Patent classifications
G01L19/02
MEMS sensors, methods for providing same and method for operating a MEMS sensor
In accordance with an embodiment, a MEMS sensor includes a MEMS arrangement having a movable electrode and a stator electrode arranged opposite the movable electrode. The MEMS sensor includes a first bias voltage source, which is connected to the stator electrode and which is configured to apply a first bias voltage to the stator electrode. The MEMS sensor further includes a common-mode read-out circuit connected to the stator electrode by a capacitive coupling and comprising a second bias voltage source, which is configured to apply a second bias voltage to a side of the capacitive coupling that faces away from the stator electrode.
MOBILE ELECTRONIC DEVICE AND ROADSIDE UNIT
A mobile electronic device comprises a communication unit obtaining a first atmospheric pressure value from a roadside unit associated with a pedestrian bridge, an atmospheric pressure sensor obtaining a second atmospheric pressure value of the mobile electronic device, and a controller. The controller calculates a correction value of the second atmospheric pressure value based on the first atmospheric pressure value.
HIGH SENSITIVITY PRESSURE SENSOR PACKAGE
A pressure sensing package includes a sensor chamber and an annular chamber extending about the sensor chamber. A primary diaphragm divides the sensor chamber into a first part receiving a first pressure and a second part including a differential pressure sensor approximately centered with respect to a sensor axis and a first transmission fluid. The first transmission fluid transmits the first pressure to a first differential pressure sensor face. A secondary diaphragm divides the annular chamber into a first part receiving a second pressure and a second part including a second transmission fluid. The second pressure is transmitted to a second pressure sensor face via the secondary diaphragm and the second transmission fluid. The primary and secondary diaphragms are positioned with respect to one another along the sensor axis direction such that pressures other than the first and second pressures acting on the pressure sensor sum to approximately zero.
Compact pressure transducer
The present disclosure includes a pressure transducer comprising: a frame; a cantilevered beam; a resilient beam portion; a signal processing circuit; a wiring terminal; and a support member. The resilient beam portion anchors the cantilevered beam to the frame. The cantilevered beam moves in response to a pressure-induced force applied to the cantilevered beam and the resilient beam portion bends producing a strain within the resilient beam portion. The support member comprises a cavity and the signal processing circuit is entirely installed inside the cavity. There is a strain gauge diffused into, implanted into, and/or affixed to the resilient beam portion. The cavity of the support member includes a first aperture disposed along the first surface of the support member and the inner surface of the frame covers the first aperture.
Compact pressure transducer
The present disclosure includes a pressure transducer comprising: a frame; a cantilevered beam; a resilient beam portion; a signal processing circuit; a wiring terminal; and a support member. The resilient beam portion anchors the cantilevered beam to the frame. The cantilevered beam moves in response to a pressure-induced force applied to the cantilevered beam and the resilient beam portion bends producing a strain within the resilient beam portion. The support member comprises a cavity and the signal processing circuit is entirely installed inside the cavity. There is a strain gauge diffused into, implanted into, and/or affixed to the resilient beam portion. The cavity of the support member includes a first aperture disposed along the first surface of the support member and the inner surface of the frame covers the first aperture.
MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE
A micromechanical component for a capacitive pressure sensor device includes a substrate; a frame structure that frames a partial surface; a membrane that is tensioned by the frame structure such that a self-supporting region of the membrane extends over the framed partial surface and an internal volume with a reference pressure therein is sealed in an airtight fashion, the self-supporting region of the membrane being deformable by a physical pressure on an external side of the self-supporting region that not equal to the reference pressure; a measurement electrode situated on the framed partial surface; and a reference measurement electrode that is situated on the framed partial surface and is electrically insulated from the measurement electrode.
Hysteretic process variable sensor compensation
A process variable transmitter for sensing a process variable of an industrial process includes a process variable sensor configured to sense a current process variable of the industrial process. Measurement circuitry is configured to compensate the sensed process variable as a function of at least one previously sensed process variable characterized by a Hysteron basis function model. Output circuitry provides a transmitter output related to the compensated sensed process variable.
Hysteretic process variable sensor compensation
A process variable transmitter for sensing a process variable of an industrial process includes a process variable sensor configured to sense a current process variable of the industrial process. Measurement circuitry is configured to compensate the sensed process variable as a function of at least one previously sensed process variable characterized by a Hysteron basis function model. Output circuitry provides a transmitter output related to the compensated sensed process variable.
Pressure-responsive sensors and related systems and methods
An audio appliance includes a microphone transducer having an acoustically sensitive region to convert incident acoustic energy to a corresponding output signal and a barometric transducer having a pressure-responsive region to convert an ambient pressure to a corresponding output signal. The audio appliance also has an acoustic housing defining a chamber to fluidly couple the microphone transducer with the barometric transducer, together with a processor and a memory containing instructions. The instructions, when executed by the processor, cause the audio appliance to determine a presence or an absence of an ambient impairment to the microphone transducer based at least in part on the output signal from the barometric transducer. Responsive to a determined presence of an ambient impairment to the microphone transducer, the instructions, when executed by the processor, cause the audio appliance to mitigate effects of the ambient impairment.
Pressure-responsive sensors and related systems and methods
An audio appliance includes a microphone transducer having an acoustically sensitive region to convert incident acoustic energy to a corresponding output signal and a barometric transducer having a pressure-responsive region to convert an ambient pressure to a corresponding output signal. The audio appliance also has an acoustic housing defining a chamber to fluidly couple the microphone transducer with the barometric transducer, together with a processor and a memory containing instructions. The instructions, when executed by the processor, cause the audio appliance to determine a presence or an absence of an ambient impairment to the microphone transducer based at least in part on the output signal from the barometric transducer. Responsive to a determined presence of an ambient impairment to the microphone transducer, the instructions, when executed by the processor, cause the audio appliance to mitigate effects of the ambient impairment.