A microelectromechanical pressure sensor includes a monolithic body of semiconductor material having a front surface. A sensing structure is integrated in the monolithic body and has a buried cavity completely contained within the monolithic body at the front surface. A sensing membrane is suspended above the buried cavity and is formed by a surface portion of the monolithic body. Sensing elements of a piezoresistive type are arranged in the sensing membrane to detect a deformation of the sensing membrane as a result of a pressure. The pressure sensor is further provided with a self-test structure integrated within the monolithic body to cause application of a testing deformation of the sensing membrane in order to verify proper operation of the sensing structure.

An electrode pair that forms a pressure-sensitive capacitance Cx in the central portion of a diaphragm is called a first electrode pair (pressure-sensing electrode pair), and another electrode pair that forms a reference capacitance Cr in the circumferential portion of the diaphragm is called a second electrode pair (reference electrode pair). The ratio Cx/Cr of a change Cx in the pressure-sensitive capacitance Cx, which is obtained from the pressure-sensing electrode pair at the time of evacuation, to a change Cr in the reference capacitance Cr, which is obtained from the reference electrode pair at the time of evacuation, is calculated as an index for malfunction detection . Then, the index for malfunction detection thus calculated is compared with the reference value ref, which represents the index observed during normal operation, and whether deformation due to a cause other than pressure has been generated in the diaphragm is determined.

A sensor device changes a supply voltage, and examines whether output signals of a signal processing circuit including a pressure signal and a temperature signal change in a manner that follows the supply voltage change caused by a voltage variation control unit, for a determination of whether a signal processing circuit is normal or abnormal.

A pressure measuring arrangement is proposed. The pressure measuring arrangement includes a first MEMS pressure sensor arranged on a carrier, and also a second MEMS pressure sensor arranged on the carrier. Furthermore, the pressure measuring arrangement includes an integrated circuit arranged on the carrier, the integrated circuit being coupled to the first MEMS pressure sensor and the second MEMS pressure sensor.

A position sensor malfunction determination apparatus includes a determination unit and a controller. The determination unit is configured to perform a determination relating to electricity supply failure in a position sensor. The controller is configured to perform a fail-safe control. The determination unit is configured to determine whether each of conditions (A) and (B) is established, in a preliminarily determination before occurrence of the electricity supply failure in the position sensor is finally determined. The determination unit is configured to determine that the position sensor has a probability of the electricity supply failure when both the conditions (A) and (B) are determined to be established in the preliminarily determination. The controller is configured to execute, when the determination unit determines that the position sensor has the probability of the electricity supply failure, the fail-safe control before the occurrence of the electricity supply failure in the position sensor is finally determined.

A system for testing and validating the performance of a pressure sensor includes a test fixture operatively connected to the pressure sensor, and the pressure sensor is configured to identify a fluid pressure relative to an atmospheric pressure. A microcontroller is in electrical communication with the test fixture and the pressure sensor, and the microcontroller is configured to cause the test fixture to introduce air and/or vapor through the pressure sensor at a known fluid pressure. The microcontroller is also configured to receive the identified fluid pressure from the pressure sensor, the identified fluid pressure being based on the air and/or vapor flowing through the pressure sensor. A power source is in electrical communication with the microcontroller, and a display is in electrical communication with the microcontroller. The display is configured to display results to a user, the results comprising the determination of the performance of the pressure sensor.

A system and method for detecting faulty engine anti-ice sensor is disclosed and may include obtaining first pressure data representing a first pressure over a period of time at a first engine anti-ice pressure sensor on an aircraft engine. The method may further include obtaining second pressure data representing a second pressure over the period of time at a second engine anti-ice pressure sensor on the aircraft engine. The method may also include generating a variance value based at least partially on a variance of a difference between the first pressure data and the second pressure data. The method may include providing an indication that liquid is within the first engine anti-ice pressure sensor or the second engine anti-ice pressure sensor when the variance value exceeds a threshold.

A pressure sensor may monitor a first resistance value of a first resistor and a second resistance value of a second resistor. The first resistor and the second resistor may be sensing elements of a sensing component of a pressure sensor. The pressure sensor may determine, based on a difference between the first resistance value and the second resistance value satisfying a threshold, that a measurement from the sensing component is unreliable. The pressure sensor may perform, based on determining that the measurement from the sensing component is unreliable, an action associated with the pressure sensor.

A micromechanical piezoresistive pressure sensor includes a diaphragm configured to mechanically deform in response to an applied load, a sensor substrate located on the diaphragm, and a number of piezoresistive resistance devices located on the sensor substrate. The piezoresistive resistance devices are arranged in a first planar array defining a grid pattern having two or more rows, each row being aligned in a first direction. The piezoresistive resistance devices are configured to be electrically connected in a number of bridge circuits, whereby the piezoresistive resistance devices in each row is electrically connected in an associated bridge circuit. A method of using the micromechanical piezoresistive pressure sensor is also disclosed.

A aircraft health management system for identifying an anomalous signal from one or more air data systems (ADS) includes one or more of a frequency processor, configured to provide a spectral signal that is representative of a frequency content of the first ADS signal, a noise processor, configured to provide a noise signal that is representative of a noise level of the first ADS signal, and a rate processor, configured to provide a rate signal that is representative of a rate of change of the first ADS signal. The aircraft health management system also includes a comparator configured to provide a differential signal between the first ADS signal and the second ADS signal, and a prognostic processor configured to determine if the ADS signal is anomalous by comparing values representative of a flight condition signal, the differential signal, and the spectral, noise, and/or rate signals.