According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.

The invention describes a pressure transducer having a pressure measuring cell, a position sensor, and an analysis device which has at least one signal processing device and a position correction device for the purpose of determining a position error, wherein the at least one position sensor is arranged in a stationary position relative to the pressure measuring cell, and the position sensor is electrically connected to the position correction device, wherein a first signal is provided by the signal processing device, said signal being determined from a signal provided by the pressure measuring cell, wherein a second signal is provided by the position sensor, and wherein an output signal is provided by the position correction device, determined from the first and the second signals.

The invention describes a pressure transducer having a pressure measuring cell, a position sensor, and an analysis device which has at least one signal processing device and a position correction device for the purpose of determining a position error, wherein the at least one position sensor is arranged in a stationary position relative to the pressure measuring cell, and the position sensor is electrically connected to the position correction device, wherein a first signal is provided by the signal processing device, said signal being determined from a signal provided by the pressure measuring cell, wherein a second signal is provided by the position sensor, and wherein an output signal is provided by the position correction device, determined from the first and the second signals.

A differential pressure measuring device (10, 50) comprising a housing (18) having two pressure areas (20, 22) which are sealed relative to each other and are separated from each other by a membrane (12, 54). The membrane (12, 54) comprises a pressure plate (14) surrounded by an elastic circumferential area (16) allowing axial movement of the pressure plate (14). An indicator element (24, 56) is permanently connected to the pressure plate (14) and whose position can be evaluated in a non-contact manner by a sensor (34, 58). At least one pair of springs (28, 52) is provided, with one spring (30, 32) each of said pair of springs being located in an allocated pressure area (20, 22). Each spring (30, 32) of said pair of springs (28, 52) exerts an opposing spring force on the pressure plate (14).

A differential pressure measuring device (10, 50) comprising a housing (18) having two pressure areas (20, 22) which are sealed relative to each other and are separated from each other by a membrane (12, 54). The membrane (12, 54) comprises a pressure plate (14) surrounded by an elastic circumferential area (16) allowing axial movement of the pressure plate (14). An indicator element (24, 56) is permanently connected to the pressure plate (14) and whose position can be evaluated in a non-contact manner by a sensor (34, 58). At least one pair of springs (28, 52) is provided, with one spring (30, 32) each of said pair of springs being located in an allocated pressure area (20, 22). Each spring (30, 32) of said pair of springs (28, 52) exerts an opposing spring force on the pressure plate (14).

A sensor offset voltage compensation circuit includes a programmable gain amplifier (PGA) having an input loop configured to receive the signal output by a sensor (e.g., a voltage generated a sensor resistive bridge of a pressure sensor) and an output loop configured to furnish an output signal having a voltage that is greater than the input voltage. An offset compensation voltage is applied to at least one of the input loop or the output loop of the PGA to at least substantially cancel the zero-quantity offset voltage of the sensor from the output voltage.

A pressure transmitter includes a housing and a pressure sensor having an electrical characteristic that varies with applied pressure. The pressure sensor is configured to generate a sensor signal indicative of process fluid pressure. A transmitter isolation diaphragm is configured to couple to a process barrier seal to convey pressure to the pressure sensor. A flange is coupled to the transmitter isolation diaphragm. The flange includes at least one gas pathway extending inwardly from an outer diameter of the transmitter isolation diaphragm. Electronics are coupled to the pressure sensor to receive the sensor signal and to generate an output indicative of the pressure.

A pressure sensor with calibration function includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing, the at least one calibration element changes the pressure applied to the medium.

The disclosed technology includes an oil-filled pressure transducer assembly and an oil-filled compensating sensing element disposed near one another and attached to a common housing. The oil-filled pressure transducer assembly may receive and measure pressure media via a first oil-filled cavity and a protective diagram in communication with the pressure media. The compensating sensing element may be isolated from the pressure media. In certain example implementations, the compensating sensing element is configured to measure certain common error phenomena that are also measured by the oil-filled pressure transducer assembly, for example, due to acceleration, temperature, and/or vibration. In certain implementations, the signal measured by the compensating sensing element may be subtracted from the signal measured by the oil-filled pressure transducer assembly to provide a compensated output signal.

The disclosed technology includes an oil-filled pressure transducer assembly and an oil-filled compensating sensing element disposed near one another and attached to a common housing. The oil-filled pressure transducer assembly may receive and measure pressure media via a first oil-filled cavity and a protective diagram in communication with the pressure media. The compensating sensing element may be isolated from the pressure media. In certain example implementations, the compensating sensing element is configured to measure certain common error phenomena that are also measured by the oil-filled pressure transducer assembly, for example, due to acceleration, temperature, and/or vibration. In certain implementations, the signal measured by the compensating sensing element may be subtracted from the signal measured by the oil-filled pressure transducer assembly to provide a compensated output signal.