An integrated fault monitoring apparatus for electrical devices has an internal fault detector for detecting transient pressure surges within the electrical device, a pressure relief valve for allowing release of pressure during normal operating conditions of the electrical device, a temperature indicator for indicating that an operating temperature of the electrical device has gone above a predetermined threshold, and/or a sudden pressure relief device for allowing air to escape from the electrical device in the event of a sudden and significant increase in pressure within the electrical device. Methods of using the apparatus are provided.

A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f.sub.LOW (Hz) defined by Expression (1), where a width (m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.
f.sub.LOW=k.Math.(G.sup.2/V)(1)

A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f.sub.LOW (Hz) defined by Expression (1), where a width (m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.
f.sub.LOW=k.Math.(G.sup.2/V)(1)