pressure in the battery pack, at least one pressure sensor configured to detect the pressure in the battery pack, and at least one voltage sensor configured to detect a voltage of the cells. A thermal chain determination method includes detecting the pressure in the battery pack, detecting the voltage of the cells, determining that the pressure in the battery pack is abnormal when an amount or rate of change is larger than a predetermined value, determining that the voltage of the cells is abnormal when an amount or rate of change in the detected voltage is larger than a predetermined value, or when an absolute value of the voltage of the cells is smaller than a predetermined value, and determining that a thermal chain occurs when both the pressure and the voltage are abnormal.