A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.

A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.

Aspects of the present disclosure describe techniques for measuring collision rate with spatial filtering of scattered light. For example, a method for characterizing vacuum in a chamber is described that includes generating, inside the chamber, a potential well having a single, shallow potential region within which an ion is trapped, the shallow potential region having a lowest potential of the potential well, optically monitoring the ion within the potential well, detecting, based on the optically monitoring, a movement of the ion away from the shallow potential region in response to a collision with a background gas, and determining a pressure inside the chamber based on a rate of detected movements of the ion.

Aspects of the present disclosure describe techniques for measuring collision rate with spatial filtering of scattered light. For example, a method for characterizing vacuum in a chamber is described that includes generating, inside the chamber, a potential well having a single, shallow potential region within which an ion is trapped, the shallow potential region having a lowest potential of the potential well, optically monitoring the ion within the potential well, detecting, based on the optically monitoring, a movement of the ion away from the shallow potential region in response to a collision with a background gas, and determining a pressure inside the chamber based on a rate of detected movements of the ion.

A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.

A method determines a total velocity average cross-section parameter σ.sub.totν in a relationship of the form Γ.sub.loss(U)=n.sub.bσ.sub.totν.Math.ƒ(U, U.sub.d), where: Γ.sub.loss(U) is a rate of exponential loss of sensor atoms from a cold atom sensor trap of trap depth potential energy U in a vacuum environment due to collisions with residual particles in the vacuum environment; n.sub.b is a number density of residual particles in the vacuum environment; U.sub.d is a parameter given by $U_d=\sqrt{2k_{B}T/m_{\mathrm{bg}}}\frac{4\pi {\hslash }^2}{m_t.Math.{\sigma }_{\mathrm{tot}}v.Math.}$
which relates the masses of the sensor atoms m.sub.t and residual particles m.sub.bg to the total velocity average cross-section parameter

A method determines a total velocity average cross-section parameter σ.sub.totν in a relationship of the form Γ.sub.loss(U)=n.sub.bσ.sub.totν.Math.ƒ(U, U.sub.d), where: Γ.sub.loss(U) is a rate of exponential loss of sensor atoms from a cold atom sensor trap of trap depth potential energy U in a vacuum environment due to collisions with residual particles in the vacuum environment; n.sub.b is a number density of residual particles in the vacuum environment; U.sub.d is a parameter given by $U_d=\sqrt{2k_{B}T/m_{\mathrm{bg}}}\frac{4\pi {\hslash }^2}{m_t.Math.{\sigma }_{\mathrm{tot}}v.Math.}$
which relates the masses of the sensor atoms m.sub.t and residual particles m.sub.bg to the total velocity average cross-section parameter

The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.

Aspects of the present disclosure describe techniques for measuring collision rate with spatial filtering of scattered light. For example, a method for characterizing vacuum in a chamber is described that includes generating, inside the chamber, a potential well having a single, shallow potential region within which an ion is trapped, the shallow potential region having a lowest potential of the potential well, optically monitoring the ion within the potential well, detecting, based on the optically monitoring, a movement of the ion away from the shallow potential region in response to a collision with a background gas, and determining a pressure inside the chamber based on a rate of detected movements of the ion.

Aspects of the present disclosure describe techniques for measuring collision rate with spatial filtering of scattered light. For example, a method for characterizing vacuum in a chamber is described that includes generating, inside the chamber, a potential well having a single, shallow potential region within which an ion is trapped, the shallow potential region having a lowest potential of the potential well, optically monitoring the ion within the potential well, detecting, based on the optically monitoring, a movement of the ion away from the shallow potential region in response to a collision with a background gas, and determining a pressure inside the chamber based on a rate of detected movements of the ion.