A temperature compensated differential pressure system is provided. The system includes a pair of flanges affixed together each having a flange diaphragm therein, wherein a plurality of capillary tubes extends between the pair of flanges and a pair of opposed remote diaphragm housings. The remote diaphragm housings include a remote diaphragm therein, wherein the remote diaphragm displaces a fill fluid in pressure capillaries to displace each flange diaphragm to detect a differential pressure between each location of the remote diaphragm housings. A compensating capillary extends from the remote diaphragm housings to an opposing flange diaphragm, wherein the compensating capillary is not in operable communication with the remote diaphragms. As such, any fluctuation in fill fluid volume of the compensating capillaries due to temperature fluctuations is applied to an opposing flange diaphragm to cancel temperature effects from the differential pressure determination.

An optical fiber sensing system, method and apparatus for simultaneously measuring temperature, strain, and pressure are provided and belong to the field of optical fiber sensors. A distributed optical fiber temperature sensor is configured to monitor the temperature, and transmit the monitored temperature to a fiber grating strain and pressure sensor; the fiber grating strain and pressure sensor performs self temperature compensation based on received temperature; and the fiber grating strain and pressure sensor monitors the strain and the pressure. The distributed optical fiber temperature sensor is used to replace a temperature compensation function of the fiber grating strain sensor, and sense temperature distribution of each point along a route. Further, the fiber grating strain and pressure sensor is simplified inside, temperature demodulation is no longer required and speed of obtaining values of the strain and the pressure has been accelerated.

An optical fiber sensing system, method and apparatus for simultaneously measuring temperature, strain, and pressure are provided and belong to the field of optical fiber sensors. A distributed optical fiber temperature sensor is configured to monitor the temperature, and transmit the monitored temperature to a fiber grating strain and pressure sensor; the fiber grating strain and pressure sensor performs self temperature compensation based on received temperature; and the fiber grating strain and pressure sensor monitors the strain and the pressure. The distributed optical fiber temperature sensor is used to replace a temperature compensation function of the fiber grating strain sensor, and sense temperature distribution of each point along a route. Further, the fiber grating strain and pressure sensor is simplified inside, temperature demodulation is no longer required and speed of obtaining values of the strain and the pressure has been accelerated.

A pressure sensor device includes an electrically insulative substrate, a base electrode layer, spacer portions, a guard electrode layer, and a membrane plate. A sensing electrode portion and monitoring electrode portions are located on the membrane plate and face the substrate. In a case where the monitoring electrodes are mounted on a circuit board, the monitoring electrodes detect at least one of stress or strain occurring in or on the spacer portions.

The present invention discloses a residual pressure measurement system for a MEMS pressure sensor with an F-P cavity and method thereof, the measurement system includes a low-coherence light source, a 3 dB coupler, a MEMS pressure sensor, an air pressure chamber, a thermostat, a pressure control system, a cavity length demodulator, an acquisition card and a computer. The measurement method comprises: performing cavity length measurement by using the reflecting light by the pressure control system at two temperatures, respectively, so as to calibrate the MEMS pressure sensor and establish a relationship between the absolute phase of a monochromatic frequency and the external pressure; performing linear fitting to the two measurement data to obtain all the external pressure when the cavity length of two measurement data are equal to each other, and substituting the theoretical equation for calculation to obtain the residual pressure under the flat condition of the diaphragm.

The present invention discloses a residual pressure measurement system for a MEMS pressure sensor with an F-P cavity and method thereof, the measurement system includes a low-coherence light source, a 3 dB coupler, a MEMS pressure sensor, an air pressure chamber, a thermostat, a pressure control system, a cavity length demodulator, an acquisition card and a computer. The measurement method comprises: performing cavity length measurement by using the reflecting light by the pressure control system at two temperatures, respectively, so as to calibrate the MEMS pressure sensor and establish a relationship between the absolute phase of a monochromatic frequency and the external pressure; performing linear fitting to the two measurement data to obtain all the external pressure when the cavity length of two measurement data are equal to each other, and substituting the theoretical equation for calculation to obtain the residual pressure under the flat condition of the diaphragm.

An apparatus includes a casing defining a fluid flow channel, the casing including one or more diaphragms each defining a portion of the fluid flow channel, a strain gauge disposed on one of the one or more diaphragms, the strain gauge having a characteristic responsive to a pressure of fluid in the fluid flow channel, a temperature-sensitive circuit element disposed on one of the one or more diaphragms, the temperature-sensitive circuit element having a characteristic responsive to a temperature of the fluid in the fluid flow channel, and temperature compensation circuitry electrically coupled to the strain gauge and to the temperature-sensitive circuit element.

A pressure sensor includes a cylindrical case defining an inner space in communication with an outer space; a pressure detector provided in the inner space and configured to detect a gauge pressure of a target fluid; an atmospheric pressure detector configured to detect an atmospheric pressure; and an electronic component configured to calculate an absolute pressure of the target fluid on a basis of the gauge pressure and the atmospheric pressure. The absolute pressure is obtained without requiring airtightness of the case between the inner space and the outer space, and thus, there is no requirement for a seal member to be included between the inner space and the outer space.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.